JEOL JSPM-5200 Instructions Manual page 118

■ Setting the advanced mode param
Below is the procedure for setting parameters for topography observation. Specify each
parameter according to the following procedure.
1.
Click on the
from the pull-down menu.
2.
Click on the
from the pull-down menu.
This is the parameter that determines the scan speed. Naturally, this parameter
should be
specimen. Here, set it to 100.00 us provisio
3.
Click on the
pull-down menu.
The AC AFM observation mode (Normal, MFM, VE-AFM, or SKPM) can be
selected from this selection box. Selectable modes depend on the attachments
connected. Selecting Normal sets the system to topography mode.
4.
Click on the
pull-down menu.
Doing so sets the system to the AC/Phase/FMD feedback detection mode.
5.
Click on the Size box. When the numerical value is highlighted, enter 1 um
using the keyboard and finalize the numerical value by pressing the Tab key.
Or, click on the
value close to 1.000 um.
6.
Click on the Bias/V box. When the numerica
u sing the keyboard and finalize the numerical value by pressing the Tab key.
7.
Click on the
from the pull-down menu.
TMPM5200-2
button in the Acquisition selection box and select 512 × 512
button in the Clock/ms selection box and select 100.00 us
changed according to the observation area and the unevenness of the
button in the Mode selection box and select Normal from the
button in the STM/AFM selection box and select AC from the
button in the Size selection box and select a numerical
The size to be set depends on the scanner used. Specify an appropriate value
according to the observation area you wan
button in the Fback Filter/Hz selection box and select 1.0
５ MEASUREMENT OPERATION
eters
nally.
t to observe.
l value is highlighted, enter 0
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