JEOL JSPM-5200 Instructions Manual page 210

3.
Click on the
f rame; then select 5 from the pull-down menu.
You can monitor the Log I signal.
■ Approachi
ng
Mov e the cantilever closer to the specimen
b ecomes the value specified in Current/nA. The cantilever movement automatically stops
when the tunneling current reaches the value specified in Current/nA.
The following is the procedure for approaching.
1.
C lick on the Probe button on the SPM Parameters window
The Tip window will appear.
2.
Specify each parameter according to the following procedure.
a.
Double-click on the Current/nA input box. When the value in the box is
highlighted, enter 1 using the keyboa
to finalize the value.
b.
Click on the
1.0 from the pull-down menu.
Now, the tunneling current and the response speed of the feedback circuit, which
are used for approach
colliding with the specimen, set Feedback Filter/Hz to a value higher than that for
image observation.
c.
Deselect Tip Retract by clic
3.
B efore performing approaching, confirm that the voltage applied to the Z
scan
If th
judged that the approaching has alr
start even if you click on the Approach On button on the Tip window.
In such a case, check the following points.
TMPM5200-2
button in the Sensitivity selection box in the Channel B
button in the Feedback Filter/Hz selection box; then select
ing, have been determined. To prevent the cantilever from
ner reaches the maximum voltage (+150 V or 200 V).
e voltage applied to the Z scanner does not reach the maximum vo
until the value of the tunneling current
rd. Press the Tab key on the keyboard
king on it.
eady been completed. So, approaching will not
５ MEASUREMENT OPERATION
.
ltage, it is
5-147