Electrostatic Force Tab - JEOL JSPM-5200 Instructions Manual

5.5.4 Electrostatic Forc
You can perform electrostatic force measurement (capacitance measurement SCFM) by
additionally installing the optional Model 7265 Lock-in Ampl
available). When the lock-in amplifier is connected to the SPM controller, you have to
set the instrument using the software to display the tab window for electrostatic force
measurement.
H ere, we discuss how to observe capacitance measurement SCFM.
■
Affixin g a specimen
In order to observe an electrostatic force image (capacitan
correctly, it is essential th
d efinitely secured. Affix the specimen firmly to the specimen stub using conductive
p as te instead of using double-faced tape.
■ Selecting
a cantilever
In capacitance measurement you detect a component in 3F of the contact resonance
frequency of the cantilever. It is necessary to select 80 kHz or less as the primary
reson ance frequency so that the resonance frequency does not exceed 250 kHz at 3F.
The recommended cantilever is the Nanosensor made CONT PtIr 5 (oscillation
frequ ency 13 kHz, spring constant 0.2 N/m).
■ Checking
before approac
Befo re performing approaching, affix specimen, adjust the laser and photodiode, and
then perform coarse approaching in the way you do when performing usual Contact
AFM measurement.
■ Observation of a topography image
Observe a topography image of the specimen surface, and confirm that you can obtain an
optimum image. Then retract the tip.
TMPM5200-2
e Tab
at conductivity between the specimen and the specimen stub is
hing
５ MEASUREMENT OPERATION
ifier (Model 5110 is not
ce measurement SCFM)
Specimen
Conductive paste
Specimen stub
5-99