JEOL JSM-IT200 Instructions Manual

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INSTRUCTIONS

JSM-IT200

SCANNING ELECTRON MICROSCOPE

No. ISMIT200-1E

MAR2018_2884

PRINTED IN JAPAN

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Summary of Contents for JEOL JSM-IT200

Page 1 INSTRUCTIONS JSM-IT200 SCANNING ELECTRON MICROSCOPE No. ISMIT200-1E MAR2018_2884 PRINTED IN JAPAN...
Page 3 JSM-IT200 SCANNING ELECTRON MICROSCOPE Please be sure to read this instruction manual carefully, and fully understand its contents prior to the operation or maintenance for the proper use of the instrument.
Page 5 After installation or delivery of the instrument, if the instrument is required for the relocation whether it is within the facility, transportation, resale whether it is involved with the relocation, or disposition, please be sure to contact your JEOL service office. If the instrument is disassembled, moved or transported without the supervision of the personnel authorized by JEOL, JEOL will not be held responsible for any loss, damage, accident or problem with the instrument.
Page 7 Article 7. (Exemption from Liability) JEOL shall not be liable for any damages or losses incurred by you or any third party or for any claim of a third party against you arising out of or in relation to the use of the Licensed Software.
Page 8 Article 10. (Termination) In any of the following event, JEOL may forthwith terminate this Agreement by so notifying you without any prior notification and may claim the damages incurred: Any breach on your part of any of the provisions hereof, (2) Occurrence of seizure or provisional seizure or provisional injunction on your property;...
Page 9 ・ For components that are not JEOL products, like the computer, HDD, memory device, and the like, the warranty start date shall be the date on which the acceptance test is completed after delivery to the customer and the warranty periods established by the respective makers shall apply.
Page 10 Instruments that have been restored after being disposed of or re-sold without prior written notice to and agreement from JEOL. 1.4 Items Not Covered by Warranty ・ cover losses or damage to devices made by any other manufacturer at the customer site even if they are damaged by a malfunction of the JEOL product. ・...
Page 11 Your JEOL product is designed and manufactured with high-quality materials and components which can be recycled and reused. If the product is used for business purposes and you want to discard it, please contact your JEOL dealer, who will advise you about the end-of-life disposal arrangements.
Page 13 If anything is unclear, please contact your JEOL service office. WARNING for Installation Do not attempt to install the instruments by yourself. Installation work requires professional expertise and JEOL is responsible for the installation of the instruments and related attachments purchased from JEOL. Consult your JEOL service office.
Page 14 ◆ General warnings • Do not unlock or remove any covered parts, modify or remove component parts, or dismantle these parts in any way other than their intended use, due to a risk of thermal, electrical or emissive hazards taking place. •...
Page 15 If disassembly or assembly of the column or other section of the instrument is required, contact your JEOL service office. If maintenance work is required, such as parts replacement or cleaning other than for [MAINTENANCE], the customer should not attempt any disassembly or assembly work.
Page 16 O-ring or surrounding metal surfaces. Even a slight scratch or tiny bit of dust can cause degradation of the vacuum. • If there is any damage to the O-ring or O-ring contact surfaces, contact your JEOL service office. ◆ Printed surfaces, such as tables and sheet metal •...
Page 17 Cautions concerning Personal Computer (PC) ◆ General When the following cases happened, data such as hard disk may be broken. We recommend to backing up your data periodically in such as CD-R. • When instrument stopped by power failure and lighting damage. •...
Page 18 ◆ Network • Do not connect the PC directly to the intranet. If you do, this instrument may not work normally. ◆ • Do not upgrade the OS and driver software other than the offered updating program. If you do, the PC or this instrument may not work normally. •...
Page 19 Windows and Display is normally set as follows: When the new user account is created, confirm the settings as follows using the control panel. Screen Resolution Resolutions: 1920×1080 Advanced settings →Monitor Colors True Color (64 bit) Personalize Screen Saver None Power Options Turn off the display Never...
Page 20 EDS unit Safety precautions Warning General warning Do not mount or remove any cables, circuit board, screws or metal covers, or other parts. Unauthorized assembly or disassembly may result in vacuum leaks, malfunction of protective circuits and damage to the instrument. Please contact our service personnel whenever you think a defect has occurred or when you want to relocate the instrument.
Page 21 Precautions for use • The X-ray window of the EDS detector is ultra-thin; do not touch the window or allow objects come into contact with it. The window is so thin that it may break on contact. Window breakage will prevent operation and require that the instrument be sent in for repair.
Page 23  Using JEOL product for an integrated system with other manufacturer’s product Consult your JEOL office. We assume no responsibility for any damages resulting from using the product in combination with other manufacturer’s product without consultation.  Using product in an environment that does not satisfy the installation requirements Consult your JEOL office.
Page 24 CONTENTS GENERAL EXPLANATION OF EACH PART EXPLANATION OF THE OPERATION SECTION （SEM） EXPLANATION OF THE OPERATION SECTION （EDS） BASIC OPERATION APPLICATION OPERATION EDS ANALYSIS PREPARATION OF REPORT OPERATION OF DATA CONTROL SCREEN 10 MAINTENANCE 11 ADMINISTRATOR OPERATION 12 SPECIFICATION 13 GLOSSARY No.
Page 25 GENERAL GENERAL ·············································································· 1-1 SYSTEM PEAK ······································································· 1-2 1.2.1 Detection of characteristic X-ray peaks due to scanning backscattered electrons ··························································································· 1-2 1.2.2 Detection of characteristic X-ray peaks caused by scanning electrons in low-vacuum environment ······································································ 1-2 No.ISMIT200 -1E...
Page 27 The specimen chamber can be installed various detector ports such as EDS, WDS and EBSD. the various MS including maximum 5 axes. Then, can use popular SNS and Chamber Scope CS. Line-up The JSM-IT200 can select the following types depending on the purpose of the customer usage. • JSM-IT200 (BU)： High Vacuum Type •...
Page 28 1.2 SYSTEM PEAK Characteristic X-ray peaks other than the ones of the elements contained at the analysis point may be detected when the electron beam is irradiated on the specimen. They are called system peaks. 1.2.1 Detection of characteristic X-ray peaks due to scanning backscattered electrons Some of the backscattered electrons generated from the specimen collide with structures around the specimen and scatter.
Page 29 EXPLANATION OF EACH PART APPEARANCE ····················································· 2-1 EOS UNIT ··························································· 2-2 2.2.1 Electron gun unit ················································ 2-2 2.2.2 Objective lens aperture ········································ 2-3 2.2.2.a Standard (MAP1) ·················································· 2-3 2.2.2.b Option (MAP3) ····················································· 2-4 2.2.3 Specimen chamber ············································· 2-5 2.2.4 Specimen stage ················································· 2-5 2.2.5 Motor drive stage ···············································...
Page 31 2.1 APPEARANCE EOS unit Specimen chamber Table (Option) Specimen stage (Motor drive unit) Main control panel INo.ISMIT200-1E...
Page 32 2.2 EOS UNIT 2.2.1 Electron gun unit Wehnelt INo.ISMIT200-1E...
Page 33 2.2.2 Objective lens aperture 2.2.2.a Standard (MAP1) X and Y direction fine adjustment knobs used for adjusting the movable aperture. The aperture foil is composed of two (25μm diameter and 50μm diameter), and it can be exchanged according to the purpose of use. X direction fine adjustment knob Y-direction fine...
Page 34 2.2.2.b Option (MAP3) ◆ CAUTION ◆ When selecting the aperture of the movable aperture, be careful not to get your fingers caught in the grip. • By rotating the aperture selection knob clockwise through the 0 →1 →2 →3 positions, you can select an aperture that corresponds to the number.
Page 35 2.2.3 Specimen chamber Specimen stage Mount base for specimen holder 2.2.4 Specimen stage ① X-axis knob The stage moves to this side and the interior. The image moves right and left ② Y-axis knob The stage moves left and right. The image moves up and down.
Page 36 2.2.5 Motor drive stage MP-01260MS MP-01270MSR MP-01280MSZ MP-01290MS5 (Standard) (Option) (Option) (Option) ① ○ ○ ○ ○ X-axis ② ○ ○ ○ ○ Y-axis ③ × ○ × ○ R-axis ④ × × × ○ T-axis ⑤ × × ○ ○...
Page 37 VACUUM MODE LV Switch used for changing over the High-vacuum (HV) mode or Low-vacuum (LV) mode When this switch is ON (switch lamp is lit), the vacuum mode is set to LV. When this switch is OFF, the vacuum mode is set to HV Remarks) It is effective in JSM-IT200(LV), JSM-IT200(LA). INo.ISMIT200-1E...
Page 38 Do not touch the breaker unless you need to If the breaker trips, it indicates a malfunction in the system and you must contact the JEOL support center immediately. This is protection function to prevent over current of rotary pump.
Page 39 2.4 EDS UNIT 2.4.1 Dry SD detector Name Explanation Houses the pre-amp circuit board and the heat dissipation section for the incorporated Peltier elements that provides cooling for the detector. Since heat is dissipated by natural air-cooling, do not cover or place anything on Detector cover / top of the unit.
Page 40 ② ③ ④ Name Explanation Detector nose Contains the heat conductor connected to the x-ray detector element. X-ray detector element The X-ray detector element detects X-rays and the peltiier-cooling unit cools the detector unit to －30℃. Pelitier-cooling element The X-ray window transfers X-rays that are generated in the specimen. The window is very thin film, which is made of a metal or an organic material.
Page 41 2.4.2 Digital pulse processor（DPP） Name Explanation POWER switch DPP power supply switch. To turn ON the device, press the switch to the「｜」side. When the device will not be used, press the switch to the「○」side to turn off the power. PWR lamp This lamp lights red when the power to the DPP is turned ON.
Page 42 Name Explanation Terminal for connecting the pre-amp cable. The power supply to the Dry SD PRE－AMP connector detector pre-amp, and the transmission of the X-ray signal from the detector use this connector. S-PORT connector Not normally used PTTD ITF connector Terminal for connections to the EDS interface board that is inserted into the PCI slot of the personal computer ※...
Page 43 EXPLANATION OF THE OPERATION SECTION （SEM） 3.1 MAIN WINDOW ········································································ 3-1 3.2 MENU BAR ·············································································· 3-2 3.2.1 SEM button ······································································· 3-2 3.2.2 Home ··············································································· 3-3 3.2.3 Settings ············································································ 3-4 3.3 MAIN SCREEN ········································································· 3-5 3.3.1 Mode ··············································································· 3-5 3.3.2 Zeromag mode ··································································· 3-7 3.4 PHOTO DATA ··········································································...
Page 45 3.1 MAIN WINDOW Name Description Arranged with the JSM-IT200 logo and the [Min./Max./Close] Title bar buttons. Menu bar Arranged with SEM button, Home tab and Settings tab Icon Display icons to support the image observation. Displays the standard, multiple, flexible and signal mixing Main screen windows, zeromag mode on/off.
Page 46 3.2 MENU BAR 3.2.1 SEM button Tapping the SEM button displays the following pulldown menu: Name Description New Specimen Data Displays the specimen data creation screen. Open Specimen Data Displays the registered specimen data screen. Open Image Opens the image file. Registers an image to Data Management.
Page 47 3.2.2 Home Name Description Recipes Displays the window for setting the most suitable observation conditions based on the specimen category. Adjustment Electron Gun：Displays the window for heating the filament or adjusting the electron beam axis. Wobbler：Executes wobbler and adjusts the location of movable aperture. Beam Blanking：Executes beam blanking to mitigate specimen damage.
Page 48 3.2.3 Settings Name Description User Displays the window for logging off or switching the user. Environment Language：Displays the window for setting the language. Theme：Displays the window for setting window design (color for SEM UI). Navigator：Enables the arrangement of the navigator area to be changed. Icons：Enables the arrangement of the fixed icons to be changed.
Page 49 3.3 MAIN SCREEN 3.3.1 Mode The Mode icon (see the illustration below) enables display of respective windows. Standard view Multi View No. ISMIT200-1E...
Page 50 Flexible view Add signal No. ISMIT200-1E...
Page 51 3.3.2 Zeromag mode The graphic of the specimen holder is displayed; A photo image and analysis results are displayed on SNS image. ※Stage navigation system (SNS) is a option. Use the Zeromag mode, search of a target and setting of analysis item can be done easily. ※...
Page 52 3.4 PHOTO DATA The present observation conditions are displayed. Click the  marks below the respective displays various windows, thereby enabling change of the observation conditions. 3.4.1 Upper part Name Description Signal Enables switching of the signal. Acceleration voltage Enables switching of the acceleration voltage. Set a focus current for the selected WD.
Page 53 3.4.2 Lower part Tap the respective displays, various window is displayed, and can be set. Name Description NOR：Normal Observation Mode GB-SH（HV mode only）：GB mode GB-SH（option）is necessary. Number Enables setting of data number. Date Enables setting of date. Comment Enables comment inscription. Logo Enables pasting of logo.
Page 54 3.5 NAVIGATOR AREA 3.5.1 Stage Slider (Graphic display scaling) LGS（Option） Name Description Stage Enables operation associated with stage movement. Snap Shot Enables simple saving of live images. Enables movement of the stage along the X, Y or R,T,Z-axis, and simultaneously along Stage movement the X and Y-axes.
Page 55 3.5.2 Snap Shot Six screen mode Single screen mode Name Description Click the snap icon ③ with the live or freeze image being displayed enables pasting of Image save area the image in this area. Icon for opening a Click this icon enables calling-up of an image stored in the predetermined folder and pasting thereof in the image paste area ①.
Page 56 3.6 SPECIMEN DATA Enables selecting of the specimen holder and inputting of a specimen height. Click the Specimen Data Name, it can create newly or load the existing specimen data. 3.7 COORDINATES DISPLAY The current coordinates is displayed, click one of each items, the stage can be moved by the coordinates specification.
Page 57 3.8.1 Manual adjustment tool ⑩ ⑧ ⑦ ⑨ Name Description Focus Used for focus adjustment of an image. Stigma Used for astigmatism correction of an image Brightness Used for brightness adjustment of an image. Beam Shift Used for movement the field of view at high magnification Used for image rotation.
Page 58 3.9 EVACUATION BUTTON AND EVACUATION PROGRESS Evacuation progress can confirm. Click the evacuation progress bar, the evacuation buttons are displayed, then the following operation are possible. Evacuation button Evacuation progress bar VENT Sets the specimen chamber and EOS to VENT (state at the atmospheric pressure).
Page 59 3.10 DATA DISPLAY Name Explanation Simple data display The images and analytical data acquired in the past are displayed. Selection of a data to be displayed on ① is possible. Settings Data Management A data management screen is displayed, and editing is possible. (For details, please see the following pages and later.) 3-15 No.
Page 60 3.10.1 Data control screen About the operation details, please see Chapter 9. Name Explanation Ribbon menu Displays the menu of the entire data control screen. ・Home ・Admin ・Help List screen tab Switches content to be display in the data control screen. Project：It is screen for managing the photo / measurement data.
Page 61 3.10.2 Ribbon menu 3.10.2.a Home tab Name Description Project Copy：Registers the project. Import / Export Import：Displays the screen for importing the jiz file. Export：Displays the screen for exporting the jiz file. Search Search：Displays the screen for searching with the following condition. ...
Page 62 3.10.3 List screen tab 3.10.3.a Project Project is screen for managing the photo / measurement data. Name Description Address bar Displays Project, Sample and View (grouping) which is selected with present folder area. Folder area Displays all or part of project, sample, group and view. Sample image area When under the sample folder at the folder area is selected with alone, displays the sample.
Page 63 ♦ Address bar Displays status of the folder area selection; Project > Sample > View (Group) When the Multiple selection mode is selected, the multiple folder can be selected. (It is possible to use Ctrl key) ♦ Folder area Displays the usable project. Also, it is possible selecting until level of Project, Sample and View (grouping), and data that is saved in the selection level is displayed in the file area.
Page 64 ♦ File area Name Description Menu The content of menu changes according to the selected level For details, please see [Data management screen operation]. Show all kind of data Displays all kind of data. Filtering (Image) Displays the whole view data and view image . When you cancel (tap this button again), all kind of data will be displayed.
Page 65 ♦ Sample image area This area is effective only when a single sample is selected from the folder area. If there is SNS (optional), the camera image of the specimen holder of the graphic of the folder is displayed. When you select the target data from the measured position in the sample image, the file area data will be highlighted.
Page 66 3.10.3.b Favorite A data which “Add to Favorite” was performed in the project is displayed with a list. Name Explanation Menu The content of menu changes according to the selected level [Data management screen operation] Multi select mode It is possible to select multiple data in the file area. Change view type View type can be changed.
Page 67 3.10.3.c Report The report which is created and stored is displayed with a list. Name Explanation Menu When you select a report, Menu can use. For details, please see [Data management screen operation]. Open report data The print preview screen appears. Rename report data Change the report name.
Page 68 3.10.3.d Layout System layout (default) and User layout (user created) are displayed with the list. ※ System layout is displayed with “System” before name. Name Description Menu When you select a layout, Menu can use. For details, please see [Data management screen operation]. New layout A new layout can be created Change view type...
Page 69 EXPLANATION OF THE OPERATION SECTION （EDS） 4.1 MAIN WINDOW ········································································ 4-1 4.2 MENU BAR ·············································································· 4-2 4.2.1 SEM button ······································································· 4-2 4.2.2 Home ··············································································· 4-3 4.2.3 Settings ············································································ 4-9 4.3 MAIN SCREEN ······································································· 4-22 4.3.1 Mode ············································································· 4-22 4.3.2 Zeromag mode ································································· 4-24 4.4 PHOTO DATA ········································································...
Page 70 4.12 ANALAYSIS AREA ·································································· 4-43 4.12.1 Spectrum analysis screen ··················································· 4-44 4.12.2 Map analysis screen ·························································· 4-48 4.12.3 Line analysis screen ·························································· 4-53 No.ISMIT200-1E...
Page 71 MAIN WINDOW Name Description Arranged with the JSM-IT200 logo and the [Min./Max./Close] Title bar buttons. Menu bar SEM button, Home, Settings Icon Display icons to support the image observation. Displays the standard, multiple, flexible and signal mixing Main screen windows, zeromag mode on/off.
Page 72 4.2 MENU BAR 4.2.1 SEM button Click the SEM button displays the following pull down menu: Name Description New Specimen Data Displays the specimen data creation screen. Open Specimen Data Displays the registered specimen data screen. Open image Opens the image file. Registers an image to Data Management.
Page 73 4.2.2 Home Name Description Recipes Displays the window for setting the most suitable observation conditions based on the specimen category. Adjustment Electron Gun： Beam Blanking：Executes beam blanking to mitigate specimen damage. Wobbler：Executes wobbler and adjusts the location of movable aperture. View Mode：Enables changing to the standard, multiple, flexible or signal mixing window.
