JEOL JSPM-5200 Instructions Manual page 164

■ Obser
vation of an image
1.
T o start scans, click on the Scan button of t
The following images will be obtained.
2.
Specify the SPM parameters for usual operation so that yo
o ptimum topography image.
3.
Increase the input sensitivity of the lock-in amplifier (from 50 mV to 100 nV
direction) using the SENSITIVITY setting key (▼) in the range in which the
signals from the lock-in amplifier do not saturate.
TMPM5200-2
(Topography
The area in which Acosφ (capacitance image) becomes white is the one in
which capacitance is large.
he SPM Parameters window.
Acos φ
Topography
(Capacitance
image) image)
５ MEASUREMENT OPERATION
u can obtain an
5-101