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2 SPECIFICATIONS AND INSTALLATION REQUIREMENTS
2.4
STANDARD INSTALLATION DIAGRAM
Installation Room
Floor space:
Ceiling:
Entrance:
When an optional evacuation system is installed, it is necessary to provide a space
of 500 mm or more between the rear of the instrument and the wall of the room.
Typical Installation Layout
2-6
2,500 mm (W) × 3,000 (D) or larger
2,000 mm or higher
800 mm (W) × 1,800 mm (H) or larger
Air
compressor
７１０
３０００
２５００
Operation unit
Minimum 500
Main unit
５７０
71０
0
500
Minimum 800
Computer
1000
Unit: mm
TMPM5200-2
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