Digital Control Mfm Unit - JEOL JSPM-5200 Instructions Manual

The CCD Camera System window can also be opened either by Pressin
while holding down the Ctrl key on the keyboard or by clicking on the CCD camera
icon.
5.2.8

Digital Control MFM unit

Connect the optional digital MFM unit (TM-26060) to the SPM controller. You can use
the "line by line lift" mode, thus enabling MFM measurement to be implemented under a
vacuum in a stable manner. In the line-by-line lift mode, the surface topography obtained
by the first line scan is recorded. The topography should be traced with the probe lifted
up. The digital MFM unit is used for this purpose.
When the digital MFM unit is in use (in the line-by-line lift mode), signal feedback is
performed using the digital signal processor (DSP). In this case, feedback signal is in the
digital form.
In the modes other than line-by-line lift mode, however, feedback signal is dealt
with in the analog form even if the digital MFM unit is incorporated.
■ Setting the software
To open the CCD Camera System window, click on SPM Scan in the main
menu bar to open the pull-down menu; click on Device Setup to open the
Device Setup dialog box; then check the Line by Line Lift (L-Lift) box.
TMPM5200-2
５ MEASUREMENT OPERATION
(CCD camera icon)
g the V key
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