Page 74 4.2.2.a Chemical Formula Name Description Chemical Formula Enters the chemical formula. Enters the mass ％. Total mass% Calculation button Calculate the number of element and mass (％) from entered chemical formula and total mass, and display it in the list. 4.2.2.b Analysis Conditions Name Description...
Page 75 ♦ Spectrum analysis condition Name Description Process time Set the process time of the EDS detector. Same as rate：Measure with process time specified in the rate monitor. T1～T4：Measure the specified process time. Generally, T4 or T3 is used for spectrum measurement. Stopping condition Set conditions for stopping the measurement.
Page 76 ♦ Map analysis condition (Element map) Name Description Process time Set the process time of the EDS detector. Same as rate：Measure with process time specified in the rate monitor. T1～T4：Measure the specified process time. Generally, T3 or T2 is used for map measurement. Resolution Set the resolution of element map.
Page 77 ♦ Line analysis (Line) Name Description Process time Set the process time of the EDS detector. Same as rate：Measure with process time specified in the rate monitor. T1～T4：Measure the specified process time. Generally, T3 or T2 is used for line measurement. Dwell time Set the measurement time per one pixel.
Page 78 4.2.2.c Acquisition list Name Description Number Displays the measurement number. Measurements are performed in ascending order of numbers. Probe tracking Displays whether probe tracking during measurement is executable or not. Switch on/off by clickping. Name Displays the name of analysis area. Rename can be changed to any name by clickping.
Page 79 4.2.3 Settings Name Description User Displays the window for logging of or switching the user. Environment Language：Displays the window for setting the language. Theme：Displays the window for setting window design (color for SEM UI). Navigator：Enables the arrangement of the navigator area to be changed. Icons：Enables the arrangement of the fixed icons to be changed.
Page 80 4.2.3.b Standard Data ♦ Composition Table Name Description Element Displays element name. Chemical Formula Displays the composition of the specimen. Mass% Displays the mass concentration of the composition. Return to default Returns the changed composition and mass concentration to the immediately after installation.
Page 81 ♦ Standard spectrum Name Description Serial number of the instrument Displays serial number of the instrument. Package switching Switches the package. Copy of the package Copies the package. Delete package Delete the standard data for each package Edit package name Edit the package name.
Page 82 ♦ Reference Package Name Description Instrument Displays serial number of the instrument. Package The standard data folder name selected at present is displayed. Delete instrument Deletes all standard data of selected instrument. ※ Standard data currently connected (online) cannot be deleted. Save Save the reference package.
Page 83 4.2.3.c EDS Settings ♦ Spectrum Settings 4-13 No.ISMIT200-1E...
Page 84 Name Description Spectrum Energy range Changes the energy range. energy range 2 kch：Acquired data until 20 kV. 4 kch：Acquired data until 40 kV. Preset Maximum peak Select “Enables”, select the maximum peak height with measurement stopping height condition. Total accumulated Select “Enables”, select the total accumulated with measurement stopping condition.
Page 85 ♦ Analysis settings Name Description Qualitative ROI default settings Set the default of the ROI range of each element. analysis Disable elements Set the disable element of Qualitative/Quantitative. ※ Not subject to analysis Qualitative Changes auto qualitative sensitivity when using the spectrum monitor. sensitivity (Spectrum monitor) Qualitative...
Page 86 ♦ Line settings Name Description Electron Image Changes the Display/Hide of the image which is displayed to the detailed microscope Graph Changes the Display/Hide of the line profile which is displayed overlap on image the SEM image. Graph border Changes the Display/Hide of the border of the line profile. Scanning Changes the Display/Hide of the scanning direction.
Page 87 ♦ Map settings Name Description Scalebar position Changes the Display/Hide of the scale bar, and changes display position. Hide／Under Map Image／Top Left／Top Right／Bottom Left／ Bottom Right Font size Changes the display size of the scale bar. Color scale Changes the Display/Hide of the color scale. Enlargement Changes the interpolation method when a map image is displayed processing...
Page 88 ♦ Energy calibration settings Name Description Energy Perform every Can set the recommended energy calibration period. calibration “Recommended date for next energy calibration“ to the Notifications of notification EDS Adjustment Monitor is displayed. 4-18 No.ISMIT200-1E...
Page 89 ♦ Import・Export Name Description ROI settings Import/export the ROI settings created by saving/loading ROI. Import/export the palette created by line analysis. Palette（Line） Import/export the palette created by map analysis. Palette（Map） Standard data Import/export the standard data of standardless and Standard. 4-19 No.ISMIT200-1E...
Page 90 4.2.3.d EDS adjustment ♦ Notifications Name Description Last energy calibration done on: Displays the calibrated last date. Recommended date for next energy calibration: Displays the recommended calibration date. 4-20 No.ISMIT200-1E...
Page 91 ♦ Energy calibration Name Description Sample Selects the specimen for energy calibration. Process time Selects process time that performs energy calibration. Please calibrate all process times Detector Displays detector that performs energy calibration. 4-21 No.ISMIT200-1E...
Page 92 4.3 MAIN SCREEN 4.3.1 Mode The Mode icon (see the illustration below) enables display of respective windows. Standard view Multi 4-22 No.ISMIT200-1E...
Page 93 Flexible view Add signal 4-23 No.ISMIT200-1E...
Page 94 4.3.2 Zeromag mode The graphic of the specimen holder is displayed; A photo image and analysis results are displayed on SNS image. ※ Stage navigation system (SNS) is a option. Use the Zeromag mode, search of a target and setting of analysis item can be done easily. ※...
Page 95 4.4 PHOTO DATA The present observation conditions are displayed. Click the  marks below the respective photo data displays various windows, thereby enabling change of the observation conditions. 4.4.1 Upper part Name Description Signal Enables switching of the signal. Acceleration voltage Enables switching of the acceleration voltage.
Page 96 4.4.2 Lower part Click the respective displays, various window is displayed, and can be set. Name Description NOR：Normal Observation Mode GB-SH (High Vacuum Only)：GB mode GB-SH (option )is necessary. Count rate monitor Enables setting of probe current and count rate. Number Enables setting of data number.
Page 97 4.5 NAVIGATOR AREA 4.5.1 Stage Slider (Graphic display scaling) LGS（Option） Name Description Stage Enables operation associated with stage movement. Snap Shot Enables simple saving of live images. Enables movement of the stage along the X, Y or R,T,Z-axis, and simultaneously along Stage movement the X and Y-axes.
Page 98 4.5.2 Snap Shot Six screen mode Single screen mode Name Description Click the snap icon ③ with the live or freeze image being displayed enables pasting of Image save area the image in this area. Icon for opening a Click this icon enables calling-up of an image stored in the predetermined folder and pasting thereof in the image paste area ①.
Page 99 4.6 SPECIMEN DATA Enables selecting of the specimen holder and inputting of a specimen height. Click the Specimen Data Name, it can create newly or load the existing specimen data. 4.7 SPECTRUM DISPLAY AREA The spectrum monitor is displayed. Select Settings – Spectrum Monitor, turn on/off the spectrum monitor. Click the Details button, SEM screen and Analysis screen can be switched.
Page 100 COORDINATES DISPLAY The current coordinates is displayed, click one of each items, the stage can be moved by the coordinates specification. Click SRT, the manual adjustment tool is displayed and an image can be rotated. The display of coordinates will change depending on the mounted motor drive shaft. When the MS5 (option) is installed When the LGS (option) is installed FIXED ICON...
Page 101 4.9.1 Manual adjustment tool ⑩ ⑧ ⑦ ⑨ Name Description Focus Used for focus adjustment of an image. Stigma Used for astigmatism correction of an image Brightness Used for brightness adjustment of an image. Beam Shift Used for movement the field of view at high magnification Used for image rotation.
Page 102 4.10 EVACUATION BUTTON AND EVACUATION PROGRESS Evacuation progress can confirm. Click the evacuation progress bar, the evacuation buttons are displayed, then the following operation are possible. Evacuation button Evacuation progress bar VENT Sets the specimen chamber and EOS to VENT (state at the atmospheric pressure).
Page 103 4.11 DATA DISPLAY Name Explanation Simple data display The images and analytical data acquired in the past are displayed. Settings Selection of a data to be displayed on 1 is possible. Data Management A data management screen is displayed, and editing is possible. (For details, please see the following pages and later.) 4-33 No.ISMIT200-1E...
Page 104 4.11.1 Data control screen About the operation details, please see Chapter 9. Name Description Ribbon menu Displays the menu of the entire data control screen. ・Home ・Admin ・Help List screen tab Switches content to be display in the data control screen. Project：It is screen for managing the photo / measurement data.
Page 105 4.11.2 Ribbon menu 4.11.2.a Home tab Name Description Project Copy：Registers the project. Import / Export Import：Displays the screen for importing the jiz file. Export：Displays the screen for exporting the jiz file. Search Search：Displays the screen for searching with the following condition. ...
Page 106 4.11.3 List screen tab 4.11.3.a Project Project is screen for managing the photo / measurement data. Name Description Address bar Displays Project, Sample and View (grouping) which is selected with present folder area. Folder area Displays all or part of project, sample, group and view. Sample image area When under the sample folder at the folder area is selected with alone, displays the sample.
Page 107 ♦ Address bar Displays status of the folder area selection; Project > Sample > View (Group) When the Multiple selection mode is selected, the multiple folder can be selected. (It is possible to use Ctrl key) ♦ Folder area Displays the usable project. Also, it is possible selecting until level of Project, Sample and View (grouping), and data that is saved in the selection level is displayed in the file area.
Page 108 ♦ File area Name Description Menu The content of menu changes according to the selected level For details, please see [Data management screen operation]. Show all kind of data Displays all kind of data. Filtering (Image) Displays the whole view data and view image . When you cancel (click this button again), all kind of data will be displayed.
Page 109 ♦ Sample image area This area is effective only when a single sample is selected from the folder area. If there is SNS (optional), the camera image of the specimen holder of the graphic of the folder is displayed. When you select the target data from the measured position in the sample image, the file area data will be highlighted.
Page 110 4.11.3.b Favorite A data which “Add to Favorite” was performed in the project is displayed with a list. Name Explanation Menu The content of menu changes according to the selected level [Data management screen operation] Multi select mode It is possible to select multiple data in the file area. Change view type View type can be changed.
Page 111 4.11.3.c Report The report which is created and stored is displayed with a list. Name Explanation Menu When you select a report, Menu can use. For details, please see [Data management screen operation]. Open report data The print preview screen appears. Rename report data Change the report name.
Page 112 4.11.3.d Layout System layout (default) and User layout (user created) are displayed with the list. ※ System layout is displayed with “System” before name. Name Description Menu When you select a layout, Menu can use. For details, please see [Data management screen operation]. New layout A new layout can be created Change view type...
Page 113 4.12 ANALAYSIS AREA The analysis method (Point, Area and Line) can be selected. For details of the individual analysis (Spectrum, map and line), please refer to the following pages. Analysis switching button Name Description Measurement Click Hide button, icon display of the analysis area becomes hide. Show /Hide position Move...
Page 114 4.12.1 Spectrum analysis screen Name Description Tool bar Save the data, and print the report. ※ This tool bar is not displayed during measuring. F.O.V image Displays the position and image which spectrum measurement is performed. Spectrum Displays the spectrum. Periodic Displays the Periodic Table/Quantitative Results.
Page 115 4.12.1.b F.O.V image Name Description Image name Displays the name of the image. Or, when there is multiple images, image can be switched. ※Image cannot be switched during measuring. F.O.V image Displays F.O.V image. Measurement position Displays the measurement position. Enlarged display Enlarges the image.
Page 116 4.12.1.d Periodic table Name Description Clear button Clear the identified element. Clear style Changes the style of the clear button Clear All：Clears all qualitative elements. Clear Auto. Identified：Clears only auto-identified elements. Edit ROI Changes the periodic table to the ROI mode. Element Individual element can be cleared by the manual-identified/qualitative.
Page 117 4.12.1.e Quantitative results Name Description Standard data Standardless：Use the standard data built into the system, and perform the quantitative calculation. Standard （Common）：Use the standard data which is created by the user , and perform the quantitative calculation.（option） Quantitative correction ZAF：Use ZAF, and perform the quantitative correction.
Page 118 4.12.2 Map analysis screen Name Description Tool bar Save the data, and print the report. This tool bar is not displayed during measuring. F.O.V image Displays the position and image which map measurement is performed. Spectrum Displays the spectrum. Displays the map of individual element. Comment Enter the comment.
Page 119 4.12.2.b F.O.V image/Legend Name Description Image name Displays the name of the image. Or, when there is multiple images, image can be switched. ※Image cannot be switched during measuring. F.O.V image (composite map) Displays F.O.V image. Enlarged display Enlarges the image. Legend Displays the legend.
Page 120 4.12.2.a Periodic table Name Description Clear button Clear the identified element. Clear style Changes the style of the clear button Clear All：Clears all qualitative elements. Clear Auto. Identified：Clears only auto-identified elements. Changes the periodic table to the ROI mode. Element Individual element can be cleared by the manual-identified/qualitative.
Page 121 4.12.2.b Spectrum Name Description Reset Scale Resets the scale of the spectrum. Customize scale The scale is set arbitrary by the user. Auto scale Set the vertical axis automatically, and displays whole of the spectrum. Ident. Performs auto-qualitative. Quant. Performs the quantitative calculation of qualitative elements. Show VID Displays VID spectrum.
Page 122 4.12.2.c Map Name Description Reset Scale Resets the scale of the map image. Count Map Display the map image with the count map. Net Map Display the map image with the net count map. Quant.Map Display the map image with the quantitative map. Analysis Condition Set the condition of net map and quantitative map.
Page 123 4.12.3 Line analysis screen Name Description Tool bar Save the data, and print the report. ※ This tool bar is not displayed during measuring. F.O.V image Displays the position and image which line measurement is performed. Spectrum Displays the spectrum. Line Displays the line of individual element.
Page 124 4.12.3.b F.O.V image/Legend Name Description Image name Displays the name of the image. Or, when there is multiple images, image can be switched. ※Image cannot be switched during measuring. F.O.V image (composite map) Displays F.O.V image. Enlarged display Enlarges the image. Legend Displays the legend.
Page 125 4.12.3.c Periodic table Name Description Clear button Clear the identified element. Clear style Changes the style of the clear button Clear All：Clears all qualitative elements. Clear Auto. Identified：Clears only auto-identified elements Changes the periodic table to the ROI mode. Element Individual element can be cleared by the manual-identified/qualitative.
Page 126 4.12.3.a Spectrum Name Description Reset Scale Resets the scale of the spectrum. Customize scale The scale is set arbitrary by the user. Auto scale Set the vertical axis automatically, and displays whole of the spectrum. Ident. Performs auto-qualitative. Quant. Performs the quantitative calculation of qualitative elements. Show VID Displays VID spectrum.
Page 127 4.12.3.b Line profile Name Description Scale reset Resets the scale of the line profile. Auto scale Set the vertical axis automatically, and displays whole of the line profile. Tools Displays the tool menu. Settings Displays the settings menu. Line profile Displays the line profile.
Page 128 BASIC OPERATION UI OPERATION ··················································· 5-1 5.1.1 Touch mode ····················································· 5-1 5.1.2 Mouse mode ····················································· 5-2 OPERATION FLOW ·············································· 5-3 EMERGENCY OPERATION ··································· 5-4 START THE SYSTEM ··········································· 5-5 USER LOG-ON AND LOG-OFF ······························ 5-7 SPECIMEN PREPARATION ··································· 5-8 SPECIMEN EXCHANGE AND EVACUATION ············ 5-9 IMAGE OBSERVATION ······································...
Page 129 5.9.11 Adjusting the Pressure in the Specimen Chamber · 5-37 5.9.12 Use the Recipe icon ········································ 5-39 5.10 CHANGING THE FIELD OF VIEW ························· 5-42 5.10.1 Specimen Holder and Stage Moving Range ········· 5-44 5.10.2 Moving the target location to the center of the screen5-48 5.10.3 Moving the target position to a desired location ·····...
Page 130 5.1 UI OPERATION Two operation modes for the user interface (UI) are available for operating the icon selection, moving the field of view and the Tools. Touch mode (touch operation by a finger or a touch pen) Mouse mode (operation by the mouse) 5.1.1 Touch mode Operation Action...
Page 131 5.1.2 Mouse mode Mouse operation Action Click Press and release the left mouse button. Click the left mouse button twice in quick Double click succession. Right click Click the right mouse button. Press and hold the left mouse button while Drag moving the mouse.
Page 132 5.2 OPERATION FLOW The basic operation of this instrument is based on observation by auto functions, the usual operation flow is as follows. START THE SYSTEM SPECIMEN PREPARATION SPECIMEN EXCHANGE AND EVACUAION （5.9 CHANGE THE OBSERVATION PARAMETERS） IMAGE OBSERVATION （5.10 CHANGING THE FIELD OF VIEW）...
Page 133 5.3 EMERGENCY OPERATION (System error, power failure, natural disaster) When an error (allophone, nasty smell) occurs or the system needs to be shut down due to a natural disaster, Turn the MAIN POWER key switch to ○（OFF） and the switch board (breaker) OFF. ＊The system is designed to shut down in a safe mode during a power failure.
Page 134 If the instrument is operated while the RP oil level is low, the pump may be damaged. Be sure to check the oil level and degree of contamination (discoloration) using the RP oil level indicator.  When it is necessary to refill or replace the oil, contact your local JEOL support office. Oil mist trap Vacuum hose...
Page 135 Turn ON the power for EDS detector. For details, please refer to the instruction manual for the EDS detector. Turn ON the power for the monitor and printer. Wait about 10 seconds after the system is started before turning on the power. Turn ON the power for the PC.
Page 136 5.5 USER LOG-ON AND LOG-OFF Click Settings – User icon. The User management window appears.（The following figure is initial state.） Upon selecting a user, click the Logon (or Logoff) button, To execute addition (Add), editing (Edit) and deletion (Delete) of users, log on with Administrator. For more information, see [11.
Page 137 5.6 SPECIMEN PREPARATION ◆ CAUTION ◆ Be sure that the specimen is set so that it does not protrude higher than the upper surface of the specimen holder. If the specimen protrudes above the upper surface of the specimen holder, there is a risk that the specimen will collide with the objective lens or backscattered electron detector resulting in damage, even if the stage is moved within the allowed movement range.
Page 138 5.7 SPECIMEN EXCHANGE AND EVACUATION Mount the specimen prepared on the stage, and prepare the image observation. Replace the specimen according to the flow indication. Click the Specimen Exchange – Specimen Exchange icon. The specimen exchange operation guide screen appears. Click Yes icon.
Page 139 Create the specimen data. When a new specimen is mounted, be sure to create the specimen data from the Create button. ＜For Create button＞ ① The specimen chamber becomes atmospheric pressure, specimen data creation window appears. ② Select specimen holder from the list. ③...
