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4.1
PREPARATION FOR STM OBSERVATION
4.1.1
Outline
This section outlines the preparation for SPM observation using the JSPM − 5200, from
SPM-head unit setting to specimen loading.
1.
Attach an appropriate scanner holder to the SPM base according to the
scanning area to be observed.
2.
Attach the SPM head unit to the SPM base.
TMPM5200-2
4 PREPARATION FOR OBSERVATION
4-1
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