JEOL JSPM-5200 Instructions Manual page 464

７ APPENDIX
Nanosensor
Mode
Contact mode
Contact mode
AC mode
(High frequency)
AC mode
(High frequency)
AC mode
(Low frequency)
AC mode
(Low frequency)
* Material is N-type silicon single-crystal. Resistivity is 0.01 to 0.025 Ωcm.
* An "R" at the end of the part name indicates an aluminum-coated (on the back) item. The thickness of the
coating is about 30 nm.
* Number of cantilevers in one package is 16, 50 or 385.
* The nominal value of the tip diameter is 10 nm.
Mode
Magnet mode
* Magnetic coating: Co-Cr-Ta/Random/50 nm thick
EFM sensor
SUPER SHARP sensor
SSS-NCH
SSS-SEIH
HIGH ASPECT
RATIO sensor
DIAMOND coat sensor
1
Cr (1st layer) and PtIr
2
A sharp sensor with a tip radius of 2 nm (typical)
3
Suitable for measurement of sidewalls with an aspect ratio of 1:7 (typical)
4
A hard diamond-coated sensor with a resistivity of 0.1 to 0.2 Ωcm
7-16
Thick
Part
ness
name
( µ m)
CONT
CONTR
NCH
NCHR
NCL
NCLR
Thick
Part
-ness
name
( µ m)
MFMR
Thick-
Part name
1
2
3
4
(2nd layer) coated conductive sensor
5
Width Length
( µ m) ( µ m)
1 − 3 23 − 28 450
1 − 3 23 − 28
450
3 − 5 23 − 38 125
3 − 5 23 − 38
125
6 − 8 30 − 45 225
6 − 8 30 − 45 225
Width Length
( µ m) ( µ m)
2 − 4 20 − 35
225
Width Length
ness
( µ m) ( µ m)
( µ m)
2 − 4 20 − 35
3 − 5 23 − 38
4 − 6 30 − 35
3 − 5 23 − 38
2 − 4 20 − 35
Reso-
Spring
nance
constant
frequency
(N/m)
(kHz)
0.2 13
0.2 13
42 330
42 330
48 190
48 190
Reso-
Spring
nance
constant
frequency
(N/m)
(kHz)
2.8 75
Spring Resonance
constant frequency
(N/m)
225 28
125 42
225 15
125 42
225 28
Tip
diame-
ter (nm)
15
Guaran-
teed
value
15
15
15
15
15
Tip
diame-
ter (nm)
15
(Before
being
coated)
(kHz)
75
330
130
330
75
TMPM5200-2