JEOL JSPM-5200 Instructions Manual page 27

■ SPM base unit
The SPM base unit includes a specimen stage, a stage-approach unit and a stage-shift
unit.
Scanner holder
SPM head unit
connectors
Photodiode Y-axis
positioning knob
SPM base
Utility ports
Port for
cooling system
(optional)
Gas inlet/outlet
ports
Specimen stage
approach unit
Utility ports
Specimen stage
The specimen stage is a device on which the scanner holder is mounted. The specimen
stage features a drift-free mechanism in which thermal expansion occurs concentrically,
with the expansion center always kept at the specimen-observation point.
TMPM5200-2
3 CONFIGURAT ON AND DESCRIPTIONS OF COMPONENTS I
SPM head unit guide
Head unit screw
Specimen stage
Specimen stage
coarse-shift knobs
Manual-approach
thumbscrew
3-3