Page 140 ⑤ Click the OK button. ⑥ Check a message and click the OK button. ＜For Open button＞ ① Select holder and click the OK button. When the sepcimen holder or specimen height was changed, create a new specimen data. （see previous page） ◆CAUTION ◆...
Page 141 Set the observation condition by the recipe. ① Select General-Purpose Conditions when you don’t know which recipe is suitable for observing the specimen. ② Check the required items ③ Click the Apply button. ④ Check the observation conditions. ⑤ Click the OK button. Mount the specimen holder and click the OK button.
Page 142 Require the navigation image. ※ When the Stage Navigation System (option) is not installed, this flow is not displayed. ① Click the Reacquire Photo button, photographing starts. ② The photographing is finished, the following window is displayed and click the OK button. ③...
Page 143 Click the EVAC button. Start the evacuation according to a message, EVAC button starts blinking. ◆ CAUTION ◆ When the stage is inserted, be careful not to pinch your fingers between the stage and the chamber. Click the Yes button. When the specimen exchange is completed, the following screen appears.
Page 144 Select the purpose items by the “Move stage ?” ・Go to specified area： Specimen stage X and Y-axes moves. ・Do not move stage： Specimen stage does not move. Click the position to observe on the holder graphic. Click the position to observe on the image. A green rectangle moves At the above items, when the “Do not move stage”...
Page 145 5.8 IMAGE OBSERVATION 5.8.1 High vacuum mode Observation (SE image) For image observation in the high vacuum mode, non-conductive specimens must either be coated with a metal using evaporation deposition, or observed with a low accelerating voltage (about 1.0kV) if they are not coated with a metal.
Page 146 (BE) that contain the information about the specimen surface. Display the secondary electron image first. Then, the BE image can be displayed smoothly. ※When the instrument is JSM-IT200 or JSM-IT200(A), the backscattered electron detector (BED: option) is necessary.
Page 147 ＜BED Advanced＞ Gain: Used to set the probe current for either Standard or Analysis modes Standard: Used for general image observation. Analysis: When the probe current is too strong, the obtained BE image is too bright to observe. Both contrast and brightness can be automatically adjusted by selecting Analysis for Gain.
Page 148 ＜Reference＞ Principles of Backscattered Electron Image Formation Composition image and Topology image The Fig.5-3 is a block diagram showing the basic signal paths for image formation. The emitted electron beam is scanned across the surface of the specimen, and backscattered electrons are released, providing information about the specimen topology, as well as the physical and chemical characteristics.
Page 149 5.8.3 Low vacuum mode observation ◆ In the low vacuum mode, a charge-up may occur depending upon the voltage level. In such a case, countermeasures like setting the voltage a little higher must be taken. ◆ The images that can be observed in low-vacuum mode are the BE images or low vacuum secondary electron images.
Page 150 For easier observation・・・ • Change the scanning speed Press and hold the Fast icon and choose either 0.5 s or 1.0 s for the scanning speed. The image gets clearer as the scanning speed becomes slower. • Change the probe current (PC.) The image gets clearer as the PC.
Page 151 5.9 CHANGING THE OBSERVATION PARAMETERS 5.9.1 Signal selection Click △ mark under signal of the Photo data. In the below figure, click the △ mark under『SED』, and Signal window is displayed. Click the desired signal button. When the SIGNAL SWITCHING UNIT （OPTION）is installed, button layout is displayed shown to the above.
Page 152 5.9.2 Acceleration voltage setting Click △ mark under acceleration voltage of the Photo data. In the below figure, click the △ mark under『15.0kV』, and Acceleration Voltage window is displayed. Set the acceleration voltage. Click the preset button or use the slide button for setting. The value set by using the slide button is displayed in the upper middle of the slide bar.
Page 153 5.9.3 Probe current setting Set the probe current to one that is appropriate for the purpose. • Set the probe current to about PC 30 for a standard image observation. • Set it lower than PC 30 for a high resolution image observation. •...
Page 154 5.9.4 Switching the magnification Click △ mark under magnification of the Photo data. In the below figure, click the △ mark under『×5』, and Magnification window is displayed. Set the magnification. Click the preset button or use the slide button for setting. The value set by using the slide button is displayed in the upper middle of the slide bar.
Page 155 5.9.5 Image brightness adjustment ＜Brightening (darkening) the image＞ Click the Manual icon. Click the Brightness button of the manual adjustment tool. Click the Increase・brightness or Decrease・brightness button, brightens (darkens) the image. Pressing and holding down these buttons, the brightness can be changed continuously. The Brightness button is selected, and put the mouse cursor on the center of manual tool, the contrast and brightness set value appears as below.
Page 156 Brightening (darking) the BE image (rough adjustment) Click the Manual icon. Click the Suppress button of the manual adjustment tool. Click the Increase・brightness or Decrease・brightness button, brightens (darkens) the image. Pressing and holding down these buttons, the contrast can be changed continuously. The Suppress button is selected, and put the mouse cursor on the center of manual tool, the suppress set value appears as below.
Page 157 5.9.6 Focus adjustment When the image is completely out of focus, use the rough adjustment to approximately adjust the focus. Follow the procedure from Step1. If the focus is already good enough to obtain an image, it can be fine-tuned using Fine Adjustment.
Page 158 5.9.7 Astigmatism correction When the electron beam hits the specimen surface and doesn’t create a perfect circle, this is called astigmatism. Adjustment of this circle is called astigmatism correction. A sharp image cannot be obtained at a high magnification without this correction. Follow the procedure below in order to correct astigmatism manually.
Page 159 Perform the same correction for the Y direction. Repeat Step4 and 5 several times in both the X and Y directions to correct the astigmatism. Then, adjust the focus so that the image appears as sharply defined as possible. Focus adjustment Stigma button + Y-direction button －...
Page 160 5.9.8 Selecting the Scan Mode Click the icon for the scan mode best suited for your purpose. Name Description The electron beam scanning range is limited. ＊Screen resolution（320×240 RDC icon pixels） This is suitable for electron gun alignment, to locate a field of view, or for image quality adjustment.
Page 161 5.9.9 Changing the Scan Speed Click the Scan icon from Settings. The Scan Settings window is displayed. You can select from among 3 combinations of speed & resolution. A larger Frame Integration Coefficient will provide a brighter observed image. When you selected "0.075s", noise reduction filter can use, and the intensity of filter an select one of "standard"...
Page 162 Slow You can select from among 3 combinations of speed & resolution. Tick CF Scan, specimen charge-up can be reduced. Photo 1 Frame: Select from among 7 combinations of speed & resolution. Integration: Select from among 5 combinations of speed & resolution. This is effective with specimens likely to be charged up.
Page 163 Right-click (Touch and hold ) of fixation icon Right-click he RDC, Fast, Slow icon, the following window appears. Scan icon: Click this icon, Scan Settings window can display. Touch and hold he Photo icon, the following window appears. Auto Save button: Click this icon, Auto Save checkbox in the Save Image Settings window is marked.(The edge of this button becomes blue, Auto Save is enabled) Scan icon: Click this icon, Scan Settings window can display.
Page 164 5.9.10 Switching the Vacuum Mode There are 3 ways to change to the low-vacuum mode.  Switch from an evacuation button on the UI. Click the evacuation progress bar, and click the LV button. Click the YES button.  Use the Main control panel. Press the LV switch.
Page 165  Use the Photo data. In the below figure, click the △ mark under 『HighVac.』, and Pressure window is displayed. Click the LV button in this window. The Photo data become different by the vacuum mode. High-vacuum mode Low-vacuum mode 5-36 No.ISMIT200-1E...
Page 166 5.9.11 Adjusting the Pressure in the Specimen Chamber Change the vacuum mode to the low-vacuum mode. Click the pressure indication in the Photo data. In the below figure, click the △ mark under 『 HighVac. 』 , and Pressure window is displayed. Set the pressure.
Page 167 Pressure window Preset buttons Slide button Selected value LV button: Switches between the LV and HV. Preset buttons: Click one of 3 buttons. The pressure is automatically adjusted to the selected value. Slider bar: The pressure can be manually adjusted by dragging the slide button. The specified value is indicated above the center of the slider bar.
Page 168 5.9.12 Use the Recipe icon 5.9.12.a Observing at the recommend observation condition Click the Recipe icon in the Home tab. The Recipes window is displayed. Click the Standard Recipes icon. Select a recipe from the thumbnail display. Select General-purpose conditions when you don’t know which recipe is suitable for observing the specimen.
Page 169 About other operation such as registration of the observation condition, please see next page. Click the Recipe icon in the Home tab. The recipe window is displayed. Click the User icon. JSM-IT200/LV： Obs. Conditions tab JSM-IT200A/LA： Obs. Conditions tab, Spectrum tab, Element Map tab, Line tab Select recipe from the thumbnail display.
Page 170 Recipe window individual operation －Add－ Display an image of the observation condition you want to register. Click the Recipe icon in the Home tab, click the User icon. Click the Add icon. Confirm the condition to be applied and click the Save button. Click the Yes button in the dialog box.
Page 171 5.10 CHANGING THE FIELD OF VIEW X axis: plus (clockwise) X = 0 mm direction X axis: Minus (counterclockwise) X = 80 mm direction Y axis: Plus (clockwise Y = 40 mm direction Y axis: counterclockwise X-axis R axis: clockwise Y = 0 mm direction R axis: counterclockwise R-axis...
Page 172 Z-axis Z axis short WD WD = 5 mm direction Z axis long WD WD = 48 mm direction T axis clockwise direction T = 90 degree T axis counterclockwise direction T = 0 degree T-axis Name Polarity of coordinates Stage movement (Rotation of knob) Numerical value increases...
Page 173 5.10.1 Specimen Holder and Stage Moving Range ＜General＞ For the purpose of protecting the specimen holder from colliding with the backscatter detector or the objective lens, the following moving limit is provided. Therefore, moving the stage beyond the limit is not possible.
Page 174 ＜The moving range of the 32mm diameter specimen holder＞ For motor drive stage ◆CAUTION◆ • Z value of the table is Z-axis value of the GUI (reading value of Z sensor). When you entered “specimen height value, it becomes a value in which the value of “Specimen height” is subtracted from Z value of Stage window.
Page 175 For manual stage LGS ◆CAUTION◆  Be sure to move the specimen stage within the moving range. If you do not, the specimen might collide with the objective lens or other component, possibly causing damage.  Note that the figures listed below are considered with the exclusion of the specimen protrusion above the holder surface.
Page 176 < Protrusion amount of a sample> Please measure the protrusion amount of a sample from the specimen holder surface with specimen height measurement jig (scale). Enter the measurement value in the equipment to prevent damage due to sample and detector colliding. 5-47 No.ISMIT200-1E...
Page 177 5.10.2 Moving the target location to the center of the screen Double-click the target position. The position that is double-Clickped is moved to the center of the screen. ＊ For magnification of ×4500 or less, the stage is moved. ＊ For magnification of ×5000 or more, the movement is performed using beam shift. Double-tap here The target object is moved to the center of the screen...
Page 178 5.10.4 Shifting the stage horizontally (X) and vertically (Y) Main screen Move the mouse cursor to the edge of the screen, and keep pressing the movement buttons that are displayed. Press and hold the XY, X and Y buttons on the screen, the stage moves. To stop the stage movement, release mouse cursor from the button.
Page 179 Graphic screen Press and hold the XY, X and Y buttons on the graphic screen. To stop the stage movement, release mouse cursor from the button. When the operations are performed using a mouse, you can differentiate between fast movement and slow movement.
Page 180 5.10.5 Changing the stage height (Z) and tilt (T) You can switch the view on the screen between a view from above the specimen holder and a view from the side by swiping anywhere within the graphic, except on a movement button. Alternatively, the page advanced button can be Clickped to switch the view.
Page 181 ＜Handy tools＞ Show specimen holder tilt and Z-position When the T-axis and Z-axis operations are performed, the tilting as seen from above be reflected in the graphic. Display navigation image：Change the holder graphic to the navigation image. ※An optional SNS is necessary.
Page 182 5.10.6 Rotating (R) the stage Main screen Move the mouse cursor to the edge of the screen, and keep pressing the movement buttons that are displayed. The stage moves while a button is pressed. For this operation, the center of the field of view is fixed and eucentric rotation is performed around this fixed center.
Page 183 Graphic screen Press and hold the R button on the graphic screen. For this operation, only the R-axis rotation is performed. To stop the stage movement, release mouse cursor from the button. When the operations are performed using a mouse, you can differentiate between fast movement and slow movement.
Page 184 Rotation reset Click the R button, the Reset Rotation button appears. Click the Reset Rotation button, the angle of the field of view return to 0 degree. When the F.O.V (field of view) is rotated using the Stage R or SRT, SEM image and SNS image is shifted as below.
Page 185 5.10.7 Moving the stage to specified coordinates Click a coordinate display other than the SRT=＊＊ display The Stage Operation window is displayed. ＊The display of coordinates will change depending on the mounted motor drive shaft. ＊To use the EucentricT, a separate option MP-01290MS5 is necessary. ＊To use the EucentricR, a separate option MP-01270MSR / MP-01290MS5 is necessary.
Page 186 Stage operation window details (Click the Soft keyboard buttons) Eucentric The eucentric R/T function is set to OFF The stage can be rotated with the observation field of view as the center, regardless of the stage position. The field of view can be maintained for T-axis tilting, even for a specimen that is tall relative to the eucentric surface Coordinates Mode Absolute...
Page 187 5.10.8 Moving the stage to the previous coordinates Click the button on the graphic screen. Click the Yes button. The stage moves to the previous coordinates. What coordinates are used for Last Move? (example) 1. The stage is moved to a certain specified set of coordinates (Call this point “a”) 2.
Page 188 5.10.9 Moving the stage using a coordinate file Click the button. Select the file with the desired coordinates. Click the Move button; then, click the Yes button in the message box that is displayed. The stage moves to the specified coordinate position. Saving coordinates Move the stage to the coordinates that you wish to save.
Page 189 5.10.10 Search a target from the specimen holder Lower than the SEM observation magnification. SEM image of the observation screen changes to the specimen holder image. Drag in the observation screen so that a target moves in the SEM view. Upper the magnification, start the observation.
Page 190 5.11 SAVING / LOADING IMAGES The photographed image is registered in the data management. An image that is registered in the data management can be opened only with the data control screen. About the save filename The filename is generated automatically according to the image display mode, as described below. For Standard view mode Filename: Entered filename_Count.Extension...
Page 191 Details of the Save Image Settings window Browse button Browse button Insert Photo Data Photo data is appended in the saved image. Save gray scale image The space required to save the image can be reduced by saving as grayscale. Save text file in compatible mode (Shift-JIS) Select this if the images will be handed in standard-compatible document creation tools.
Page 192 5.11.2 Saving the freeze image Display an image and adjust the focus and image quality. Click the Freeze icon. A freeze image is displayed. Click Menu - Save Image icon. When specifying the destination, tick “Enable image file saving”of the Save Image Settings” window. 5.11.3 Loading Saved Images 5.11.3.a Load the saved image to the main screen Click Menu - Open Image icon..
Page 193 5.11.3.b Load the saved image to the data management screen Click the Album icon. Click the image which is displayed on the simple data display. Click the Open button, When a multiple images are displayed on the simple data display, select a necessary image. The selected image is displayed on the Data control screen.
Page 194 Reproduce the observation conditions of the pasted image. Click the Apply to the equipment icon, and the Photo Data window as follows will be displayed. Enter check marks for the conditions that you want to reproduce, then, click the Apply button. The condition settings in effect at the time the image was pasted will be reproduced.
Page 195 Drag the area you want to enlarge. Dragging part is enlarged, and displayed. Click the Yes button. A image is enlarged depending on the frame size on the snap shot area, and displayed on the main screen. 5-66 No.ISMIT200-1E...
Page 196 At the single screen mode, snap image and area frame can save to arbitrary location. Click the Save image icon. Save image icon ※ It is necessary that the check mark of Auto Save in the Save Image Settings window is cleared. 5-67 No.ISMIT200-1E...
Page 197 5.11.5 Recording Live Images (Save Movie) The observation procedure for saving dynamic images as well as the recording and replay of the dynamic behavior of a specimen can be performed, but the following limitations apply. • Recording is not possible in the Full Screen. •...
Page 198 Movie Settings window Browse button Destination Use the Browse button to select the save destination Frame Rate Select the number of frames per second The image will be more detailed for a higher number Compression Setting Compression (No Compression) creates a large file Setting Compression (High) creates the smallest file 5-69 No.ISMIT200-1E...
Page 199 5.12 STOPPING THE INSTRUMENT ◆ CAUTION ◆ When the instrument will be stopped, be sure to save image data, etc. into files. If the data is not saved into a file, it will be lost. Click the Specimen Exchange icon and Remove Specimen icon. . The specimen exchange operation guide screen appears.
Page 200 Click the Yes button. Removing process completed, click the Exit button. End the SEM control software. Click Menu -Exit, or click button of the upper right of the UI. The Exit SEM Control software window displayed, click the Yes button. 5-71 No.ISMIT200-1E...
Page 201 Close Windows Click the Start on the Windows desktop screen. Select Shutdown ⇒ Windows shutdown ⇒ Shutdown ⇒ Yes Turn OFF the power supplies for the monitor, printer, and other devices (set to ○). Turn OFF the power supply for the PC (set to ○). Turn OFF the power for EDS detector.
Page 202 5.13 DAILY MAINTENANCE 5.13.1 Electron Gun Axis Alignment (An optical axis shift adjustment) When the filament is replaced with a new one, there may be a difference in the direction of the emitted electron beam after the replacement due to slight mechanical shifting of the filament and Wehnelt, and it may not be possible to obtain the same probe current as before the replacement, so variations in the images may appear.
Page 203 Electron Gun window Details – Manual adjustment [Filament] selection AGC: Automatic adjustment of filament heating and both alignment directions (tilt and horizontal) Manual adjustment: Filament: Manually adjust filament heating and gun bias Alignment: Manually adjust the electron beam axis. Filament Heater AFS: Automatic adjustment of filament heating Line Scan Profile...
Page 204 Electron gun window Details – Manual adjustment [Alignment] selection Tilt X, Y: The electron beam can be tilt-deflected (deflected at an angle) Sihft X, Y: The electron beam can be horizontally deflected 5-75 No.ISMIT200-1E...
Page 205 5.13.1.b Manual adjustment Perform manual adjustment to observe images under the following conditions • When you want to increase the probe current for analysis. • When you want to increase the probe current for LV mode observations. • When you want to decrease the probe current to obtain sharp images. Mount one of the items indicated below, and evacuate the specimen chamber ...
Page 206 Adjust a value for L.C (Load Current) Adjust using the Gun Bias Coarse and Fine adjustments to set the values indicated in the table below. Acceleration voltage（kV） L.C（μA） 30, 25, 20, 15 Approx. 85 Approx. 90 Approx. 140 Approx. 120 Approx.
Page 207 5.13.2 Movable Aperture Adjustment If the movable aperture is shifted off the optical axis, sharp images will not be obtained, even when the focus is adjusted, and there may be limitations on the field of view (shadows in the field of view). Also, check the movable aperture after work like the following is performed;...
