JEOL JSPM-5200 Instructions Manual page 192

■ Drawing u
sing the lithography function
When ce
surface structure may change due to displacement, adsorption of atoms or anode
oxi dization. Lithography has the function to lithograph (write on) the specimen surface
by using this phenomenon.
The lithography function has two modes: Vector and Trace.
The procedure for lithography i
TMPM5200-2
rtain values are given to the bias voltage and tunneling current, the specimen
s shown in the flow chart below.
Y
Define
N
OK ?
Y
Save
Start
Define a pattern ?
N
N
Vector mode ?
Y
Y
Use stored
pattern ?
Open
N
Write
End
５ MEASUREMENT OPERATION
Trace
mode
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