JEOL JSPM-5200 Instructions Manual page 182

■ I-V Mea
surement Using Conductive Cantilever
The I-V measurement on the surface of a specimen is as commonly used as the
observation of a current image.
Precautions in using cantilever
Use the same type conductive cantilever as for the current image observation in the I-V
measurement. Be sure that there is sufficient conductivity in the cantilever, the cantilever
holder and the specimen stub. In the I-V measurement, a bias voltage is scanned, so an
elec trostatic force is applied to the cantilever. Therefore, if a soft cantilever is used, it
may be b
resulting
should be
I-V measurement
The following is the procedure for I-V measurement.
1.
Observe the contact current image and grab it.
Both a topography image and a current image are usually acquired to determine a
point for measurement, but it is easier to determine the measurement point on a
current image because there are points where no current flow is observed on some
specimens.
2.
Click on the Probe button in the Advanced tab of the SPM Parameters
window.
The Tip window opens.
3.
Click on the Tip Retra
4.
C lick on the Position button in the Tip
The Tip window will close and the Tip position window will open. Move the cursor
to the current image in the Display Window; then the cursor changes to a hand mark.
TMPM5200-2
ent by the electrostatic force during the bias voltage scanning, thus possibly
in incorrect I-V measurement. A hard cantilever such as a silicon cantilever
used for accurate I-V measurement.
ct button to select it.
５ MEASUREMENT OPERATION
window.
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