JEOL JSPM-5200 Instructions Manual page 304

• SV
You can perform SV measurement only in the STM mode.
In SV m
and specimen by sweeping the bias voltage with keeping the STM feedback on.
The position at which SV measurement is carried out is determined by using the
Position function in the Tip window.
• Clock/ms, Low Voltage/V, High Voltage/V, Ramp Direction, Number to Average,
Number of Points and SPS Mode
• Source
TMPM5200-2
easurement, you can measure the change of the distance (S) between the tip
Specify these items in the same way as for IV.
Select Topography for source because you measure the change of the distance
between the tip and specimen by sweeping the bias voltage in SV measure-
ment.
５ MEASUREMENT OPERATION
5-241