Page 208 5.13.3 Stage Calibration Although it will depend on how frequently the instrument is used, it is recommended to calibrate the stage at least once per week. In addition, perform stage calibration if the following phenomena appear.  Stage coordinate display is different from the graphic display position ...
Page 209 (Twisted, out of place, dust or As needed, correct the twisting or positioning, debris attached, or torn) and remove any dust or debris. If the item is damaged, contact your local JEOL support center. The Wehnelt or other component Wait for a while has just been cleaned.
Page 210 5.14.2 Image Display Trouble Symptom Cause Response L.C value is unstable The electron beam axis is not Perform axis alignment of the electron gun adequately aligned There are whiskers on the filament Replace the filament The filament centering is shifted Perform centering again The Wehnelt is dirty.
Page 211 The aperture foil of the movable Replace the aperture foil of the moveable aperture aperture has deteriorated Parts inside the microscope column Contact your local JEOL support center. are dirty The upper and lower portions The specimen is tilted at a high tilt Decrease the tilt angle of the specimen.
Page 212 5.15.2 Evacuation System Messages Error Message Response Please contact your local JEOL support center. Immediately halt the instrument and contact your local JEOL support center. Error ID: 03＊＊ Evacuation in progress Wait for a while. Error ID: 0331 Close the gun chamber before evacuation.
Page 213 JEOL support center Please contact your local JEOL support center. Displayed when the mechanical movement limits are exceeded. Turn OFF the instrument power and contact your local JEOL support center Error ID: 0240～0245 Please contact your local JEOL support center.
Page 214 APPLICATION OPERATION FOR OBTAINING BETTER IMAGES ···································· 6-1 6.1.1 Difference of image quality depending on the value of the accelerating voltage ··················································································· 6-1 6.1.2 Effect of the probe current ·························································· 6-2 6.1.3 Effect of the working distance (WD) on the image ···························· 6-2 6.1.4 Effect of the aperture diameter on the image ··································...
Page 215 6.3.12 Inserting an arrow in the observation window ························· 6-56 6.3.13 Counting the number of target objects ·································· 6-57 6.3.14 Calibration of Ruler ··························································· 6-58 COMPARISON DISPLAY ················································ 6-60 6.4.1 Displaying an image in full window ············································· 6-60 6.4.2 Dividing・displaying an observation image in different signal domains 6-61 6.4.3 Displaying an image by mixing two signals ···································...
Page 216 6.1 FOR OBTAINING BETTER IMAGES For the observation conditions of a specimen, you must select optimum values from various factors, such as accelerating voltage, probe current, movable aperture, and working distance. You should also take into consideration such as the sampling method (specimen preparation) and the specimen tilt. Moreover, in order to obtain a more optimum image quality, the brightness adjustment, astigmatism correction adjustment and focus adjustment become of importance.
Page 217 6.1.2 Effect of the probe current As the diameter of the electronic probe irradiating a specimen is smaller, the higher magnification ratio and resolution of SEM can be obtained. However, under such conditions, the smoothness of an image, i.e., the S/N (signal/noise) ratio of the image, depends on the current irradiated to the specimen.
Page 218 6.1.4 Effect of the aperture diameter on the image Standard (MAP1) The OL aperture prepares of two types: 25μm diameter and 50μm diameter. It can get the most suitable image quality and analysis accuracy if OL aperture is fitted to use purpose and used properly. Selects the 30μm diameter for observing general or high resolution.
Page 219 6.1.5 Relationship between specimen tilting and the amount of secondary electrons emitted When electron beam is irradiated to a specimen, secondary electrons are emitted from relatively shallow locations. This happens because secondary electrons, which have low energy, cannot reach the specimen surface when they are produced in deep locations.
Page 220 6.1.6 Observation of nonconductive specimen and charging Charge-up may be observed when irradiating the electron beam to a nonconductive specimen at high acceleration voltages or with large probe current, where electrons are accumulated on the specimen surface. If this happens, shifts or variation in brightness of the obtained images might be resulted due to such effects as the track of primary electron beam being changed or the production of secondary electrons being constrained.
Page 221 6.2 IMAGE OBSERVATION 6.2.1 Temporarily shutting off the electron beam Temporarily shutting off the electron beam can prevent damage of the specimen. Click the Beam Blanking icon from Home. The electron beam is shut off. To release the shutoff, click the Beam Blanking icon again. 6.2.2 Matching the focus current to WD Matching the focus current to the present WD offers a most suitable focus.
Page 222 6.2.3 Making the focus follow Z-axis displacement (Auto focus tracer：It is effective when the motor drive stage MSZ/MS5 is installed, ) This function is for automatically, synchronously letting the focus follow the Z-axis displacement. Click the Stage icon from Settings. The Stage Settings window is displayed.
Page 223 6.2.4 Observing at high resolution （Auto focus tracer：It is effective when the motor drive stage MSZ/MS5 is installed,） To establish high resolution, the WD must be shortened. The WD is normally limited to 8 mm, but the following operation enables reducing the distance to as small as 5 mm: Click the Stage icon from Settings.
Page 224 6.2.5 Displacing a target object at fine steps (Beam shift) Use this function for the high observation magnification of several thousands or more. Click the Manual icon. The manual adjustment tool is displayed. Click the Beam Shift button. Click respective buttons to displace an image. Continuously pressing the buttons continuously displaces the image in the directions corresponding to the buttons.
Page 225 (Beam shift reset) Use this function for resetting the beam shift amount. Click the Manual icon and the Beam Shift button. Click the Reset button. The beam shift is reset. Reset button There is a limit on displacement using the beam shift. Upon reaching the displacement limit, no more displacement using the beam shift is possible.
Page 226 6.2.6 Displacing an image as a frame Click the Stage icon from Settings. The Stage Settings window is displayed. Check Frame Step and set proportion by using the slide button. The set proportion is displayed in the upper middle of the slide bar. Set proportion Slide button In the main window, click the stage displacement button corresponding to the direction...
Page 227 6.2.7 Correcting focus blur due to stage tilt 6.2.7.a Correcting focus blur (Dynamic focus) Focus blur occurs in the observation window when conducting observation by tilting the specimen stage T-axis. Using the dynamic focus function enables correction of focus blur due to T-axis tilt. Set the scan rotation angle to zero degree for correcting focus blur in the tilt direction of stage T-axis.
Page 228 6.2.7.b Correcting a magnification error (Tilt Mag. correction) Magnification variance may occur in the observation window when conducting observation with the specimen stage T-axis being tilted. Use the tilt mag. correction function for correcting the magnification variance due to T-axis tilt. Before using the equipment, set the scan rotation angle to zero degree for correcting a magnification error in the tilt direction of the stage T-axis.
Page 229 6.2.8 Rotating an image (Scan rotation) Use the scan rotation function for rotating the image in the observation window by rotating the scanning direction of the electron beam on the specimen instead of directly rotating the specimen. Click the Manual icon. The manual adjustment tool is displayed.
Page 230 (Scan horizontal correction function and scan vertical correction function) The target object can be corrected horizontally or vertically by using a straight line drawn on the observation image. Example: Case of scan horizontal correction Click the Manual icon. The manual adjustment tool is displayed. Click the SRT button and Scan Horizontal Correction button.
Page 231 Check ON/OFF of SRT function The SRT button is selected, and put the mouse cursor on the center of manual tool, SRT ON (Enable)/ OFF (Disable) is displayed as below. To switch ON/OFF, click the center of the manual adjustment tool. SRT：ON SRT：OFF 6-16...
Page 232 6.2.9 Avoiding vision shift due to stage rotation 6.2.9.a Eucentric R function （It is effective when the motor drive stage MSR/MS5 is installed.） A target object can be visualized at the center of the observation window without losing the sight of the object by rotating the stage as if the object were actually rotating.
Page 233 6.2.9.b Stage horizontal correction function (It is effective when an optional motor drive stage MSR/MS5 is installed) The target object can be corrected horizontally by using a straight line drawn on the observation image. ※ Use this function at a magnification of ×1000 or less, as using it at a high magnification might lose the sight of the target object.
Page 234 6.2.10 Preventing vision shift due to the variance of specimen heights (Eucentric T function：It is effective when the motor drive stage MS5 is installed.) This function can prevent vision shift in the Y and Z-axis directions due to the T-axis tilt caused by the height variance of specimens.
Page 235 6.2.11 Obtaining an anaglyph image Anaglyph image is defined as an image visualized in three dimensions through red-blue glasses. Click the 3D Imaging icon from Home. The 3D Imaging window is displayed. Click the Anaglyph Image icon. Click the OK button of the confirmation message. The scan rotation is automatically set to a status suitable for obtaining a reference image of the anaglyph image.
Page 236 Specify the tilt angle of the specimen stage and click the OK button. When the MS5 is not installed Specify the stage tilt angle and click the OK button. Tilt the stage by turning the T axis knob.（Standard of tilt angle； 5 – 7 degree） When the MS5 is installed Check the Eucentric T, the field of view shift due to the stage inclination can be reduced.
Page 237 6.2.12 Obtaining a three-dimensional measurement image This function enables easy saving of two images having different angles and a same vision (stereo pair). Using these two images and the optional three-dimensional software, the function shows a bird’s-eye view enabling three-dimensional observation of images and specimen structure, thereby allowing dimensional measurement of spatial structure from the bird’s eye view.
Page 238 When the MS5 is installed Check the Eucentric T, the field of view shift due to the stage inclination can be reduced. Obtain a tilted image by following the guide messages. Upon superimposing the reference and tilted images, click the Photo icon. Display Reference Image.：When you check it, the reference image is displayed onto the tilted image.
Page 239 6.2.13 Montage This function enables you to photograph images continuously and produce one image by combining multiple images. The user can acquire the entire image, that is too large to fit in the view with the minimum observation magnification, as a SEM image by using this function. ※Having many images to photograph may slow down the processing by the computer or freeze the SEM_GUI.
Page 240 Operating the rectangles  Drag a gray frame to move a rectangle.  Drag any circle at the corners of the gray frame increases and decreases the size of the area. Moving a rectangle Zooming in and out When you want to specify whole of the specimen stub： Select green frame in the graphic of the montage window, the whole of the specimen stub can specify to the photo area.
Page 241 Select detector. Photo： Select a detector used for imaging. Multiple detectors can be selected as well. Element Map： Select a detector to be used for acquiring element maps. After selecting a detector, click the Next button. ※ (Only for A/LA) 6-26 No.ISMIT200-1E...
Page 242 Set the montage conditions. Name Description Magnification Auto Sets magnification automatically during imaging. Manual Sets magnification manually during imaging. Use the slide bar to set magnification. Image Quality For automatic magnification, the number of photographed images is set to four stages. Image acquisition takes faster for the smaller number of photographed images.
Page 243 Set the condition of the element map. The operation in the step is necessary when the Element Map is checked in Step4 Set Auto correction. Name Description Specimen Tilt Corrects the defocus of the specimen that is tilted. It is explained in the next step “Tilt Correction”. correction Perform AF Every Activates the Automatic Focus (AF) while photographing...
Page 244 Set tilt correction. ※ The following window is displayed when the “Specimen Tilt Correction” is checked in Step7. 1. Set correction conditions. Correction type: Select the correction method. WD： Corrects the tilt by changing the focus. Z-axis coordinate: Corrects the tilt by operating the stage Z Number of User Adjustment Points：Select points for the standard position Two：Tilt correction is performed based the diagonal two points assigned as the reference points.
Page 245 Start to create the montage. Confirm each condition on the window and click the Start button. When you want to change each condition, move to each screen by using the buttons of the upper right on the montage screen, change conditions. Click a button of the upper right on the montage screen, moves to each screen.
Page 246 Operation during montage creation Name Description Stop Stops creating a montage Pause Stops creating a montage temporarily Resume Pausing is canceled, and montage creation restarts Photo time Displays the time to complete photographing, Photographing is completed when it reaches 0 min. 0 sec. Montage creation is completed.
Page 247  Montage Editor window Name Description Tool bar All Images：Save all images as montage. Selected Image：Save selected images as montage. Re-Photo：Recapture the selected F.O.V. Select Fov image：Select a image before/after recapturing. Reanalysis：Reanalysis element map of selected F.O.V. Execute Montage：Corrects the shift of the montage automatically. Move to Initial Position：Returns all F.O.V to the photographed position.
Page 248 6.2.13.b Adjust the F.O.V of montage manually Select the F.O.V image you want to adjust. The selected F.O.V is displayed with blue frame. Drag F.O.V, image and move it to arbitrary position. Release a cursor, F.O.V image is set. 6-33 No.ISMIT200-1E...
Page 249 6.2.13.c Adjust the shift of montage automatically Click the Execute Montage button. Enter a numeric value in the searching range and click Execute button. Search it with the entering range, and correct the shift of montage automatically. Entering range：0 – 100 ％ When the correction is completed, a message appears.
Page 250 6.2.13.e Create montage with netmap or quantitative map Select F.O.V you want to display the net map and quantitative map. When you want to select multiple F.O.V, click it while pressing the Ctrl key. Click the Re-create icon. This icon is effective only when performing the EDS measurement. Select “Map Kind”, and click the Execute button.
Page 251 6.2.13.f Apply the placement of F.O.V image to other image Display the montage you want to copy. Click the Apply to icon. Select destination image. Click the Run button The placement of F.O.V is applied to other image. 6.2.13.g Recapturing the specific F.O.V Select F.O.V.
Page 252 6.2.13.h Reacquisition the map image of specific F.O.V This section is effective when EDS measurement is performed and the map image is selected. Select Map Image tab. Select F.O.V you want to measure once again. Click the Reacquisition button. Click the Yes button. SEM main screen is displayed.
Page 253 The following message appears, click the Complete button. Click the Start button. Measure the map data with same condition when measured in last time. The following dialog is displayed. When you want to recreate the map montage, click the Yes button. 6-38 No.ISMIT200-1E...
Page 254 6.2.13.i Reflecting the F.O.V image When using this function, confirm that there is two or more images recaptured in the same F.O.V. Display montage. Click the Select Fov Image button. Select F.O.V image with dialog. Please confirm on the montage. Click the OK button.
Page 255 6.2.13.j Reanalyzing the map image of specific F.O.V Display a map image, and select F.O.V Click the Reanalysis button. The reanalysis screen of map image is displayed. For more information, please refer to Chapter 7. ・Map analysis ・Supplementary functions for map 6-40 No.ISMIT200-1E...
Page 256 6.2.13.k Saving the montage ♦ Save all montages Click the All images button. Click the Execute button. The completion message appears. ♦ Save selection montage Select montage from the list. Click the Selected image icon. Click the Execute button. The selected montage is saved. 6-41 No.ISMIT200-1E...
Page 257 6.3 ITEMS ASSOCIATED WITH MEASUREMENT AND TEXT 6.3.1 Conducting measurement by using a micron bar Drag the micron bar into the main window, enables simple measurement of lengths. 6-42 No.ISMIT200-1E...
Page 258 6.3.2 Measuring the distance between lines (X, Y and diagonal) Click the Ruler icon from Home. The Ruler window is displayed. Select Parallel for the Ruler type and select the ruler direction. Lateral direction: Select Parallel X. (Two cursors are displayed in the vertical direction.) Longitudinal direction: Select Parallel Y.
Page 259 6.3.3 Editing the measurement location and text box Click the Ruler icon from Home. The Ruler window is displayed. Select Basic for the measurement type and click the Select icon. Click the measurement location or text box you want to edit. 6-44 No.ISMIT200-1E...
Page 260 6.3.3.a Change the color and/or font. Changing the color Click the Color icon. The Color selection window is displayed. Select a color, and click the OK button. Changing the font Click the Font icon. The font window is displayed. Select a font, style and size, click the OK button. 6-45 No.ISMIT200-1E...
Page 261 6.3.3.b Deleting a measurement location and/or text box Click the Ruler icon from Home. The Ruler window is displayed. Select Basic for the Ruler type and click the Select icon. Select a measurement location and/or text box to delete. Click the Delete icon. The location for length measurement and/or the text box selected is deleted.
Page 262 6.3.4 Measuring the distance between two points Click the Ruler icon from Home. The Ruler window is displayed. Select Basic for the Ruler type and click the Line icon. Click the beginning and end points of the target object. The line segment connecting the beginning and end points is determined, and the distance is displayed.
Page 263 6.3.5 Measuring the total distance of straight lines connecting multiple points Click the Ruler icon from Home. The Ruler window is displayed. Select Basic for the Ruler type and click the Free Line icon. Specify the beginning point of the target object and then a junction point in an arbitrary position.
Page 264 6.3.6 Measuring the perpendicular line for arbitrary straight line Click the Ruler icon from Home. The Ruler window is displayed. Select Basic for the Ruler type and click the Perpendicular icon. Drag to draw the base line, and click the objective point. The perpendicular line to arbitrary base line is fixed, and measured value is displayed.
Page 265 6.3.7 Measuring the area of a rectangle Click the Ruler icon from Home. The Ruler window is displayed. Select Basic for the Ruler type and Click the Rectangle icon. Specify an opposite vertex to determine the domain of a rectangle. A rectangle is drawn and its area is displayed.
Page 266 6.3.8 Measuring the area of a circle (or ellipse) Click the Ruler icon from Home. The Ruler window is displayed. Select Basic for the Ruler type and click the Circle icon. Draw a circle (or ellipse). An inscribed circle (or ellipse) is drawn in a rectangle by sequentially clicking the beginning and end points in a manner similar to the case of drawing a diagonal line for a rectangle.
Page 267 6.3.9 Measuring the area of the polygon Click the Ruler icon from Home. The Ruler window is displayed. Select Basic for the Ruler type and Click the Polygon icon. Specify the beginning point of the target, and click again on the arbitrary point. Repeat this operation successively.
Page 268 6.3.10 Measuring an angle Click the Ruler icon from Home. The Ruler window is displayed. Select Basic for the Ruler type and click the Angle icon. Sequentially click the beginning, apical and end points of the target object. The angle to be measured is determined and the measured value is displayed. 6-53 No.ISMIT200-1E...
Page 269 6.3.11 Entering a text in the observation window Click the Ruler icon from Home. The Ruler window is displayed. Select Basic for the Ruler type and click the Text icon. In the observation window, click a position into which a text is desired to insert. 6-54 No.ISMIT200-1E...
Page 270 Enter the text, and fix it. The color, font and size of the text conform to Windows OS. Click on the observation screen, and text box is finished. Dragging the confirmed text enables displacing the displaying location. Dragging  in the text box enables the scaling of the box. 6-55 No.ISMIT200-1E...
Page 271 6.3.12 Inserting an arrow in the observation window Click the Ruler icon from Home. The Ruler window is displayed. Select Basic for the measurement type and click the Arrow icon. Sequentially click the beginning and end points in the observation window to specify an arrow.
