Table of Contents
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8.1
STORAGE .......................................................................................................... 8-1
8.1.1
Instrument................................................................................................... 8-1
8.1.2
Cantilever ................................................................................................... 8-1
8.1.3
Handling the Instrument............................................................................. 8-1
8.1.4
Maintenance Parts ...................................................................................... 8-1
8.2
VIBRATION ISOLATOR .................................................................................. 8-2
8.2.1
Compressor （optional）.............................................................................. 8-2
8.2.2
Vibration-Isolation Table............................................................................ 8-2
8.3
SPM HEAD ........................................................................................................ 8-3
8.3.1
Laser Beam Focusing ................................................................................. 8-3
8.3.2
Mirror Angle Adjustment ........................................................................... 8-4
8.4
CCD CAMERA (OPTIONAL) .......................................................................... 8-5
8.4.1
Installing the CCD Camera ........................................................................ 8-5
8.4.2
Replacing the Source Lamp........................................................................ 8-8
8.5
LOCATIONS OF PORTS................................................................................. 8-10
8.6
USER PORTS................................................................................................... 8-10
8.7
PIN CONNECTION......................................................................................... 8-11
8.8
TOOL SET (OPTIONAL)................................................................................ 8-12
TMPM5200-2
8
GENERAL
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