JEOL JSM-IT200 Manuals

Manuals and User Guides for JEOL JSM-IT200. We have 1 JEOL JSM-IT200 manual available for free PDF download: Instructions Manual

JEOL JSM-IT200 Instructions Manual (542 pages)

SCANNING ELECTRON MICROSCOPE

Brand: JEOL | Category: Microscope | Size: 29 MB

Warranty Information
9
Limited Warranty
9
Safety Precautions
13
Table of Contents
24
General
25
Explanation of each Part
29
Appearance
31
Eos Unit
32
Electron Gun Unit
32
Objective Lens Aperture
33
Standard (MAP1)
33
Option (MAP3)
34
Specimen Chamber
35
Specimen Stage
35
Motor Drive Stage
36
Eos Console
37
Main Control Panel
37
Rear Panel
38
Eds Unit
39
Dry SD Detector
39
Digital Pulse Processor（Dpp
41
Main Window
45
Menu Bar
46
SEM Button
46
Home
47
Settings
48
Main Screen
49
Mode
49
Zeromag Mode
51
Photo Data
52
Upper Part
52
Lower Part
53
Navigator Area
54
Stage
54
Snap Shot
55
Specimen Data
56
Coordinates Display
56
Fixed Icon
56
Manual Adjustment Tool
57
Evacuation Button and Evacuation Progress Bar
58
Data Display
59
Data Control Screen
60
Ribbon Menu
61
Admin Tab
61
List Screen Tab
62
Address Bar
63
Explanation of the Operation Section （Eds
69
Main Window
71
Menu Bar
72
SEM Button
72
Home
73
Settings
79
Spectrum Monitor
79
Standard Data
80
Analysis Settings
85
Line Settings
86
Map Settings
87
Energy Calibration
91
Main Screen
92
Mode
92
Zeromag Mode
94
Photo Data
95
Upper Part
95
Lower Part
96
Navigator Area
97
Stage
97
Snap Shot
98
Specimen Data
99
Spectrum Display Area
99
Coordinates Display
100
Fixed Icon
100
Manual Adjustment Tool
101
Evacuation Button and Evacuation Progress Bar
102
Data Display
103
Data Control Screen
104
Ribbon Menu
105
List Screen Tab
106
Analaysis Area
113
Spectrum Analysis Screen
114
Periodic Table
116
Quantitative Results
117
Map Analysis Screen
118
Line Analysis Screen
123
Line Profile
127
Basic Operation
128
Ui Operation
130
Touch Mode
130
Mouse Mode
131
Operation Flow
132
Emergency Operation
133
Start the System
134
User Log-On and Log-Off
136
Specimen Preparation
137
Specimen Exchange and Evacuation
138
Image Observation
145
High Vacuum Mode Observation (SE Image)
145
High Vacuum Mode Observation （BE Image
146
Low Vacuum Mode Observation
149
Changing the Observation Parameters
151
Signal Selection
151
Acceleration Voltage Setting
152
Probe Current Setting
153
Switching the Magnification
154
Image Brightness Adjustment
155
Focus Adjustment
157
Astigmatism Correction
158
Selecting the Scan Mode
160
Changing the Scan Speed
161
Switching the Vacuum Mode
164
Adjusting the Pressure in the Specimen Chamber
166
Use the Recipe Icon
168
Changing the Field of View
171
Specimen Holder and Stage Moving Range
173
Moving the Target Location to the Center of the Screen5-48
177
Moving the Target Position to a Desired Location
177
Shifting the Stage Horizontally (X) and Vertically (Y)
178
Changing the Stage Height (Z) and Tilt (T)
180
Rotating (R) the Stage
182
Moving the Stage to Specified Coordinates
185
Moving the Stage to the Previous Coordinates
187
Moving the Stage Using a Coordinate File
188
Search a Target from the Specimen Holder
189
Saving / Loading Images
190
Automatically Saving Images
190
Saving the Freeze Image
192
Loading Saved Images
192
Saving and Reproducing by Snapshot
193
Recording Live Images (Save Movie)
197
Stopping the Instrument
199
Daily Maintenance
202
Electron Gun Axis Alignment
202
Automatic Adjustment
202
Manual Adjustment
205
Movable Aperture Adjustment
207
Stage Calibration
208
Troubleshooting
209
Evacuation Trouble
209
Image Display Trouble
210
Warning Messages
212
Electron Gun Messages
212
Evacuation System Messages
212
Specimen Stage Messages
213
Messages about General Functions
213
Messages about Options
213
Application Operation
214
For Obtaining Better Images
216
Difference of Image Quality Depending on the Value of the Accelerating
216
Effect of the Probe Current
217
Effect of the Working Distance (WD) on the Image
217
Effect of the Aperture Diameter on the Image
218
Relationship between Specimen Tilting and the Amount of Secondary
219
Observation of Nonconductive Specimen and Charging
220
Image Observation
221
Temporarily Shutting off the Electron Beam
221
Matching the Focus Current to WD
221
Making the Focus Follow Z-Axis Displacement
222
Observing at High Resolution
223
Displacing a Target Object at Fine Steps
224
Displacing an Image as a Frame
226
Correcting Focus Blur Due to Stage Tilt
227
Rotating an Image
229
Avoiding Vision Shift Due to Stage Rotation
232
Preventing Vision Shift Due to the Variance of Specimen Heights
234
