JEOL JSPM-5200 Instructions Manual page 368

６ ANALYSIS OPERATION
The 10-point average roughness is stipulated as the "sum of the average value of the
absolute values of the deviation from the centerline between the largest deviation
and the fifth deviation, and the average value of the absolute values of the deviation
between the smallest deviation and the fifth deviation.
Z
Rzjis
• Maximum difference between high and low (Rz)
Stipulated as the "difference between the maximum value Z
value Z
This value is also shown on the vertical axis of the line plot.
• Length of the line plot (Length)
Indicates the length L of the line plot. This value is also shown on the horizontal
axis of the line plot.
Results of performing measurement on the line plot
The results of performing measurement on the line plot are displayed.
In measurement analysis, the
form a set, enabling you to perform a total of three measurement analyses. Each set is
identified according to the display color.
Z1:
Z2:
|Z1-Z2|:
Length:
6-38
Z
Z
Z
p4
p3
Z
v4
Z
v2
+ + +
Z Z Z
p 1 p 2 p 3
=
of the height z, on the analysis screen".
min
and
●
Z1
Z1 ●
Height at marker position
●
Height at marker position
■
Absolute value of difference between high and low at the
position and the marker position
■
Distance in the horizontal direction between the
marker position
■
p2
Z
p5
Z
v3
Z
v1
L
+ + +
Z Z Z Z
p 4 p 5 v 1
5
= −
Rz Z Z
max min
markers displayed in the cross-sectional graph
■
Angle
Angle
■
Length
Length
Z
p1
Average line
Z
v5
+ + +
Z Z Z
v 2 v 3 v 4 v 5
and the minimum
max
Z2
Z2
|Z1-Z2|
|Z1—2|
●
marker position and the
●
marker
TMPM5200-2