JEOL JSPM-5200 Instructions Manual page 311

５ MEASUREMENT OPERATION
Vector S ettings
Specify parameters for Vector mode in this frame
Max. Tip Speed/(nm/s)
Point Separation/nm
Ope n
Sav e
Define
Write Mo de
Selec t the writing mode for lithography.
Vector
Trace
• Vector mode
After selecting Vector, click on the Write button; then the tip will move along the
pattern that has already been defined.
• Tr
ace mode
After selecting Trace, click on the Write button; then e
the m
Form of F ile
A pattern-definition file is saved in ASCII (American Standard Code for Information
Inter change) form, as shown below. This file itself can be edited using the Note pad of
Wind ows98TM.
WinSPM Version 4.04
Vector saved on 9/9/1997 at 16:43:15
Vector created
*
*Sta rt comment lines with a '＊'
*
x1
165 355
252 437
5-248
Parameters
Parameters
Define the pattern using the Open or Define button prior to executing lithogra-
phy.
ouse on the Display Window while pressing the mouse button.
If 0 is specified in Time Period/ms, the same condition is retained while
pressing the left mouse-button.
The trajectory (pattern) of the mouse movement appears on the Display
Window.
on 9/9/1997 at 16:26:02
y1 - x1 y1: Bias
349 250 -10.000
4 30 344 -10.000
of the Lithography window.
Description
Specify the speed of the tip movement in this input box.
Specify the step gap for the tip movement in this input box.
A pattern is defined and the data stored in the file is loaded
when you click on this button.
The defined pattern is saved in the file when you cl
this button.
A designed pattern is defined when you click on this button.
Description
When this radio button is selected, the tip moves along the
pattern that has already been defined.
When this radio button is selected, lithography is performed
by manual operation of the mouse.
Feedback Gain
1.000 1.00
1.000 1.00
xecute lithography by moving
Hold External
1 0
1 0
ick on
TMPM5200-2