Page 272 6.3.13 Counting the number of target objects Click the Ruler icon from Home. The Ruler window is displayed. Select Basic for the Ruler type and click the Count icon. Sequentially click the target objects subject to counting. The marks “+” are displayed and the total number thereof is displayed. 6-57 No.ISMIT200-1E...
Page 273 6.3.14 Calibration of Ruler Measurement accuracy of the factory adjusted for each device, but if you want to measure higher accuracy depending on application, please calibrate by the following procedures ※Please prepare for the specimen which becomes the standard of the length by a customer yourself. ※If you calibrated with accelerating voltage and WD you want to use, you can measure more strictly.
Page 274 Input a calibration value for the displayed horizontal distance and click the Apply button. Unit change icon ※ When you wish to befoul the calibration value , click the Reset button. (at shipment from the factory) ※ Input range of the calibration value is ±3% of the default value. The vertical direction of the calibration.
Page 275 6.4 COMPARISON DISPLAY 6.4.1 Displaying an image in full window Click the Full Screen icon from Home. The observation image is enlarged and displayed in full window of the display. Click the Back button in the upper right of the screen displays back the window prior to the enlargement.
Page 276 6.4.2 Dividing・displaying an observation image in different signal domains (Flexible window function) Arbitrary rectangular frames can be provided in the observation window to display images in the frames with different signals. Click the Mode icon from Home and then the Flexible View icon. A rectangular frame is displayed at the center of the main screen.
Page 277 Select a signal inside the rectangular frame to adjust the brightness. Select the flexible window frame, and click a signal of the photo data to select the signal. Adjust the brightness of the image as desired.. Terminate the flexible window display. Click the Mode icon from Home and then the Standard View icon.
Page 278 6.4.3 Displaying an image by mixing two signals (Signal addition image) Two arbitrary signals can be summed and the result can be displayed in the standard window. Click the Mode icon from Home and then the Add Signals icon. The signal addition window is displayed and an image resultant from signal addition is displayed in the main window.
Page 279 Adjust the mixing ratio of respective signals by using the slide button. The mixing ratio is displayed in the upper middle of the slide bar and the adjustment result is reflected to the main window. Mixing ratio Slide button Terminate the signal addition display. Click the Mode icon from Home and then the Standard View icon.
Page 280 6.4.4 Displaying a histogram Click the Histogram icon from Home. The histogram of the observation image is displayed on the upper right of the main screen. ＊ Click the Histogram icon again to terminate the histogram display. 6-65 No.ISMIT200-1E...
Page 281 6.4.5 Adjusting digital images of the observation window The following functions of image adjustment can be utilized with the digital image adjustment function: (Gamma correction, digital contrast, digital brightness, binarization, illuminance inversion, and noise mitigation) Click the Tonality icon from Home. The LUT correction window is displayed.
Page 282 Case of conducting digital contrast correction: Drag the slide button and adjust the contrast value. The adjusted contrast value is displayed in the upper middle of the slide bar. The observation image is automatically corrected with digital contrast. To turn off the digital contrast correction, click the Reset button. Contrast value Case of conducting digital brightness correction:...
Page 283 Case of conducting binarization: Check Binarize. The observation image is automatically binarized. To turn off the binarization, uncheck the check mark or click the Reset button. Case of conducting illuminance inversion: Check Invert. The illuminance of the observation image is automatically inversed. To turn off the illuminance inversion, uncheck the check mark or click the Reset button.
Page 284 Case of smoothing the image: Check Smoothing. The smoothing is automatically applied to the observation image. To turn off the smoothing, uncheck the check mark or click the Reset button. 6-69 No.ISMIT200-1E...
Page 285 6.4.6 Displaying an observation image in pseudo colors The structural image can be emphasized by displaying it in colors. For displaying an image in pseudo colors, operate the following windows and assign preferred colors to respective illuminance gradations of the gray scale. Slide button RGB color display Hue display...
Page 286 Drag the slide button located at the right of the hue display to select an illuminance gradation subject to color assignment. The following illustrates the case of assigning colors for the illuminance gradation of 70 (0 to 255) on the gray scale.The RGB color display is all 70 because of the gray scale. Adjust the mixing ratio of RGB to assign preferred colors.
Page 287 Upon completing the color assignment, the observation window is displayed in pseudo colors. To terminate the pseudo color display, click the Reset button. • The illuminance gradation of the gray scale can be specified from the observation image by using the illuminance extraction function. Click the Get Luminance icon and specify the illuminance gradation of the gray scale from the observation image.
Page 288 6.4.6.b Case of automatically setting color assignment Click the Tonality icon from Home. The Image Lookup Table window is displayed. Select Pseudo Color and click the Apply icon of the automatic color assignment. A pseudo color image applied with the automatic color assignment is displayed. To terminate the pseudo color display, click the Reset icon.
Page 289 6.5 USER SETTING (CUSTOMIZATION) 6.5.1 Ribbon 6.5.1.a Minimizing the ribbon The user can expand the observation screen by minimizing the ribbon. Right-click the menu bar. Click the Minimize the Ribbon. To redo, select the Minimize the Ribbon once again. Default (when there is check mark to the “Minimize the Ribbon”) Maximized (when there is no check mark to the “Minimize the Ribbon”) 6.5.1.b Using quick access toolbar The user can register the functions on the ribbon on the quick access toolbar.
Page 290 6.5.2 Switching the display language Click the Language icon from Setting. The Change Language window is displayed. Select the English or 日本語 icon, and click the OK button. The display language on UI changes. 6.5.3 Changing the theme of UI Click the Theme icon from Settings.
Page 291 6.5.4 Changing the layout of the UI window 6.5.4.a Case of transposing Right and Left of the navigator Click the Navigator icon from Setting. Click either of the Left or Right icon. The location of the navigator area switches. The following illustrates the layout after selecting Left. 6.5.4.b Case of transposing Top and Bottom of the fixation icons Click the Icons icon from Setting.
Page 292 6.5.5 Changing the magnification display The magnification display changes by clicking on the below part. Picture magnification： The real magnification is displayed. Display magnification： The magnification of the monitor that shown to the monitor currently is displayed ※The display magnification changes by the kind of monitor, UI display size. 6.5.6 Setting the detector position on/off Click Settings –...
Page 293 6.5.8 FOV Move Direction The movement direction of the stage movement button of X/Y direction can be changed. Click Settings – Move Direction. Click the Reverse button. To restore, click the Standard button. Batch Setting：The movement direction of the observation screen, graphic screen can be changed with batch.
Page 294 6.5.9 Setting the auto-function 6.5.9.a Setting links of the auto-function Click the Auto icon from Settings. The Auto Settings window is displayed. Check respective checkboxes as needed. Case of checking the checkbox AF Link - ACB: Upon clicking the AF icon, ACB is also executed simultaneously. AS Link –...
Page 295 6.5.10 Setting the display for photo data 6.5.10.a Setting turn-on/off of photo data display items Click the Photo Data icon from Settings. The Photo Data Settings window is displayed. Uncheck the check mark of the items not to be displayed. Unchecked data is not simultaneously saved when saving images.
Page 296 6.5.11 Editing photo data 6.5.11.a Editing the photo number Click Photo Number Area of photo data. The Number window is displayed. Set a number. + button： Counts up. − button： Counts down. Reset button： Sets to “0000.” 6.5.11.b Setting the display of date Click Date Area of photo data.
Page 297 6.5.11.c Editing the comment A text can be entered into the comment area of photo data. Click Comment Area of photo data. The Comment window is displayed. Enter a text in the comment window and press the Enter key. 6.5.11.d Changing the logo image Click Logo Area of photo data.
Page 298 6.5.12 Verifying photo data on the observation image Photo data appended to the image data can be verified on UI when saving the images. Freeze the observation image. Click the Photo Data Verification icon provided on the bottom right of the image. Photo data is displayed at the bottom of the observation image.
Page 299 6.5.13 Constraining power consumption of the equipment (Eco-mode function) Power consumption is constrained when setting the system to standby status. Manual and automatic methods are available for establishing standby status (the latter requires time setting). System standby status ：0.5 kV Acceleration voltage ：OFF Observation...
Page 300 EDS ANALYSIS 7.1 IMPORTANT NOTICE OF EDS ANALYSIS ····································· 7-1 7.2 ELEMENT ANALYSIS WITH CHARACTERISTIC X-RAY ·················· 7-2 7.2.1 Emission of Characteristic X-ray and EDS Analysis ···················· 7-2 7.2.2 X-ray Generation Regions and Spatial Resolution ······················ 7-3 7.2.3 Quantitative Analysis ···························································· 7-4 7.2.3.a ZAF correction method ····························································...
Page 301 7.9.8 Free line spectrum ···························································· 7-19 7.10 ANALYSIS START ·································································· 7-20 7.10.1 Starting the acquisition ······················································· 7-20 7.10.2 The “Spectrum analysis in progress” screen ··························· 7-20 7.10.3 Stopping Acquisition ·························································· 7-21 7.10.4 Completing acquisition ······················································· 7-21 7.11 ACQUISITION LIST ································································· 7-22 7.11.1 Changing the measurement position ·····································...
Page 302 7.14.9.m Turning on and off the cursor display ········································ 7-49 7.14.9.n Turning on and off the VID display ············································ 7-49 7.14.9.o Turning on and off the KLM marker display ································ 7-50 7.14.10 Tool menu of the periodic table ······································ 7-51 7.14.10.a Saving a ROI ·······································································...
Page 303 7.19 SUPPLEMENTARY FUNCTIONS FOR LINE ································ 7-86 7.19.1 Tool menu on the line analysis window ·································· 7-86 7.19.1.a Displaying the overview ························································· 7-87 7.19.1.b Changing automatically the colors of the line profiles ··················· 7-87 7.19.1.c Creating and saving the color scale ········································· 7-88 7.19.1.d Displaying the distance between specified points ························...
Page 304 7.1 IMPORTANT NOTICE OF EDS ANALYSIS  Avoid contacting the X-ray transmission window of the EDS detector The extremely thin window is fragile. If the window is damaged, the performance of the detector will not be utilized fully, requiring off-site repair. ...
Page 305 7.2 ELEMENT ANALYSIS WITH CHARACTERISTIC X-RAY 7.2.1 Emission of Characteristic X-ray and EDS Analysis An electron microscope irradiates the specimen with accelerated electrons. These irradiated electrons interact with the substance and cause various signals to be generated. One of these signals is the characteristic X-ray, which is used for EDS element analysis to analyze the composition of the specimen (qualitative analysis) as well as the content (quantitative analysis).
Page 306 7.2.2 X-ray Generation Regions and Spatial Resolution The electrons irradiated onto the specimen spread out and lose energy as they are scattered. When this scattering occurs, signals like those from secondary electrons and the characteristic X-rays are obtained, which provides various kind of information about specimen surface. Fig. 2 shows the generation regions and the types of signals obtained when a bulk specimen is irradiated with an electron beam.
Page 307 7.2.3 Quantitative Analysis Calculating the composition from the intensity of the characteristic X-rays that are detected is called quantitative analysis. The conversion of the relative intensities of the characteristic X-rays into concentrations is called quantitative correction. With this software two methods can be used for the quantitative correction for SEM;...
Page 308 7.3 OVERVIEW OF THE EDS ANALYSIS TECHNIQUE EDS analysis is performed to collect characteristic X-ray spectra data. Qualitative analysis (identification of elements) and quantitative analysis (element concentrations) are performed on the collected spectra. The electron microscope can perform elemental analysis of the specific areas and obtain two-dimensional distribution of elements.
Page 309 7.4 THE FLOW OF THE BASIC EDS OPERATIONS Preparation of measurement/analysis Live analysis Spectrum analysis Line analysis Map analysis Qualitative/quantitative Qualitative analysis Qualitative analysis analysis Outputting results No.ISMIT200-1E...
Page 310 7.5 PREPARATION OF MEASUREMENT AND ANALYSIS To perform the EDS measurement, please set the observation conditions and measurement conditions. 7.5.1 Setting the observation conditions Acceleration 15 kV 15 kV (or greater) is recommended for quantitative analysis. voltage (Recommended) Although there may be times when the operator decides to use low accelerating voltage for the specimen conditions, note that the analysis accuracy may be decreased.
Page 311 7.6 INSPECTION OF THE EDS ANALYSIS ACCURACY In order to maintain the accuracy of the analysis, it is necessary to perform periodic inspection.  If the peak position of the reference element is shifted, qualitative and quantitative analysis may not be performed correctly for all elements.
Page 312 Adjust PC so as that the X-ray count rate becomes about 20,000 cps while watching the count rate monitor. Click Settings – EDS Adjustment. Click the Energy Calibration tab. Check the all process time and Click Start button. The energy calibration is started. The energy calibration is completed, the following screen appears.
Page 313 7.7 PERFORMING THE LIVE ANALYSIS In the middle of observation or searching for the field of view, the operator can check the EDS analysis result of the view currently being observed. The spectra in the spectrum monitor cannot be saved. Perform the EDS analysis to save a spectrum. Click the Observation icon.
Page 314 7.8 PERFORMING THE INSTANT ANALYSIS The spectrum analysis of any one point (analysis point) on a specimen is performed only while the operator is touching the screen. The measurement starts immediately upon Clickping, therefore the time taken for identifying the measured area can be shortened. The spectra acquired from the instant analysis cannot be saved.
Page 315 7.9 PERFORMING THE EDS MEASUREMENT 7.9.1 Point analysis Click the Point icon to select. Specify the position that needs to be analyzed on the SEM image. 7-12 No.ISMIT200-1E...
Page 316 7.9.2 Whole/Area spectrum Click the Whole・Area icon to select. The followings icon is changed every clicking. ・Whole spectrum Area spectrum Specify the position that needs to be analyzed on the SEM image. Whole spectrum： Click on the SEM image. This sets the analysis area on the whole area on the image that was clicked.
Page 317 7.9.3 Whole/Area map Click the Map・Area Map icon to select. The followings icon is changed every clicking. ・Whole map Area map Specify the position that needs to be analyzed on the SEM image. Whole Map： Click on the SEM image. This sets the analysis area on the whole area on the image that was clicked.
Page 318 7.9.4 Line/Tilted Line Click the Line・Tilted Line icon to select. The followings icon is changed every clicking. ・Line Tilted Line Specify the position that needs to be analyzed on the SEM image. Horizontal line: Click on the SEM screen. This sets the analysis area horizontal to the position to which the image was clicked.
Page 319 7.9.5 Particle spectrum Click the Particle icon to select. Specify the position that needs to be analyzed on the SEM image. Moving the mouse cursor on the SEM image will highlight the areas with the same brightness; Then clicking will set the analysis area on the position that was highlighted. 7-16 No.ISMIT200-1E...
Page 320 7.9.6 Polygon spectrum Click the Polygon icon to select. Specify the position that needs to be analyzed on the SEM image. Click more than once on the SEM screen. A vertex will be added each time the operator clicks a point. To add the final vertex, double-click on the last vertex location.
Page 321 7.9.7 Ellipse spectrum Click the Ellipse icon to select. Specify the position that needs to be analyzed on the SEM image. Drag on the SEM image. This sets the analysis area on the position to which the image was dragged. 7-18 No.ISMIT200-1E...
Page 322 7.9.8 Free line spectrum Click the Free Line icon to select. Specify the position that needs to be analyzed on the SEM image. Click more than once on the SEM image. A vertex will be added each time the operator Clicks a point. To add the final vertex, double-Click on the last vertex location.
Page 323 7.10 ANALYSIS START 7.10.1 Starting the acquisition Click the Start button. Estimated time for the acquisition is also displayed. Estimated time of analysis 7.10.2 The “Spectrum analysis in progress” screen When the operator starts an analysis, the display indicating that the analysis is in progress appears on the top left corner of the SEM image.
Page 324 7.10.3 Stopping Acquisition To stop a measurement in the middle of processing, click the Stop button. Name Description Stop button Ends the measurement. The analysis for the measurement in progress will be considered to be “completed”. The measurement that hasn’t been executed yet remains in the reserved status.
Page 325 7.11 ACQUISITION LIST Click the Home - Acquisition List icon. The Acquisition List appears. The kind of type, condition and order of the reserved analyses can be changed. Please see the following pages. 7-22 No.ISMIT200-1E...
Page 326 7.11.1 Changing the measurement position To change the position for the reserved measurement, follow the procedure below. ※The operator cannot change the position of a measurement that has already been acquired. Click the Select icon. Click the area of the measurement position that needs to be changed. Drag the mouse to move the area to the new position.
Page 327 7.11.2 Changing the acquisition conditions The reserved acquisition condition(s) can be changed. Select the number for the item to be changed, and click the Conditions... button. Make changes for the displayed analysis condition, and click OK button. 7-24 No.ISMIT200-1E...
Page 328 7.11.3 Changing the acquisition sequence Click the number for the item for which the order needs to be changed. Clear the check mark of Set auto acquisition sequence check box. Change the order by clicking the up-down arrow buttons. Up-down arrow buttons 7.11.4 Deleting a measurement Select the number for the item to be deleted, and click the Delete icon.
Page 329 7.12 SPECTRUM ANALYSIS Various types of analysis operations can be performed from the detailed display as well as the spectrum analysis window displayed when the spectrum data is opened. 7.12.1 Performing qualitative analysis Types of elements included in any analysis area are analyzed. ♦...
Page 330 ♦ Manual identification The operator registers any element as the qualitative element. Click the Periodic Table tab. Click the element to be identified. The analytical result is displayed. The element label appears on the spectrum. 7-27 No.ISMIT200-1E...
Page 331 7.12.2 Performing quantitative analysis Percentages of elements included in any analysis area are analyzed. ◆CAUTION◆  Perform EDS analysis at specified working distance (WD). The analytical accuracy may deteriorate if analysis is performed at the WD different from the current ...
Page 332 7.12.3 Screen display while spectrum analysis is in progress While spectrum analysis is in progress, the operator can check the spectrum analysis results from each of the display layouts. ※For the spectrum analysis operations, see the section “Performing spectrum analysis”. ♦...
Page 333 7.12.4 Spectrum analysis stop Click the Stop button while the spectrum analysis is being performed, the dialog below appears. Yes (Y): Stops analysis immediately. No (N): Continues analysis. 7-30 No.ISMIT200-1E...
Page 334 7.13 ADVANCED OPERATIONS 7.13.1 Spectrum Analysis Operations Quantitative analysis can be performed with higher accuracy if the user himself acquires a standard reference spectrum using a standard specimen. ※To perform standard quantitative analysis, the administrator needs to create the standard reference data in advance.
Page 335 7.13.2 Prevent the incorrect or overlooked identification The operator can view the qualitative results by comparing the measured spectrum and the synthetic spectrum of the qualitative elements (VID spectrum). By doing so, incorrect or overlooked identification can be prevented. ◆CAUTION◆ ...
Page 336 7.13.2.b Fix the peak by using the VID spectrum Magnify the vicinity of the peak that needs to be identified, and double-click on the peak. The pinch-out zoom gesture on the spectrum can be used to enlarge the spectrum display. Select the list item you want displayed.
