5.7
GE
NERAL PRECAUTIONS FOR IMAGE ACQUISITION
Explained in this section are the
■ Retractin
g Tip
When you turn Tip Retract on, the Z-direction length of the scanner is forced to shrink.
Refer to the figure below.
①
① No voltage is applied to the scanner (neutral position).
② Tip Retract is on, and the Z-axis piezoelectric element shrinks most.
③ Tip Retract is off, and the Z-axis piezoelectric element expands most.
④ Tip is in the Approach On position, and the tip is moved toward the specimen
Tip Retract is used when the cantilever and the tip must be retracted temporarily.
■ Z position readjustment
During scanning, stage drift may cause the tip position to change along the Z-axis (the
Z/20 value on the oscilloscope may deviate greatly from 0). In such a case, you can
readjust the Z position of the tip by moving the Z stage while performing approaching.
Carry out readjustment according to the following procedure.
1.
Click on
to stop scanning.
2.
Click on the Tip Retract button in the Tip window to retract the tip.
3.
Set the direction of the motor drive for the Z stage to Out, if the tip is too
close to the specimen. Or, set it to In, if the tip is too far from the specimen.
And then move the motor drive a little.
TMPM5200-2
②
slowly by motor driving , with the Z-axis piezoelectric element in nearly neutral
position (feedback is working).
The motor stops at the moment a tunneling current is detected.
the Abort button in the Scan frame
The purpose of this step is to prevent the tip from colliding with the specimen
during motor driving.
scanning method for image acquisition and other notes.
③
of the SPM Parameters window
5 MEASUREMENT OPERATION
Cantilever
Specimen
Z
X, Y
④
Scanner
5-159
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