Installation Requirements - JEOL JSPM-5200 Instructions Manual

2.3

INSTALLATION REQUIREMENTS

Dimensions and Weight
Main unit
Operation unit
Air compressor
Installation Room
• Room temperature:
• Humidity:
• Acoustic vibration:
• Floor vibration:
Power Supply
• Capacity:
• Fluctuation:
• Grounding terminal:
• Cable length
Main unit:
High-vacuum evacuation system and evacuation system:
Do not install this instrument in a place where any fluorescent lamps
directly illuminate the SPM head. Fluorescent lamps blink at 100 Hz (if
the line frequency is 50 Hz) or at 120 Hz (if the line frequency is 60 Hz)
and this noise may appear on the displayed image. Concerning the
installation and layout plan, please consult your local JEOL service
personnel.
TMPM5200-2
2 SPECIFICATIONS AND INSTALLATION REQUIREMENTS
Height (mm)
1,150
730
1,450 (monitor included)
530
20 ℃ ± 5 ℃
60% or less
50 dB or less (A mode)
5 µm (5 Hz) or less
Single-phase AC100 V, 50/60 Hz, 1.5 kVA (one
receptacle with a grounding terminal)
When an optional evacuation system is installed, 1.5
kVA × 2 (2 receptacles with grounding terminals)
± 10% or less
100 ohms or less
2.5 m
2.5 m
CAUTION
Width Depth Mass
(mm) (mm) (kg)
710 710 250
570 710 80
290 in diameter 17
2-5