Page 337 Select the check box (es) of the elements for which qualitative analysis to be performed. After checking the preview of any element in the list, select the check box for the element to indicate that you want qualitative analysis to be performed for the element. The element with the check box selected will be added as a manual qualitative element.
Page 338 7.13.2.c Displaying the residual spectrum for VID This function displays the spectrum (residual spectrum) showing the difference between the measured spectrum and the synthetic spectrum. By checking the residual spectrum, the operator can avoid having trace elements missed in the qualitative analysis. Click the Residual Spectrum for VID button.
Page 339 7.13.3 Changing the emission lines for analysis during manual identification Rotate up/down the target element button in the periodic table with the mouse scroll button. The emission line appears. Change the emission line. Release a finger from the element button. The element is identified with the region of interest (ROI) and the emission line used for quantitative analysis changed.
Page 340 7.13.4 Changing the emission line when quantitative analysis is performed Select the emission line from the quantitative results. The lines choices appears. Select the emission line. The emission line is changed, and recalculation is performed. 7-37 No.ISMIT200-1E...
Page 341 7.14 SUPPLEMENTARY FUNCTIONS FOR SPECTRUM 7.14.1 Tool Menu on the Spectrum Analysis Window Item Description Spectrum List Displays the list of the spectra. The display of each spectrum can be switched on/off during comparative display. ROI Information Displays the ROI information. Info.
Page 342 7.14.2 Changing a spectrum to be displayed The color can be changed and the display of each spectrum can be switched on/off during comparative display. Select Spectrum List in the tool menu Select the spectrum to be displayed. The selected spectrum is displayed. 7.14.3 Changing the color of the displayed spectrum The color of individual spectrum for comparison display is changed.
Page 343 7.14.4 Displaying the ROI information The ROI information about the qualitative elements is displayed. Counts and the center of gravity position for each ROI are displayed. Select ROI Information in the tool menu. “ROI” is the abbreviation for “Region of Interest”, which indicates the focused energy range. “Net”...
Page 344 7.14.6 Displaying the full-width at half-maximum (FWHM) Select FWHM in the tool menu. The FWHM of the specific elements is displayed. The energy resolution of the detector is also displayed. 7.14.7 Copying a spectrum Select Copy Spectrum in the tool menu. The selected spectrum is copied to the clipboard as an image.
Page 345 7.14.8 Displaying properties Select Properties in the tool menu. The information about the selected file, instrument, and acquisition is displayed. 7-42 No.ISMIT200-1E...
Page 346 7.14.9 Setting Menu on the Spectrum Window Click the Settings button. The following dialog is displayed, and the related to the spectrum display can set. For details, refer to the following page. Item Description Spectrum Spectrum display Changes the type of a spectrum to be displayed. Line type Changes the display method for the target spectrum.
Page 347 7.14.9.a Changing the type of spectrum The type of the spectrum displayed can be changed. Spectrum ＋ the measured spectrum Spectrum Spectrum with sum peaks removed ＋ spectrum Spectrum with sum peaks removed 7.14.9.b Changing the type of graph The display of the spectrum is changed to the line or bar graph. Line display Bar display 7-44...
Page 348 7.14.9.c Changing the type of line display The line thickness and line type for the spectrum can be changed. Normal display Bold line display Dotted line display 7.14.9.d Changing the line color The line color of the displayed spectrum can be changed. 7-45 No.ISMIT200-1E...
Page 349 7.14.9.e Changing the scale range The scale of the vertical axis can be changed by entering the desired value. Linear display Log display Root display 7.14.9.f Change the scale of vertical axis The scale of the vertical axis can be changed. Liner Root 7-46...
Page 350 7.14.9.g Switching between the scale units for the vertical axis Count display CPS display Displays the integral dose of X-ray Displays the integral dose of X-ray per second. CPS/ Current value display Displays CPS per unit of current value 7.14.9.h Applying auto scaling When the “Auto scale”...
Page 351 7.14.9.j Switching between the display type of the element labels The display type of the element label is switched. Element symbol Element symbol＋main line Element symbol＋main line＋sub-line 7.14.9.k Setting the custom scale Enter arbitrary value and set the custom scale. Click the Custom scale button The custom scale is applied.1.
Page 352 7.14.9.l Turning on/off the ROI display Switches between Display/Hide for the ROI display. ROI is displayed ROI is hidden 7.14.9.m Turning on and off the cursor display Switches between Display/Hide for the cursor display. Cursor is displayed Cursor is hidden 7.14.9.n Turning on and off the VID display Switches between Display/Hide for the display of the residual spectrum (VID spectrum).
Page 353 7.14.9.o Turning on and off the KLM marker display Switches between Display/Hide for the KLM marker display. KLM marker is displayed KLM marker is hidden 7-50 No.ISMIT200-1E...
Page 354 7.14.10 Tool menu of the periodic table The ROI currently set is saved so that it can be used for the subsequent measurements. Or, saved ROI can be loaded. 7.14.10.a Saving a ROI A ROI is added or adjusted as necessary. For details, refer to the [Adding a ROI] [Adjusting the ROI range] Click Open or save ROI settings in the tool menu.
Page 355 7.14.10.b Loading a ROI Click Open or save ROI settings in the tool menu.. The list of the saved ROI appears. Select the ROI to be loaded from the list of the “Saved ROI”. Click the Apply button. The selected ROI is applied to the spectrum. 7-52 No.ISMIT200-1E...
Page 356 7.14.10.c Adding a ROI ♦ Adding a ROI at the position of the emission line Click the ROI button of the periodic table. Select an element. Select the emission line. The ROI is added at the position of the emission line. 7-53 No.ISMIT200-1E...
Page 357 ♦ Adding a ROI at the desired position Click the ROI button of the periodic table. Move the cursor to the desired position on the spectrum. Click the J1 button of in the Periodic Table tab panel. The ROI is added at the position of the cursor. 7-54 No.ISMIT200-1E...
Page 358 7.14.10.d Adjusting the ROI range Click the ROI display button. Click the ROI of the element for which the ROI range is to be changed. Drag to adjust the ROI. Dragging around the center of the ROI: Parallel shift Before adjustment After adjustment Dragging the ends of the ROI: Increase and decrease in the ROI Before adjustment...
Page 359 7.14.11 Tools for the Quantitative Results Item Description Oxide Table Enables the editing of the oxide name to be displayed on the quantitative results. Copy Result Copies the quantitative results in text format. 7.14.11.a Editing the Oxide Table Click Oxide Table in the tool menu. Double-click the Oxide Name to be changed.
Page 360 7.14.12 Quantitative Result Settings Item Description Display method Switches between the display methods for the quantitative results. Excluded element Switches between Display/Hide for the display of the elements excluded from the quantification. Sort priority Switches between ON/OFF for the Sort priority function. Sort priority settings Sets the condition for the Soft priority settings.
Page 361 7.14.12.b Switching the display of an excluded element The elements excluded from the quantification can be displayed or hidden. The excluded element is displayed The excluded element is hidden 7.14.12.c Sorting the quantitative results The quantitative result of the element with a higher priority can be placed at the top of the results display.
Page 362 7.14.12.d Moving up/down the priority level of an element When the operator has added multiple elements to the “Priority list”, the quantitative results are displayed in the order that the elements are listed in the “Priority list”. To change the order in the “Priority list”, follow the procedures below.
Page 363 7.15 MAP ANALYSIS Various types of analysis operations can be performed from the detailed display as well as the spectrum analysis window displayed when the map data is opened. 7.15.1 Performing qualitative analysis Types of elements included in any analysis area are analyzed. ♦...
Page 364 ♦ Manual identification The operator registers any element as the qualitative element. Click the Periodic Table tab. Click the element to be identified. The analytical result is displayed. The element label appears on the spectrum. 7-61 No.ISMIT200-1E...
Page 365 7.15.1 Screen display while map analysis is in progress While map analysis is in progress, the operator can check the map analysis results from each of the display layouts. ♦ Simplified display The map currently being analyzed (a color composite map) is displayed at the lower right of the main screen.
Page 366 7.15.2 Map analysis Click the Stop button while the map analysis is being performed, the dialog below appears. Immediate Stop: Stops analysis immediately. Line End Stops analysis after performing the measurements to the end of the current line. Frame End Stops analysis after performing the measurements to the end of the current frame.
Page 367 7.16 MAP ANALYSIS OPERATIONS 7.16.1 Creating a net map The operator can create an element map using the count after the background is removed and peaks are separated (net count). *A sufficient amount of the X-ray signals are required for creating a correct quantitative map. Perform the map analysis.
Page 368 7.16.2 Changing the conditions for creating a net map Click the Analysis condition icon for the net map and quantitative map. Select the Net Map tab. Change the conditions. Item Description Resolution The resolution of a net map can be changed. If a sufficient amount of x-ray signal is not expected, lowering the resolution is recommended.
Page 369 7.16.3 Quantitative Map Quantitative analysis is performed from the spectrum of each pixel, and a map image is created based on the result. ※A sufficient amount of the X-ray signals are required for creating a correct quantitative map. ※A quantitative map can only be created after an element map is measured. During measurement, a quantitative map will not be created nor displayed.
Page 370 7.16.4 Changing the conditions for creating a quantitative map Click the Analysis condition button for the net map and quantitative map. Select the Quant. Map tab. Change the conditions for creating a quantitative map. Item Description Resolution The resolution of a quantitative map can be changed. If a sufficient amount of x-ray signal is not expected, lowering the resolution is recommended.
Page 371 7.16.5 If the map image unclear Filtering of an element map is performed. This function is used when the X-ray amount is small and the distribution is unclear. <The kind of the filter> Filter Description Displays the map image without filtering. None Smoothes the image.
Page 372 7.16.6 Spectrum Extraction (Popup Spectrum) A spectrum is extracted from any area of the element map for display. Click Popup Spectrum in the tool menu. The menu for creating a popup spectrum appears. Select the extraction method. Point Tool Extracts the spectrum of the point specified by the operator. Region Tool Extracts the spectrum of the area specified by the operator.
Page 373 Select the area from which the spectrum is extracted on the map image as follows.  For a point: Click the pixel to be extracted on the map image.  For an area: Drag the mouse from the starting point on the map image and specify the area to be extracted. A separate window for the extracted spectrum appears when the extraction area is specified.
Page 374 7.17 SUPPLEMENTARY FUNCTIONS FOR MAP 7.17.1 Tool Menu on the Map Window Item Description Overview Displays the overview of a map image. Color Scale Displays the color scale of the image. Histogram Displays the palette used to change the color of a map image. Popup Spectrum Displays the window to create a pop-up spectrum.
Page 375 7.17.1.a Displaying the overview Click the Overview in tool menu. The enlarged display range for a map image is displayed. 7.17.1.b Displaying the color scale Click the Color Scale in tool menu. The color scale of each map image is displayed. 7-72 No.ISMIT200-1E...
Page 376 7.17.1.c Adjusting the color of a map image Click the Histogram in tool menu The minimum and maximum values of the color scale can be changed. Change the applied range of the color scale. TIck the Unify All Scale check box, unify the scale range for all map images. Drag the △...
Page 377 7.17.1.d Applying a single color to a map image Click the Histogram in the tool menu. Click the SingleColorPalette from the drop-down list. Click the Apply button. The map image is displayed in a single color. 7-74 No.ISMIT200-1E...
Page 378 7.17.1.e Applying multiple colors to a map image Click the Histogram in the tool menu. Click the MultiColorPalette from the drop-down list. Click the Apply button. The map image is displayed in multiple colors. 7-75 No.ISMIT200-1E...
Page 379 7.17.1.f Creating and saving the color scale The operator can create and save a color palette, and then apply the color palette to a map image. Click the Histogram in the tool menu. Click the element for which the color scale will be changed. To increase the number of colors, click the ＋...
Page 380 7.17.1.g Extracting the spectrum (Popup spectrum) Click the Popup Spectrum in the tool menu. The window used to create a pop-up spectrum is displayed. 7.17.1.h Creating the Line profile Click the Line Profile in the tool menu. The window used to create a line profile is displayed. Click the Line button.
Page 381 A separate window for the line profile appears when the area is specified. The created line profile will be linked to the element map and saved. 7.17.1.i Displaying properties Click Properties in the tool menu. The information about the selected file, instrument, and acquisition is displayed. 7-78 No.ISMIT200-1E...
Page 382 7.17.2 Setting the Map Window Item Description Scalebar position Sets the display position for of scale bar. Color scale Switches between Display/Hide for the color scale display. Cursor Switches between Display/Hide for the cursor display. Others Popup spectrum Switches between Display/Hide for the popup spectrum display. Line profile Switches between Display/Hide for the line profile display.
Page 383 7.17.2.a Setting the display position of the scale bar The operator can set the position where the scale bar of a map image is displayed. Hidden Displayed outside the map Displayed at upper left corner Displayed at upper right corner Displayed at lower left corner Displayed at lower right corner 7.17.2.b Displaying/ hiding the color scale...
Page 384 7.17.2.c Displaying/ hiding the cursor The cursor can be displayed or hidden. Displayed Hidden 7.17.2.d Displaying/hiding the position where a popup spectrum was created The position where a popup spectrum was created can be displayed or hidden. Displayed Hidden 7.17.2.e Displaying/hiding the position where a line profile was created The position where a line profile was created can be displayed or hidden.
Page 385 7.18 LINE ANALYSIS Various types of analysis operations can be performed from the detailed display as well as the line analysis window displayed when the line data is opened. 7.18.1 Performing qualitative analysis Types of elements included in any analysis area are analyzed. ♦...
Page 386 ♦ Manual identification The operator registers any element as the qualitative element. Click the Periodic Table tab. Click the element to be identified. The analytical result is displayed. The element label appears on the spectrum. 7-83 No.ISMIT200-1E...
Page 387 7.18.2 Screen display while line analysis is in progress While line analysis is in progress, the operator can check the line analysis results from each of the display layouts. ♦ Simplified display The line currently being analyzed is displayed at the lower right of the main screen. ♦...
Page 388 7.18.3 Line analysis Click the Stop button while the line analysis is being performed, the dialog below appears. Immediate Stop: Stops analysis immediately. Line End: Stops analysis after performing the measurements to the end of the current line. No (N): Continues analysis.
Page 389 7.19 SUPPLEMENTARY FUNCTIONS FOR LINE 7.19.1 Tool menu on the line analysis window Item Description Overview Displays the overview. Palette Displays the color palette of the line profiles. Distance Between Displays two cursors on the line profiles and shows the distance between Cursors the two points.
Page 390 7.19.1.a Displaying the overview Click the Overview in the tool menu. The area for which the line profiles are viewed is displayed. 7.19.1.b Changing automatically the colors of the line profiles Click the Palette in the tool menu. Click the Auto button. Click the Apply button.
Page 391 7.19.1.c Creating and saving the color scale Change the line profile of individual element to arbitrary color, and saving is possible. The saved palette is registered in the list, and it can load anytime. Select the Properties in the tool menu. Click a color on the palette.
Page 392 7.19.1.d Displaying the distance between specified points Select the Distance Between Two Cursors in the tool menu. Two cursors will be displayed on the line profile, and the distance between the two cursors is displayed at the lower right. 7.19.1.e Copying an image Select the Copy Image in the tool menu.
Page 393 7.19.1.g Displaying properties Click the Properties in the tool menu. The information window as follows is displayed 7-90 No.ISMIT200-1E...
Page 394 7.19.2 Setting Menu on the Line Window Item Description Switches between Display/Hide for the electron microscope image Electron Image display. microscope Switches between Display/Hide for graph on the electron image Graph microscope image display. Line display Changes the type of graph. Graph Display type Changes the display method for the selected graph.
Page 395 7.19.2.a Electron microscope image The electron microscope image/graph is displayed or hidden. Electron microscope image Graph display 7.19.2.b Changing the type of graph The type of the line profiles can be changed. Line Line and smoothing Line and differential line Smoothing Differential line 7-92...
Page 396 7.19.2.c Display type The display type of the line profiles can be changed. Multiple Parallel The line profiles for all the identified elements are The line profiles for all the identified elements are overlapped for display. displayed individually in a stack. 7.19.2.d Scale unit The scale unit for the vertical axis can be changed.
Page 397 7.19.2.e Normalizing the line profiles When the check box for “Normalized by maximum Intensity” is selected, the maximum value for each element is normalized to 100. Before adjustment After adjustment 7.19.2.f Displaying the line profiles with auto scale When the “Auto scale” check box is selected, the vertical axis is set automatically, and the entire view of the line profiles is displayed.
Page 398 PREPARATION OF REPORT 8.1 START ···················································································· 8-1 8.2 CREATING A NEW FILE ···························································· 8-2 8.2.1 New layout ········································································ 8-2 8.2.2 Existing layout ···································································· 8-3 8.3 CREATING A LAYOUT ······························································ 8-4 8.3.1 Adding text ········································································ 8-5 8.3.2 Adding fixed text ································································· 8-6 8.3.3 Adding an image·································································...
Page 399 8.7.4 Changing headers and footers ············································· 8-18 8.7.5 Adding page numbers ························································ 8-19 8.7.6 Aligning the position of the item ············································ 8-20 8.7.7 Changing color of each item ················································ 8-21 8.7.8 Return the edition content ··················································· 8-21 8.7.9 Applying similar data ·························································· 8-22 8.7.10 Editing comments to each layout ··········································...
Page 400 8.1 START The data management window is a viewer on which the user can manage the microscopy images acquired, analyzed, and saved, as well as EDS data. Reports created and layouts can also be managed in this window. Click the Date Management icon. The Data Management window will appear separately.
Page 401 8.2 CREATING A NEW FILE 8.2.1 New layout This section explains how to create a new layout from the beginning. Click layout tab, and the New icon. It is the same even if you click the Home - New icon. Select a layout you want to create from the Select Layout dialog, and click the Next button.
Page 402 8.2.2 Existing layout This section explains how to create a new layout from an existing layout. ※The layout that “System” is displayed cannot be saved (overwritten), assign a different name before saving. Click layout tab. Select a layout and double-click it. The layout editor window appears.
Page 403 8.3 CREATING A LAYOUT The table below shows the layouts that can be created and the items (functions) that can be added. The check mark indicate the availability of the items for the corresponding layouts. For operations of the items that can be added, refer to the next page onward. Additionally, for saving the layout you created, refer to Section 8.5.
Page 404 8.3.1 Adding text This section explains how to add a frame used to display any text entered by the user. SMileViewLab does not have a free editing function for a report. Therefore, text entered at the time the layout is created will be displayed as is. Click the Text icon.
Page 405 8.3.2 Adding fixed text This section explains how to add a frame for fixed text entry, which changes when the settings such as a title and subtitle are entered. Click the Fixed Text icon. Click the layout window that is displayed. A frame in which fixed text is entered (called “item”...
