Advanced Tab - JEOL JSPM-5200 Instructions Manual

５ MEASUREMENT OPERATION
5.5.5 Adva nced Tab
The Advanced tab window is used for setting details for contact AFM mode. You can set
details and you have to fill in all parameters in the tab window.
■ Checking b
efore approaching
Befo re performing approaching, confirm whether the prepa
"Preparing Approach" is completed using the following items.
• Ha
s coarse approaching been executed in such a way that the d
ca ntilever tip and the specimen surface is 0.3 mm or less?
• Is th
e Z stage position in the approaching-possible range?
• Is th
e AFM value of the AFM amplifier unit about –2.0 V?
• Is the FFM value of the AFM amplifier unit about 0 V?
■
Setting par ameters
Here, we discuss
param eter in the Advanced tab window according to the following procedure.
1.
Cl ick on the
fro m the pull-down menu.
2.
Cl ick on the
f rom the pull-down menu.
T his is the parameter that determines the scan
should be changed according to the observation area and the unevenness of the
specimen. Here, set it to 100.00 us provisionally.
5-102
Advanced tab window
After checking these points, set the indicator selection knob on the AFM
amplifier unit to AFM.
the procedure to set parameters for shape measurement. Specify each
button in the Acquisition selection box and select 512 × 512
button in the Clock/ms selection box and select 100.00 us
ration procedure in Sect. 5.3,
istance between the
speed. Naturally, this parameter
TMPM5200-2