JEOL JSPM-5200 Instructions Manual page 392

Scanning probe microscope
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6 ANALYSIS OPERATION
• Rz On/Off
The red and blue letters 1 to 5 displayed on the preview screen are the extraction
positions in 10-point average roughness (Rzjis) analysis. Whether this extraction
position is to be displayed or not can be set by selecting Rz off or Rz on.
Data Information
Information about the analysis image (title, measurement mode, measurement parameter)
is displayed.
Select Area
When an analysis area is selected, the position coordinate in the upper left corner of the
area, horizontal width and vertical width are displayed.
Image Information/Selected Area Information
The entire analysis image, result of surface roughness analysis in a selected area, and
histogram/cumulative percentage are displayed.
Refer to Sect. 6 .7.1, "Profile" for the method of roughness analysis.
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TMPM5200-2

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