Page 406 8.3.3 Adding an image This section explains how to add any image specified by the user. Click the Image icon. The Open Image File dialog box for selecting images appears. Select the image, and click the Open button. A frame in which an image is inserted (called “item” hereinafter) is placed. Change the size and position of the item.
Page 407 8.3.4 Adding layout Click layout icon to add. Adding a sample image Add a frame used to display the specimen holder graphic or the photo image. Adding the SEM image Add a frame used to display the scan image data acquired with the electron microscope. Add the spectrum image.
Page 408 Add a popup spectrum Add a frame used to display the pop-up spectrum data composed of the map data acquired with the EDS.  Single: Displays one quantitative result for one spectrum item.  Multiple: One quantitative result is displayed for one spectrum (multiple) item. ...
Page 409 8.4 ADDING DATA TO THE REPORT You can add not only one data but also multiple data and multiple types of data to the report. 8.4.1 Adding data to a report from a data list In the Project tab, select the data you want to add to the report. Right-click the screen, and select "Add to the report".
Page 410 8.4.2 Adding multiple data If the print preview screen has already been opened, the next operation will start.  A dialog box will appear asking if you want to add data. (If you do not add data, it will be newly created.
Page 411 8.4.4.a Adding scan image data to the report of an image When space is available in the layout Data will be added to the space of the layout. (Example: One additional electron microscopic image) Before image addition After image addition When space is unavailable in the layout A new page is created and data is added.
Page 412 8.5 SAVING A LAYOUT The created layout is saved. The saved layout can be viewed in the layout list. ※ You cannot overwrite (save) any of the layouts that were provided with the system originally. Use the “Save As” command. 8.5.1 Save as Save the layout with a new name.
Page 413 8.6 GENERATING A REPORT You can generate a report that you have created. 8.6.1 Generating a report in electronic data You can generate a report in a specified electronic data format. Click the icon to select the format in which you want to generate the report. Specify the format.
Page 414 8.7 ADVANCED SETTINGS 8.7.1 Explanation of the print preview screen configuration Item Description Ribbon Includes various buttons necessary for operation. Overwrites and saves data of the report currently being Save edited. Saves data of the report under another name currently Save As being edited.
Page 415 8.7.2 Adding a report cover You can add a cover to the first page of the report. Select the Add Cover check box. A cover page is attached to the first page of the report. Click the Report Setting icon. The document property dialog box appears.
Page 416 8.7.3 Creating a header and footer This section explains how to create a layout for a header and footer added on each page of a report. No header or footer will be added on the cover page. Show Margin (Dotted Line) for a header and footer Dotted lines to show margins for a header and footer can be displayed when a layout is created.
Page 417 8.7.4 Changing headers and footers You can change the content of headers and footers. Click Home - Header and Footer check box. The header and footer layouts is displayed. Select the header and footer you want to change. The header and footer are changed. Click the Report Setting icon.
Page 418 8.7.5 Adding page numbers This section explains how to add page numbers that are automatically increased and decreased. Click the Page Number icon. Click the layout window that is displayed. A frame in which a page number is inserted (called “item” hereinafter) is placed. Enter text in the selected item and change the size and position.
Page 419 8.7.6 Aligning the position of the item The item position which added with layout can be aligned Select the item you want to align. Select Edit – Arrange icon to choose the alignment type for the items. ※ Multiple selection are as follows; ...
Page 420 8.7.7 Changing color of each item ＜Change the border＞ Select item. Click Edit – Figure icon, and select Border. Select a color in the palette. ＜Changing the fill＞ Select the item. Click Edit – Figure icon, and select Fill. Select a color in the palette. 8.7.8 Return the edition content ＜Initial condition＞...
Page 421 8.7.9 Applying similar data While editing a layout, the user can apply the similar data to the created layout to display an approximate image of the completed layout. Place an item on the layout. Click the Preview Data icon. Display the prepared data on the item. Set the number of the similar data.
Page 422 8.7.10 Editing comments to each layout The entered comment is displayed to the comment field in the Layout. Click the Item – Comment icon. The Comment Editor window appears. Enter text in this window. 8-23 No. ISMIT200LA-1E...
Page 423 8.7.11 Setting the items displayed as the conditions The user can specify the items displayed in the windows for the observation conditions of the scan image data as well as the measurement conditions of the EDS data. ※ The user can save the settings for the observation (measurement) conditions for each layout. Click Settings - Measurement Conditions icon.
Page 424 8.7.13 Moving data You can move the position of the data after you have decided on the layout and the data is added to the report. When you select the data you want to move from the data sorting pane of ⑧ in “8.7.1”, it will be highlighted in blue.
Page 425 OPERATION OF DATA CONTROL SCREEN 9.1 OPEN THE DATA CONTROL SCREEN OPEN ······························· 9-1 9.2 PROJECT················································································ 9-3 9.2.1 Operation in ribbon menu ····················································· 9-3 9.2.2 Operation in folder area ························································ 9-8 9.2.3 Operation in file area ························································· 9-14 9.2.4 Operation in sample image area ·········································· 9-17 9.3 FAVORITE ·············································································...
Page 426 9.6 EDITION OF ANALYSIS SCREEN ·············································· 9-32 9.6.1 Open the analysis screen ··················································· 9-32 9.6.2 Edit the sample image data ················································· 9-34 9.6.3 Edit the SEM image ··························································· 9-35 9.6.4 Edit spectrum analysis ······················································· 9-36 9.6.5 Edit the map analysis ························································· 9-39 9.6.6 Edit the popup spectrum ·····················································...
Page 427 9.1 OPEN THE DATA CONTROL SCREEN OPEN The data management screen is a viewer for managing SEM images, EDS data, created reports, layouts, etc. after photography and measurement are completed and saved. Click the Data Management icon. The data control screen in another window is opened. No.
Page 428 In folder, icon of file area, there is meaning that is shown in table. Icon name Icon Sample image icon F.O.V image icon Spectrum icon Line icon Map icon Comparison spectrum icon Pop up spectrum icon Line profile icon Map montage icon Report icon No.
Page 429 9.2 PROJECT 9.2.1 Operation in ribbon menu ※ There is button that is enabled/disabled by data control screen tab selection and data selection. 9.2.1.a Copy the project Select the project.（Multiple selection possible） Click the Copy Project icon. Click the Copy button of the dialog. The copying will start, and after copy complete the same project prepared.
Page 430 9.2.1.c Export date Select the project. (Multiple selection possible) Click the Export icon. The following screen is displayed. Enter a filename and select the output folder. Click the Export button. The export file is outputted with dedicated format (*.jlz). ※ Do not do other operation during data export. 9.2.1.d Search the registered data Click the Search icon.
Page 431 9.2.1.e Display the self data/all data To display the registration data all, logging on with administrator is needed. Click the Data Display Switching icon. Select either on the dialog, and Click the OK button. • Display the self (user at log-on) data only •...
Page 432 9.2.1.h Switching the user of the project Click the Change User icon. The User management screen is displayed. Select a user and click Logon button. No. ISMIT200-1E...
Page 433 9.2.1.i Shearing the data ※ Log-on in administrator is necessary. Click Admin - Data Shearing icon. Click Share／Do not share button Share： The following prepared data that other user can edit. Project, Report, Recycle bin Do not share： Only the self data can edit. 9.2.1.j Confirm the software-version Click Help - Version icon.
Page 434 9.2.2 Operation in folder area Operation menu changes in content that display by selecting level. Also content that is displayed using the context menu, same menu is displayed. ※ The context menu, select data, and is displayed when or right-click. Folder area is configured in Project, Sample, and Grouping/F.O.V.
Page 435 9.2.2.a Changing folder name Select a target folder and select Rename in operation menu. Enter the folder name, and click the OK button. The folder name is changed 9.2.2.b Re-analyze the data of target folder ※ The data of target folder cannot be re-measured. Select a target folder and select Batch analysis of spectrum in operation menu.
Page 436 9.2.2.d Copy the project Select project folder. When selecting multiple folders, select while holding down the Shift key Select Copy in operation menu. 9.2.2.e Export the project Select project folder. When selecting multiple folders, select while holding down the Shift key. Select Export in operation menu.
Page 437 9.2.2.g Move the sample to another project Select sample folder. When selecting multiple folders, select while holding down the Shift key. Select Move to another project in operation menu. Select the project in a movement destination and click the OK button. 9.2.2.h Prepare a new project Click the Create new project icon.
Page 438 9.2.2.j Switching the folder area display ♦ Display the hot data Hot data are something about data that is performing processing including edition with other process. In time of initial startup of data management, sample of hot data is displayed in selecting status. Click the Filter button.
Page 439 ♦ Switching the display type Click Change view type button, select from the list. Thumbnail Tree List ♦ Sort the folder area display Click the Sort button. Select target items. The “Name”, “User Name”, “Date Created” and “Date Modified” is shown in Ascending/Descending order.
Page 440 9.2.3 Operation in file area 9.2.3.a Open the file Select the file. Select Open in operation menu. Double-click on the file is the same. Analysis screen according to data is displayed. For details, see 9.6. 9.2.3.b Change the file name Select the file.
Page 441 9.2.3.g Save data with another file format If you want to save with another format, operate as follows. Select the file, and select Save to another format in operation menu. Select format from the dialog, and click the Save button. Format that can save by the selecting data are different.
Page 442 9.2.3.i Decompress/un-decompress the group files File that is becoming grouping (montage and map) as decompression/non decompression can display. Click the Grouping ON/OFF button, and multiple select the purpose data. To cancel, selecting data be selected again. 9.2.3.j Change view type ♦...
Page 443 9.2.4 Operation in sample image area What is sample image ? This is the camera image (an optional SNS is attached) or holder graphic image of the specimen holder. This area is displayed, only when a sample from folder area is selected, and camera image or holder graphic image of specimen holder when an optional SNS is mounted.
Page 444 9.2.4.c Adjust the transmission of SEM image Set the full transmission and non-transparent of SEM image that is displayed on sample image, and set the transmittance with the slider. Click Show image button. If you set in full transmission, set transmittance by the slider. Range：0 - 100％...
Page 445 9.3 FAVORITE Perform “Add favorite” in file area of Project, it is displayed in the Favorite. 9.3.1 Open the file location Select the file. Select Open File Location in operation menu. The screen changes to Project, a data of file area becomes selection status。 9.3.2 Cancel the favorite Select the file.
Page 446 9.3.4 Change view type Click the Change view type button and select from the list List Thumbnail 9.3.5 Sort favorite display Click the Sort button. The “Name”, “User name”, “Date Created”, “Date Modified” is shown in Ascending/Descending order. ※At list display, double-Click the items name, ascending/descending order of each item is displayed.
Page 447 9.4 REPORT Repot that is created and saved is displayed. 9-21 No. ISMIT200-1E...
Page 448 9.4.1 Open the print preview screen Select the report. Select Open in the operation menu. ※ It is also possible to double-click the report or click the Open report data button. The print preview screen is displayed. 9-22 No. ISMIT200-1E...
Page 449 9.4.2 Change the name of report Select report. Select Rename in the operation menu. It is also possible the Rename report data button. A dialog is displayed. Enter the file name, and click Rename button. The report is renamed. It is possible to enter up 255 characters. Duplicate names are not allowed.
Page 450 9.4.3 Delete the report Select report. Select Delete in operation menu. It is also possible the Delete button, Delete key of the keyboard. Click the OK button with following dialog. The report is deleted. 9-24 No. ISMIT200-1E...
Page 451 9.4.4 Export the report Select report. Select Export in the operation menu. A dialog opens. Enter the file out folder, and click the Export button. The export file is outputted with dedicated format (*.jlz). ※ Do not do other operation during data export. 9-25 No.
Page 452 9.4.5 Change view type Click the Change view type button. List display： “Name”, “User name”, “Date Created”, “Date Modified” Thumbnail display： Displays in the order of ASCII. 9.4.6 Sort the report display Click the Sort button. Select target items. 9-26 No.
Page 453 9.5 LAYOUT 9.5.1 Open the layout edition screen Select layout data. Select Open in the operation menu. The layout editor screen is displayed. For details, see “Report creation”. 9-27 No. ISMIT200-1E...
Page 454 9.5.2 Change the layout name ※ It is you can only user prepared. The name of Default layout (“System” layout) cannot change. Select layout data. Select Rename in the operation menu. Enter the name, and click the Rename button. 9.5.3 Delete layout ※...
Page 455 9.5.4 Set the selected layout to default ※ It is you can only user prepared. Select layout data. Select Set to default layout in the operation menu. Set to default, yellow circle mark is shown before layout name. A defaulted layout is something about layout that is prepared in advance. Each layout type is set that is applied the prior by “Send to Report”...
Page 456 9.5.5 Share the layout with other user ※ Log-on in administrator is necessary. Other user can edit the layout created by the individual. Select layout data. Select Share in the operation menu. “Share” appears before the name. About layout edition, see “Preparation of report”. Cancel of share Select “Share”...
Page 457 9.5.7 Prepare a new layout Click the New layout button. For details, see “Preparation of report”. 9.5.8 Change vie type Click the Change view type button. List： “Name”, “User name”, “Date Created”, “Date Modified” and “Comment”. Thumbnail： Displays in the order of shorting. 9.5.9 Sort the layout display Click the Sort button.
Page 458 9.6 EDITION OF ANALYSIS SCREEN You can edit the image and the quantitative analyze processing after the SEM and EDS data acquisition. 9.6.1 Open the analysis screen Example）SEM image (F.O.V image) Decompress a project in the folder area. When you want to refine the file area display, lower the level as Sample ⇒ F.O.V Image The data displayed in the file area will be narrowed down.
Page 459 Double-click a data. Or, select Open from context menu, analysis screen is displayed. For details, please refer to the following pages and later. 9-33 No. ISMIT200-1E...
Page 460 9.6.2 Edit the sample image data Open the “Sample image”, the following window is displayed. For details of operation, see “APPLICATION OPERATION”. Name Description File Save：Overwrite the edited contents. Report Send to Report：Paste the edited contents to the report. Analysis Ruler：Measure the sample image.
Page 461 9.6.3 Edit the SEM image Open “F.O.V image”, the electron microscope image is displayed. For details of operation, see “APPLICATION OPERATION”. Name Description File Save：Overwrite the edited contents. Save As：Save the edited contents by another name. name Report Send to Report：Paste the edited contents to the report. Analysis Ruler：Measure the SEM image Tonality：Change color of the SEM image...
Page 462 9.6.4 Edit spectrum analysis Select “Spectrum”, the spectrum edition window is displayed. For details of operation, see “EDS ANALYSIS”. Name Description File Save：Overwrite the edited contents. Save As：Save the edited contents by another name. name (up to 256 characters) ※ It can also be saved as same name. Report Send to Report：Paste the edited contents to the report.
Page 463 9.6.4.a Edit the 1 comparison spectrum When the Spectrum editor screen is opened, drag&drop the data (other spectrum or popup spectrum data), first comparison spectrum screen appears. “Save as” in the ribbon menu changes to “Save as comparison”. The comparison spectrum is not created until executing "Save as comparison".
Page 464 9.6.4.b Edit the comparison spectrum This screen is displayed by the following operation ・Execute “Save as Comparison” in the 1 comparison spectrum screen. ・Double-click the “Comparison spectrum” of data style. ・Select comparison spectrum of data style, and select “Open” in context menu. Name Description File...
Page 465 9.6.5 Edit the map analysis Select “Map”, the map window is displayed. For details of operation, see “EDS ANALYSIS”. Name Description File Save：Overwrite the edited contents. Save As：Save the edited contents by another name. name (up to 256 characters) ※ It can also be saved as same name. Report Send to Report：Paste the edited contents to the report.
Page 466 9.6.6 Edit the popup spectrum Select “Popup Spectrum” of data style; Select Open in context menu or select Popup spectrum in tool menu of Map editor screen, drag the area in each element. Carry out the above operations, the spectrum window is displayed as follows. Create the multiple spectrums in the same map, it becomes comparison display.
Page 467 9.6.7 Edit the line profile Select “Line Profile” of data style; Select Open in context menu or select Line profile in tool menu of Map editor screen, draw the line in each element. Carry out the above operations, the line profile window is displayed as shown below. 9-41 No.
Page 468 9.6.8 Edit the line analysis Open “Line”, the line edition window is displayed. For details of operation, see “EDS ANALYSIS”. Name Description File Save：Overwrite the edited contents. Save As：Save the edited contents by another name. name (up to 256 characters) ※...
Page 469 9.6.9 Edit the montage Select “Montage”, the montage edition window is displayed. For details, see “APPLICATION OPERATION_MONTAGE”. Name Description Save All images：Save all images as montage. Selected Image：Save selected images as montage. Scan Re-Photo：Recapture the selected F.O.V. Select Fov Image：Select a image before/after recapturing. Reanalysis：Reanalysis element map of selected F.O.V.
Page 470 MAINTENANCE 10.1 DAILY CHECKUP ····························································· 10-1 10.2 MAINTENANCE FREQUENCY ············································ 10-2 10.3 CLEANING MATERIALS ···················································· 10-3 10.4 PRECAUTION IN MAINTENANCE WORK ····························· 10-4 10.5 CLEANING METHOD ························································ 10-5 10.6 FILAMENT REPLACEMENT AND CLEANING ························ 10-6 10.7 CLEANING THE MOVABLE APERTURE ······························ 10-11 10.8 CLEANING THE ORIFICE AND HOLDER ·····························...
Page 472 10.1 DAILY CHECKUP In order to keep the JSM-IT200 series in good condition and get good output of it, it is important to keep an eye on the instrument. Please checkup following items when use the instrument. Item Treatment Before use the instrument...
Page 473 Once / year Apply a grease The maintenance of “※” mark does work by the service engineer. Please contact your local JEOL service office. 1： For reference, it is equivalent to roughly six years, if you exchange specimens 20 times/day and operation an instrument 200 days/year.
Page 474 You can also use a safe, clean container that enables inert grass to be blown out. Tools Use the tool included among the accessories or commercially available tools. Replace screwdrivers and other tools that are visibly damaged. When the cleaning materials are needed, contact your local JEOL service office. 10-3 No.ISMIT200-1E...
Page 475 10.4 PRECAUTION IN MAINTENANCE WORK • Do not adopt an unreasonable posture when working for maintenance. An unreasonable posture becomes the cause which a waist and so on hurts. • Do not use an organic liquid when wiping off the dust of exterior of the instrument. Wipe off it with dried cloth after removing the dust.
Page 476 10.5 CLEANING METHOD ◆ WARNING ◆ When handling cleaning liquid, be sure to use polyethylene film gloves. There is a risk of acquiring a skin disorder depending upon the particular kind of cleaning liquid used of the sensitivity of your skin, so be sure to read the precautions concerning liquid before using it. ＜Cleaning A―Wiping off dust and stains with cleaning liquid＞...
Page 477 10.6 FILAMENT REPLACEMENT AND CLEANING ◆ WARNING ◆ Do not touch with a bare hand to the wehnelt immediately after the disconnection of the filament. Because wehnelt immediately after the disconnection of the filament is a high temperature of 80 degree or more, the burn might be owed.
