JEOL JSPM-5200 Instructions Manual page 142

Scanning probe microscope
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Like the setting of the first po
from that of the first image due to drift). When you set the second re
the drift speed and direction are automatically computed
6.
Check the Enable Correction checkbox by clicking on it.
Drift compensation is applied.
You can specify up to three points for drift compensation. When specifying the third
point, carry out image measurement and reference point specification once again.
TMPM5200-2
int, specify the picked-up part (the position may differ
5 MEASUREMENT OPERATION
ference point,
.
5-79

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