Overall Configuration - JEOL JSPM-5200 Instructions Manual

Scanning probe microscope
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3 CONFIGURAT ON AND DESCRIPTIONS OF COMPONENTS
I
The name, functions and layout of each unit of this instrument are given in this chapter.
Please refer to this chapter when you read the operating procedures below.
3.1

OVERALL CONFIGURATION

This instrument is composed of a Main unit, a Operation unit (including SPM control
and computer system) and an air compressor.
Air compressor
Main unit
Operation unit
TMPM5200-2
3-1

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