JEOL JSPM-5200 Instructions Manual page 310

■ Lithography
This opens the Lithography dialog that you should set for applying this instrument to
lithography.
Settings
Specify the parameters for lithography in this frame of the Lithography window:
Preamp Gain
Current/nA (for STM mode)
Reference/V (for AFM mode)
Sample Bias/V
Toggle Sample/Hold
Add External X, Y, or Z Signal
Time Period/ms
TMPM5200-2
Parameters
Specify the gain for preamplifier in this selection box.
Specify the tunneling current in this input box.
Specify the reference voltage in this input box.
Specify the bias voltage to the sample in this input box.
Select whether or not the feedback circuit should be turned
on by checking this box.
Select whether or not the external signal should be added by
checking this box.
Specify the duration for applying Current/nA or Reference/V
in this input box. If 0.0 is specified, Current/nA or
Reference/V is applied while pressing the left mouse button.
This function is in effect only for Trace mode.
５ MEASUREMENT OPERATION
Description
5-247