JEOL JSPM-5200 Instructions Manual page 139

５ MEASUREMENT OPERATION
■ Lithography
When certain values are given to the bias voltage and tunneling current, the specimen
surface structure may change due to the displacement or adsorption of atoms.
"Lithography" lets you lithograph (or write on) the specimen surface using this
phenomenon.
In SPM lithography, there are two modes, namely, the vector mode and the trace mode.
The procedure for lithography is shown in the flow chart below:
5-76
Y
Define a pattern ?
Define
Vector mode ?
N
OK ?
Y
Use stored
pattern ?
Save
Start
N
N
Y
Y
Open
N
Write
End
Trace
mode
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