JEOL JSPM-5200 Instructions Manual page 219

５ MEASUREMENT OPERATION
■ Drawin
g using the lithography function
Whe n certain values are given to the bias voltage and tunneling current, the specimen
surfa ce structure may cha
oxidization. Lithography has the function to lithograph (write on) the specimen surface
by using this phenomenon.
The lithography function has two modes: Vector and Trace.
The procedure for lithography is shown in the flow chart below.
5-156
nge due to displacement, adsorption of atoms or anode
Y
Define a pattern ?
Define
Vector mode ?
N
OK ?
Y
Save
Start
N
N
Y
Y
Use stored
pattern ?
Ope
N
Write
End
Trace
n
mode
TMPM5200-2