Obtaining a Three-Dimensional Measurement Image
237
Montage
239
Items Associated with Measurement and Text
257
Conducting Measurement by Using a Micron Bar
257
Measuring the Distance between Lines (X, y and Diagonal)
258
Editing the Measurement Location and Text Box
259
Measuring the Distance between Two Points
262
Measuring the Total Distance of Straight Lines Connecting Multiple Points6-48
263
Measuring the Perpendicular Line for Arbitrary Straight Line
264
Measuring the Area of a Rectangle
265
Measuring the Area of a Circle (or Ellipse)
266
Measuring the Area of the Polygon
267
Measuring an Angle
268
Entering a Text in the Observation Window
269
Inserting an Arrow in the Observation Window
271
Counting the Number of Target Objects
272
Calibration of Ruler
273
Comparison Display
275
Displaying an Image in Full Window
275
Dividing・Displaying an Observation Image in Different Signal Domains
276
Displaying an Image by Mixing Two Signals
278
Displaying a Histogram
280
Adjusting Digital Images of the Observation Window
281
Displaying an Observation Image in Pseudo Colors
285
User Setting (Customization)
289
Ribbon
289
Switching the Display Language
290
Changing the Theme of UI
290
Changing the Layout of the UI Window
291
Changing the Magnification Display
292
Setting the Detector Position On/Off
292
Setting the Detector Position Display
292
FOV Move Direction
293
Setting the Auto-Function
294
Setting the Display for Photo Data
295
Editing Photo Data
296
Verifying Photo Data on the Observation Image
298
Constraining Power Consumption of the Equipment
299
Eds Analysis
300
Important Notice of Eds Analysis
304
Element Analysis with Characteristic X-Ray
305
Emission of Characteristic X-Ray and EDS Analysis
305
X-Ray Generation Regions and Spatial Resolution
306
Quantitative Analysis
307
ZAF Correction Method
307
Phi－Rho－Z Correction Method
307
Standardless Quantitative Analysis
307
Standard Quantitative Analysis
307
Overview of the Eds Analysis Technique
308
The Flow of the Basic Eds Operations
309
Preparation of Measurement and Analysis
310
Setting the Observation Conditions
310
Setting the EDS Analysis Conditions
310
Inspection of the Eds Analysis Accuracy
311
Check the Energy Position
311
Perform the Energy Calibration
311
Performing the Live Analysis
313
Performing the Instant Analysis
314
Performing the Eds Measurement
315
Point Analysis
315
Whole/Area Spectrum
316
Whole/Area Map
317
Line/Tilted Line
318
Particle Spectrum
319
Polygon Spectrum
320
Ellipse Spectrum
321
Free Line Spectrum
322
Analysis Start
323
Starting the Acquisition
323
The "Spectrum Analysis in Progress" Screen
323
Stopping Acquisition
324
Completing Acquisition
324
Acquisition List
325
Changing the Measurement Position
326
Changing the Acquisition Conditions
327
Changing the Acquisition Sequence
328
Deleting a Measurement
328
Spectrum Analysis
329
Performing Qualitative Analysis
329
Performing Quantitative Analysis
331
Screen Display While Spectrum Analysis Is in Progress
332
Spectrum Analysis Stop
333
Advanced Operations
334
Spectrum Analysis Operations
334
Prevent the Incorrect or Overlooked Identification
335
Displaying the VID Spectrum
335
Fix the Peak by Using the VID Spectrum
336
Displaying the Residual Spectrum for VID
338
Changing the Emission Lines for Analysis During Manual Identification
339
Changing the Emission Line When Quantitative Analysis Is Performed
340
Supplementary Functions for Spectrum
341
Tool Menu on the Spectrum Analysis Window
341
Changing a Spectrum to be Displayed
342
Changing the Color of the Displayed Spectrum
342
Displaying the ROI Information
343
Editing the Element Labels
343
Displaying the Full-Width at Half-Maximum (FWHM)
344
Copying a Spectrum
344
Displaying Properties
345
Setting Menu on the Spectrum Window
346
Changing the Type of Spectrum
347
Changing the Type of Graph
347
Changing the Type of Line Display
348
Changing the Line Color
348
Changing the Scale Range
349
Change the Scale of Vertical Axis
349
Switching between the Scale Units for the Vertical Axis
350
Applying Auto Scaling
350
Switching between the Display Directions
350
Switching between the Display Type of the Element Labels
351
Setting the Custom Scale
351
Turning On/Off the ROI Display
352
Turning on and off the Cursor Display
352
Turning on and off the VID Display
352
Turning on and off the KLM Marker Display
353
Tool Menu of the Periodic Table
354
Saving a ROI
354
Loading a ROI
355
Adding a ROI
356
Adjusting the ROI Range
358
Tools for the Quantitative Results
359
Editing the Oxide Table
359
Copy the Quantitative Results
359
