JEOL JSPM-5200 Instructions Manual page 371

Scanning probe microscope
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The equation used for computing the 10-point average roughness Rz stipulated in
JIS B0601:1998 has been expanded to apply to a 3-dimensional plane. (The
10-point average roughness itself is not stipulated in JIS B0601:2001.)
It is stipulated as the "sum of the average value of the absolute values of the devia-
tion from the average height Z
and the fifth deviation, and the average value of the absolute values of the deviation
between the smallest deviation and the fifth deviation.
Rzjis
Z
,Z
p1
Z
,Z
v1
• Maximum difference between high and low (Rz)
Stipulated as the "difference between the maximum value Z
value Z
• S: Surface area
The net surface area of the analysis plane is computed as the sum of the vector
product of a finely divided surface.
• S ratio: Surface area ratio
The ratio of the net surface area to the surface area S
assumption that the analysis plane is flat (ideal), is computed.
Analysis Results in Line Plot (Table at right center of screen)
Results of analyses in each line plot are displayed.
The type and method of analysis are the same as Single profile.
TMPM5200-2
+
+
Z
Z
Z
p
1
p
2
p
3
=
,Z
,Z
,Z
:
Deviation values between the largest deviation and the fifth
p2
p3
p4
p5
deviation in the analysis plane
The corresponding positions are displayed using red char-
acters on the preview screen.
,Z
,Z
,Z
:
Deviation values between the smallest deviation and the
v2
v3
v4
v5
fifth deviation in the analysis
The corresponding positions are displayed using blue char-
acters on the previous screen.
of the height z, on the analysis screen".
min
in the analysis plane between the largest deviation
0
+
+
+
+
Z
Z
Z
Z
p
4
p
5
v
1
5
=
Rz
Z
Z
max
min
S
=
S
ratio
S
0
6 ANALYSIS OPERATION
+
+
+
Z
Z
Z
v
2
v
3
v
4
v
5
and the minimum
max
, which is based on the
0
6-41

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