JEOL JSPM-5200 Instructions Manual page 89

５ MEASUREMENT OPERATION
■ Operation flow chart
The following is the flow chart showing operation in the AC mode.
■ Checking b
efore an approach
B efore performing an approach, make sure that preparation has been
c ompleted according to the procedure in Sect. 5.3, "Preparing for
M easurement."
• Is the cantilever for the AC mode properly mounted on the cantilever holder?
• Has coarse approach been executed in such a way that the distance between the
cantilever tip and the specimen surface is 0.3 mm or less?
• Is the
• Is the SUM value of the AFM amplifier unit as negative as possible (–1.0 V to –9.0 V:
where the value depends upon the cantilever used)?
After checking these points, set the indicator selection knob on the AFM amplifier
unit to RMS in the AC mode, and to FMD in the FMD mode.
5-26
Check before approach
Adjust photodiode
position
Set scanning parameters
Adjust cantilever
resonance point
Approach
Image observation
• Settin
g f ilter and loop
gain
• Setting reference
Finish observation
Z stage position within the approachable range?
⇒ Adjusting PD
⇒ Tuning
⇒ Starting approach
Grab image
Store image
⇒ Grabbing
TMPM5200-2