JEOL JSPM-5200 Instructions Manual page 166

3.
Click on the
p ull-down menu.
You can select measurement modes that are av
viscoelasticity, lateral modulation FFM and electrostatic force measurements. The
types of measurement modes differ depending on the optional devices that are
connected. When you select Normal, you can perform shape measurement mode.
4.
C lick on the Size box. When the numerical value is highlighted, enter 1um
u sing the keyboard and finalize the numerical value by pressing the Tab key.
O r, click on the
value near 1.000 um.
The value to set in Size differs depending on the scanner provided. In practice,
specify an appropriate value according to the observation area you want to observe.
5.
Click on the Bias box. When the numerical value is highlighted, enter 0 using
the keyboard and finalize the numerical value by pressing the Tab key.
6.
Click on the
from the pull-down menu.
Fback Filter/Hz is the parameter that determines the response speed of the feedback
circuit. The larger the specified value is, the faster the response speed becomes, thus
producing a sharp image, but the feedback circuit easily oscillates. Usually, select
the highest speed at which the feedback circuit does not oscillate while watching an
image during scanning.
TMPM5200-2
button in the Mode selection box and select Normal from the
button in the Size selection box and select a numerical
button in the Fback Filter/Hz selection box and select 1.0
５ MEASUREMENT OPERATION
ailable in the contact AFM such as
5-103