JEOL JSPM-5200 Instructions Manual page 476

７ APPENDIX
• Structure to record the piezoelectric-element sensitivity:
• Structure to record the detailed SPM parameters:
7-28
Type
float
float
float
float
float
float
float
float
float
float
short
Type
float
float
float
float
float
short
float
float
float
float
float
float
float
enum mode type
short
CalibType
Size
4 bytes Dummy data
4 bytes Dummy data
4 bytes Dummy data
4 bytes Dummy data
4 bytes Proximity coefficient Z term
4 bytes Dummy data
4 bytes Dummy data
4 bytes Dummy data
4 bytes Dummy data
4 bytes Reference Voltage [V]
2 bytes Stage
SPMParamType
Size
4 bytes Clock [ms]
4 bytes Measurement rotation angle [°]
4 bytes Feedback filter [Hz]
4 bytes Present filter [kHz]
4 bytes Head amp gain [V/nA]
2 bytes Loop gain (1 to 4)
4 bytes X offset [nm]
4 bytes Y offset [nm]
4 bytes Z gain
4 bytes Z offset [V]
4 bytes O gain
4 bytes O offset [V]
4 bytes Back scan bias [V]
4 bytes Measurement mode（
2 bytes Dummy data
Note
Note
Table 4）
TMPM5200-2