Measurement Operation - JEOL JSPM-5200 Instructions Manual

MEASUREMENT OPERATION

5.1 BASIC USAGE OF WinSPM............................................................................. 5-1
5.1.1 Before use................................................................................................... 5-1
5.1.2 Glossary...................................................................................................... 5-1
5.1.3 Setting the User Name................................................................................ 5-4
5.2 STARTING THE SCAN (MEASUREMENT ) MODE ..................................... 5-7
5.2.1 Selecting SPM Operation Mode................................................................. 5-7
5.2.2 SPM Parameters Window (Measurement Setting Window)....................... 5-9
5.2.3 Shortcut Icons........................................................................................... 5-11
5.2.4 Software Oscilloscope.............................................................................. 5-12
5.2.5 Lock-In Amplifier .................................................................................... 5-13
5.2.6 Specimen Temperature Controller (for JSPM-5200)................................ 5-18
5.2.7 CCD Camera ............................................................................................ 5-18
5.2.8 Digital Control MFM unit ........................................................................ 5-19
5.3 PREPARING FOR MEASUREMENT ............................................................ 5-20
5.3.1 Starting the System in Measurement Mode.............................................. 5-20
5.3.2 Resetting the Controller............................................................................ 5-21
5.3.3 Confirming Settings of the Device Setup Dialog Box ............................. 5-21
5.3.4 Opening the SPM (Measurement) Parameters Window........................... 5-21
5.3.5 Checking the Stage Position ..................................................................... 5-22
5.3.6 Setting an Optional Oscilloscope ............................................................. 5-23
5.4 AC AFM MODE .............................................................................................. 5-25
5.4.1 AC Mode Tab ........................................................................................... 5-25
5.4.2 MFM Tab.................................................................................................. 5-36
5.4.3 VE-AFM Tab ............................................................................................ 5-41
5.4.4 SKPM Tab ................................................................................................ 5-45
5.4.5 Advanced Tab ........................................................................................... 5-54
5.5 CONTACT AFM MODE ................................................................................. 5-80
5.5.1 Contact Mode Tab .................................................................................... 5-80
5.5.2 Viscoelasticity Tab.................................................................................... 5-91
5.5.3 Lateral Modulation FFM Tab ................................................................... 5-95
5.5.4 Electrostatic Force Tab ............................................................................. 5-99
5.5.5 Advanced Tab ......................................................................................... 5-102
TMPM5200-2
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