Page 478 Click the Yes button. Perform the wehnelt exchange according to the operation guide screen. 10-7 No.ISMIT200-1E...
Page 479 10.6.1 Wehnelt removing and filament exchange Remove the electron gun cover, and remove the wehnelt unit. Match three screws to the hole of the wehelt and tighten it firmly. 垂直に引き上げる Pull out straightly！ Hold your hand to the wehenlt unit and check that it has cooled down, and remove the wehnelt from the tool.
Page 480 Next, coat the O-ring with the minimum necessary amount of vacuum grease.  When the vacuum grease is need, consult your JEOL service office. If the O-ring is damaged or torn, you must replace it, so consult your local JEOL service office. 10-9 No.ISMIT200-1E...
Page 481 Click the EVAC button for evacuating the EOS column／specimen chamber. Execute the auto gun control (AGC) after the evacuation is completed (Evacuation progress bar： READY). Electron gun cover Wehnelt Wehnelt removal tool 10-10 No.ISMIT200-1E...
Page 482 When installing the aperture foil, take care not to deform or damage it. It is necessary to change the aperture foil to a new one. When an new aperture foil is need, please, contact your local JEOL service office. Click the evacuation progress bar and VENT button.
Page 483 Press the aperture foil fixing plate, and take out the aperture foil. Notch Be sure set to top side Aperture foil Aperture foil fixing plate Setting screws (two) Fix the aperture foil fixing plate Please, push here Carry out the Cleaning A. When the tip of the MAP is very dusty, disassemble it and carry out Cleaning B.
Page 484 It is necessary to change the aperture foil to a new one. When an new aperture foil is need, please, contact your JEOL service office. If there is dust and so on the tip of the aperture, remove it with hand blower.
Page 485 When installing the aperture foil, be careful not to deform or damage it. It is necessary to change the aperture foil to a new one. When an new aperture foil is need, please contact your local JEOL service office. Click the VENT button for venting the specimen chamber.
Page 486 Disassemble the orifice, and clean these parts as shown in the figure. ＊ It is necessary to change the aperture foil to a new one. When an new aperture foil is need, contact your local JEOL service office. Aluminum foil Spacer ＊Aperture foil...
Page 487 Vent the specimen chamber, and draw out the stage. Install the orifice or holder. Mount the orifice or holder on the removal tool. Viewing the tool from the underside, turn it clockwise and install the orifice or holder. Return the BE detector holder to the original position. ◆...
Page 488 In case you attach the detector holder again, check that the guide of detector holder has gone into the hole of bottom of OL correctly. (If it attaches correctly, the horizontal gap of between the detector holder and bottom of the objective lens will not be generated.) However, an about 0.3mm space is generated between the bottom of objective lens and detector holder even if it attaches correctly.
Page 489 10.9 ACCESSORIES AND TOOLS Name Details Pcs. Screwdriver (Hexagon TD-53(1.5M/M) K-type filament MA113008(00) Screwdriver (－ precision DM-32 Carbon tape（Double-sided 5MM*20M METAL POLISH GLANOL 100ML Grease（APIEZON APIEZON L (10G)780008839 SCALE TM000396 Wehnelt cap removal tool 804414726 Standard sample ZnO：821342509 Fuse（Lead 0251.062MXL F62mA Fuse（Lead 37213150411 T.015A Fuse（Lead...
Page 490 ADMINISTRATOR OPERATION 11.1 ITEMS THAT ADMINISTRATOR CAN SET ···························· 11-1 11.2 USER MANAGEMENT ······················································ 11-2 11.2.1 Adding a user ······································································ 11-2 11.2.2 Editing users ······································································· 11-3 11.2.3 Deleting users ····································································· 11-3 11.2.4 Limitation of a standard user function ······································· 11-4 11.3 EDS SIDE ·······································································...
Page 492 11.1 ITEMS THAT ADMINISTRATOR CAN SET Log to “Administrator”, the standard user operation and the following operations are available. ※ Main unit start-up will be logged in as the Administrator. SEM side ・The Add / Edit / Delete of users ・Restriction functions of a standard user EDS side ・Standard data creating...
Page 493 11.2 USER MANAGEMENT 11.2.1 Adding a user Click the User icon from Settings. The User Management window is displayed. Click the Add button. The user add window is displayed. Enter a user name and select User Level. Check Register Password, enter the password, and click the Add button. Password registration is arbitrary.
Page 494 11.2.2 Editing users Click the User icon from Setting. The User Management window is displayed. Upon selecting a user desired to edit, click the Edit button. The user edit window is displayed. Change the password and/or user icon, and click the Change button. 11.2.3 Deleting users Click the User icon from Settings.
Page 495 11.2.4 Restrict function of the standard user Click the User icon from Settings. The User management window is displayed. Select a user you want to restrict the function, click the Restrict functions button. The function limitation can set with Administrator Check the function to be restricted and click the Close button.
Page 496 11.3 EDS SIDE 11.3.1 Standard quantitative analysis 11.3.1.a Create the standard data Prepare standard sample. Please prepare a homogeneous sample in the region of several μm or more Furthermore, polish the surface, for specimens that are easy to charge, carry out the conduction treatment such as carbon coating.
Page 497 11.3.2 Change the composition table preset Use the composition table, standard specimen can specify in advance If you have a standard specimen that you use frequently, setting it in advance makes it easy to create standard data. Select composition table, and select the element Enter composition and mass ％.
Page 498 11.3.3.b Delete a package Select standard spectrum, and select package. Click the Delete button. The message appears, click the OK button. The selected package is deleted. 11.3.3.c Add a category By adding categories, standard quantification can be done with different standard samples even for the same element.
Page 499 11.3.3.d Delete a category Select standard spectrum and select category from the list. Click the Delete button. The message appears, click the OK button. The selected category is deleted. 11.3.3.e Delete a standard data Select standard spectrum, and select process time and Acc.V of standard data from tree view.
Page 500 11.3.4 Change reference package Select the reference package of standard quantification. Change the package by the target data of standard quantification. Select package from the Reference package. Click the Save button. 11-9 No. ISMIT200-1E...
Page 501 SPECIFICATION Specifications are subject to change without notice. 12.1 PERFORMANCE ····································································· 12-1 12.1.1 Accelerating voltage ··························································· 12-1 12.1.2 Resolution ······································································· 12-1 12.1.3 Signal ············································································· 12-1 12.1.4 Magnification ···································································· 12-1 12.1.5 Probe Current ··································································· 12-1 12.1.6 Pressure control range in specimen chamber ·························· 12-1 12.2 SPECIFICATION ·····································································...
Page 502 12.2.5.k Customization ····································································· 12-6 12.2.6 Operation system ······························································ 12-7 12.2.6.a Operation unit ····································································· 12-7 12.2.6.b Operation ··········································································· 12-7 12.2.6.c Automatic functions ······························································ 12-7 12.2.6.d Image observation support functions ········································ 12-7 12.2.6.e Recipe function ···································································· 12-8 12.2.6.f Image management ······························································ 12-8 12.2.6.g User management ································································...
Page 503 12.1 PERFORMANCE 12.1.1 Accelerating voltage 0.5 to 30 kV (53 steps) (0.5 to 3 kV: variable in 100 V steps, 3 to 30 kV: variable in 1 kV steps) 12.1.2 Resolution Acc. V 3.0 nm 30 kV 8 mm ＜High vacuum mode＞ 8.0 nm 3 kV 6 mm...
Page 504 12.2 SPECIFICATION 12.2.1 Electron Optics System Applies to both high and low vacuum mode, except for Auto Gun Control 12.2.1.a Electron gun Configuration Electron source: Pre-centered tungsten hairpin filament Gun Alignment coil: Electromagnetic 2-stage deflection Functions Specimen bias voltage: Self-bias voltage Line scan profile: Filament heating auxiliary function Auto gun control:...
Page 505 12.2.1.c Scan system Configuration Scanning coil: Electromagnetic 2-stage deflection Image shift coil: Electromagnetic 2-stage deflection Functions Scan rotation: With a function for correcting image rotation for WD. Scan horizontal correction/vertical correction: Specify the scan rotation angle with base line (straight line), corrects so that it is horizontal/vertical.
Page 506 12.2.4 Detector [High vacuum mode] Secondary electron detector E.T detector Backscattered electron detector Semiconductor detector [Low vacuum mode] Backscattered electron detector Semiconductor detector Low vacuum secondary electron detector Option 12.2.5 Display System 12.2.5.a Display section Display size: 23.8 inch Resolution: 1920 ×...
Page 507 12.2.5.d Image Integration function Exponential integration: A frame integration processing with exponential weighting. For live image observation. Averaging coefficient can be set from 1 to 255. Frame integration: A frame integration processing with simple weighting For acquiring saved image data An arbitrary number of frames (1 to 2048) can be integrated.
Page 508 12.2.5.h Text entry Display position: Displayed at any desired position on the image. Display contents: Alphanumeric characters and symbols Font: Any font installed in the operation unit can be selected. Input: Keyboard or touch panel 12.2.5.i Photo data display Display position: Horizontal display at the lower part of the image.
Page 509 12.2.6 Operation system 12.2.6.a Operation unit CPU: Intel®Core i5 or equivalent product Windows®10* *: Windows®10 is a registered trademark of Microsoft Corporation. 12.2.6.b Operation Operation method: Graphical user interface, mouse and keyboard Operated with the touch panel. Operation using a dedicated operation panel (optional). 12.2.6.c Automatic functions Auto gun control (AGC): Filament-heating temperature setting and the filament alignment are...
Page 510 Montage: Multiple successive images are combined and displayed as one image. Probe tracking: Corrects the drift of the observation point with time. Eco mode: If you do not operate the operation unit for a certain period of time, the computer enters the Eco (energy saving) mode. (The time until the energy-saving mode turns on can be specified.
Page 511 12.2.7 Evacuation system Control: Fully automatic Ultimate pressure (in gun chamber): Less than 1 mPa Start time: Within 3 min. Required time: About 3 min Leak time About 1 min. 30 sec. Rotary pump Evacuation speed 100 L/min or more Turbo molecular pump Evacuation speed 67 L/sec or more 12.2.8 Large eucentric specimen stage (Option)
Page 512 12.2.12 EDS Related 12.2.12.a Basic software EDS monitoring Displays and switches each status related to the EDS system. Counting rate monitoring Indicates the counting rate (input and output) and the dead time measured using the EDS hardware. Instrument adjustment The user can adjust the instrument as necessary. Spectrum monitoring Displays spectra and qualitative elements during observation using SEM so that the elements contained in the specimen can be checked.
Page 513  Quantitative Analysis Curve fitting Removes the background of the spectrum and performs curve fitting using the standard spectrum. The difference in resolution of each time constant is also corrected. Standard-less quantitative analysis Calculates the concentration of an unknown specimen according to the spectrum provided beforehand.
Page 514  Popup spectrum It is possible to select a region and extract and display the spectra included in the region. Extraction can be performed even during measurement. Extraction region: Point, area Number of spectra that can be extracted at one time: Up to 32 ...
Page 515 ELECTRON DETECTOR ○ ○ LOW VACUUM KIT MP-03050LVK ○ ○ EDK KIT 1 MP-05110EDK1 ※At JSM-IT200 (Bu/LV), when the JED-2300 system is applied, MP-07191OUJ/MP-07211OUE is necessary. EDS unit Basic unit configuration list Name Model JSM-IT200(BU) JSM-IT200(LV) JSM-IT200(A) JSM-IT200(LA) Dry SD25 DETECTOR ○...
Page 516 ※Included an optional attachment. General The motor drive stage employs a combined unit of a JEOL motor-stage control board and an ATA motor drive axes which are attached to the JEOL LGS stage. This stage can be controlled using the GUI screen. This stage, installed on SEM, has a stage graphic display, and a function for moving the specimen to any coordinates or position the operator specifies.
Page 517 Accuracy Note Backlash 20μm or less *1 MP-01260MS、MP-01270MSR Reproducibility MP-01280MSZ、MP-01290MS5 7μm or less *1 The above MS is all common Numerical shifts during execution of 2μm or less *2 *1：Mechanical accuracy the coordinate specify mode Field shifts during execution of the *2：Software accuracy 22μm or less *3 *3 ：...
Page 518 12.3.3 Objective Lens Aperture General This unit is the one-step removable aperture for objective lens. Specification Precise movement mechanism: Movable on the cross and feed directions in ± 1mm Configuration Aperture main body 1set Aperture foils（25 μmφ） 1set Aperture foils（50 μmφ） 1set 12.3.4 Operation unit (OUJ) General...
Page 519 12.3.6 Liquid Crystal Display General The Liquid Crystal Display is a monitor that is connected to a Scanning Electron Microscope (SEM). This monitor displays SEM images and is used to manipulate the images by a multi-touch function. Specifications Monitor: P2314T 23-inch wide multi-touch monitor (made by DELL) Monitor size: 23 inch (wide type) Field-area angle:...
Page 520 12.3.9 EDK kit 1 General This kit is configured with the power outlet for EDS unit and the interface board for adding the analysis function of JEOL EDS. Specification ・EDS interface board It is a relay board to pass the analytical signal to the SEM from DPP (digital pulse processor) of EDS unit.
Page 521 12.4.1 Power Supply Single phase 100 V AC 50/60 Hz, 1.5 kVA, Voltage fluctuation less than ±10%, grounded ※When installing step down transformer of another company, consult your local JEOL service office. 12.4.2 Grounding terminal 100 Ω or less 12.4.3 Installation Room Room temperature 15 –...
Page 522 12.4.4 Installation example With the JSM-IT200 LA model. The following is a layout example when an optional table MP-08140TBL is used. Power plug with grounding terminal (100V AC) Oil rotary pump Power outlet (with grounding terminal) DPP (placed on table rack)
Page 523 GLOSSARY No. ISMIT200-1E...
Page 525 3D with glasses that have red and blue color-filter lenses. Analysis Station The name of the EDS analysis system developed by JEOL. An anode set up directly below the electron gun. The anode opposing the accelerating voltage (negative voltage) applied to the filament is 0 V and...
Page 526 A function to automatically save images in the specified folder after the Auto Save photo operation has completed. An orifice part used for differential pumping in the JSM-IT200(LV) and Aperture Holder (Orifice) JSM-IT200(LA) that retains the round shape of the aperture foil and mounts on the objective lens.
Page 527 Index Term Description An abbreviation of Backscattered Electron Detector - Shadow. A backscattered electron detector mode to view backscattered electron 3D images. BED-S A compositional image is acquired from a detector signal lined up horizontally, an image signal with a shadow is also detected by a detector at a position one optical axis away, and a 3D compositional image created from those images is viewed.
Page 528 Index Term Description See "CF Scan." An abbreviation of Charge Free Scan. One frame is divided into multiple CF Scan blocks and synthesized. By scanning each block at high speed, the charge can be reduced. An abbreviation of Chamber Scope. An infrared CCD camera that displays the inside of the specimen chamber.
Page 529 Index Term Description Compositional Image See "BED-C." This is the phenomenon in which irradiating an insulating material Charging specimen with an electron beam builds up a charge on that specimen. While viewing, noise occurs on the image and brightness is uneven. Charge-free Scan See "CF Scan."...
Page 530 Index Term Description An abbreviation of Electron Backscatter Diffraction. A method that uses electron backscatter diffraction to analyze the orientation of crystalline specimens. Irradiating a specimen tilted on an angle of 60 - 70゜with an electron probe enables an electron diffraction pattern on the side of a fluorescent screen to be acquired.
Page 531 Index Term Description This is a tool on the UI of the IT200 Series that displays the progress Evacuation Progress Bar state of specimen chamber evacuation. A vacuum pump system to evacuate the column and specimen chamber. It consists of a low vacuum pump, high vacuum pump, vacuum gauge, Evacuation System and a control circuit.
Page 532 Index Term Description A device for consolidating multiple cables connected to each node in a network. This mode sets the specimen chamber to the order of 10-2 to 10-3 Pa and the electron gun chamber pressure to 10-3 Pa or lower, and views High Vacuum Mode the specimen with an ET detector or semiconductor BSE detector by evacuating the electron gun and specimen chamber almost concurrently...
Page 533 Index Term Description A instrument for improving the performance of SEM using a LaB6 (lanthanum hexabolite) filament for the cathode of electron gun. LaB6 electron gun is a type of thermionic-emission electron gun, but has a characteristics in which the brightness of the electron beam is higher than that LAB6 of the electron beam of tungsten thermal-electron gun, and the energy width of the electron beam is narrower than that of the electron beam of tungsten...
Page 534 Index Term Description A column set on the electron beam path in the magnetic lens. By using the liner tube as a vacuum barrier, parts that emit a lot of gas, such as the lens coil, scan coil, deflection coil, and stigmator, can be placed outside Liner Tube of the vacuum, which reduces contamination in the column.
Page 535 Index Term Description A two dimension distribution of elements can be obtained by scanning in two dimensions with an electron microscope and measuring the characteristic X-ray spectrum for each pixel. Map Analysis (Element An element distribution can be referred to by creating a map for each Mapping) element and arranging them in parallel or overlapping them.
Page 536 Index Term Description This system reduces the time it takes to analyze by placing two EDS detectors opposite each other with the specimen in the center, which Opposed Dual EDS System avoids shielding caused by specimen roughness and increases detection efficiency.
Page 537 Index Term Description In a vacuum, the heat discharge from a metal wire that is heated by electricity changes according to the pressure in the vacuum and the electrical resistance changes. This gauge uses that phenomenon to Pirani Gauge measure the vacuum. The pressure that can be measured ranges from atmospheric pressure to 10-1 Pa, and is used to control the evacuation system in a SEM.
Page 538 Index Term Description The resolution obtained when the SEM is used at the ideal conditions. In general, it is the same term as spatial resolution and is defined by the Resolution smallest distance between two points that can identified. However, in the SEM, the resolution is the measurement of the gap between two common substances.
Page 539 Index Term Description Add two distinct signals and display them as a image. Add backscattered electron・composition signals to the secondary Signal Addition Display electron signal to Prepared images with surface morphology information and composition information. An electrical system that converts the analogue image signal acquired Signal Processing System from the detectors to digital, and displays the image on the monitor.
Page 540 Index Term Description SEM: Scanning Electron Microscope When a thin electron probe is used to scan a specimen surface, this device detects electrons and electromagnetic waves emitted from the irradiation point on the electron probe and converts them to images. It Scanning Electron consists of an evacuation system to evacuate the column and specimen Microscope...
Page 541 Index Term Description A function set on a rotary pump for evacuation system rough pumping that stops the pump if it is under a significant load due to a lack of oil or Thermal Protector low temperature causing the pump temperature to exceed the threshold temperature.
Page 542 Index Term Description One part of a thermal-electron gun. It is located between the filament and anode, and corresponds to the grid in the triode. It is set to a lower Wehnelt (negative) voltage than the filament and acts to restrict the amount of thermionic emissions.

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