Quantitative Result Settings
360
Switching the Display Methods
360
Switching the Display of an Excluded Element
361
Sorting the Quantitative Results
361
Moving Up/Down the Priority Level of an Element
362
Map Analysis
363
Performing Qualitative Analysis
363
Screen Display While Map Analysis Is in Progress
365
Simplified Display
365
Detailed Display
365
Map Analysis
366
Map Analysis Operations
367
Creating a Net Map
367
Changing the Conditions for Creating a Net Map
368
Quantitative Map
369
Changing the Conditions for Creating a Quantitative Map
370
If the Map Image Unclear
371
Spectrum Extraction (Popup Spectrum)
372
Supplementary Functions for Map
374
Tool Menu on the Map Window
374
Displaying the Overview
375
Displaying the Color Scale
375
Adjusting the Color of a Map Image
376
Applying a Single Color to a Map Image
377
Applying Multiple Colors to a Map Image
378
Creating and Saving the Color Scale
379
Extracting the Spectrum (Popup Spectrum)
380
Creating the Line Profile
380
Displaying Properties
381
Setting the Map Window
382
Setting the Display Position of the Scale Bar
383
Displaying/ Hiding the Color Scale
383
Displaying/ Hiding the Cursor
384
Displaying/Hiding the Position Where a Popup Spectrum was Created7-81
384
Displaying/Hiding the Position Where a Line Profile was Created
384
Line Analysis
385
Performing Qualitative Analysis
385
Screen Display While Line Analysis Is in Progress
387
Line Analysis
388
Supplementary Functions for Line
389
Tool Menu on the Line Analysis Window
389
Displaying the Overview
390
Changing Automatically the Colors of the Line Profiles
390
Creating and Saving the Color Scale
391
Displaying the Distance between Specified Points
392
Copying an Image
392
Copying a Graph
392
Displaying Properties
393
Setting Menu on the Line Window
394
Electron Microscope Image
395
Changing the Type of Graph
395
Display Type
396
Scale Unit
396
Normalizing the Line Profiles
397
Displaying the Line Profiles with Auto Scale
397
Displaying the Cursor
397
Preparation of Report
398
Start
400
Creating a New File
401
New Layout
401
Existing Layout
402
Creating a Layout
403
Adding Text
404
Adding Fixed Text
405
Adding an Image
406
Adding Layout
407
Adding Data to the Report
409
Adding Data to a Report from a Data List
409
Adding Multiple Data
410
Adding to the Report as Comparison from the Data List
410
Adding from the Analysis Screen
410
Adding Scan Image Data to the Report of an Image
411
Adding Spectral Data to the Report
411
Saving a Layout
412
Save as
412
Save
412
Generating a Report
413
Generating a Report in Electronic Data
413
Printing a Report
413
Advanced Settings
414
Explanation of the Print Preview Screen Configuration
414
Adding a Report Cover
415
Creating a Header and Footer
416
Changing Headers and Footers
417
Aligning the Position of the Item
419
Changing Color of each Item
420
Return the Edition Content
420
Applying Similar Data
421
Editing Comments to each Layout
422
Setting the Items Displayed as the Conditions
423
Changing the Layout
423
Moving Data
424
Deleting Data
424
Moving Chapters
424
Export Settings
424
Adding New Page
424
Operation of Data Control Screen
425
Open the Data Control Screen Open
427
Project
429
Operation in Ribbon Menu
429
Import Data
429
Operation in Folder Area
434
Operation in File Area
440
Operation in Sample Image Area
443
Favorite
445
Open the File Location
445
Cancel the Favorite
445
Select Data Multiple in File Area
445
Change View Type
446
Sort Favorite Display
446
Report
447
Open the Print Preview Screen
448
Change the Name of Report
449
Delete the Report
450
Export the Report
451
Change View Type
452
Sort the Report Display
452
Layout
453
Open the Layout Edition Screen
453
Change the Layout Name
454
Delete Layout
454
Set the Selected Layout to Default
455
Share the Layout with Other User
456
Export the Layout Data
456
Prepare a New Layout
457
Change Vie Type
457
Sort the Layout Display
457
Edition of Analysis Screen
458
Open the Analysis Screen
458
Edit the Sample Image Data
460
Edit the SEM Image
461
Edit Spectrum Analysis
462
Edit the Map Analysis
465
Edit the Popup Spectrum
466
Edit the Line Profile
467
Edit the Line Analysis
468
Edit the Montage
469
Maintenance
470
Daily Checkup
472
Maintenance Frequency
473
Cleaning Materials
474
Precaution in Maintenance Work
475
Cleaning Method
476
Filament Replacement and Cleaning
477
Cleaning the Movable Aperture
482
Cleaning the Orifice and Holder
485
Accessories and Tools
489
Administrator Operation
490
Items that Administrator Can Set
492
User Management
493
Adding a User
493
Editing Users
494
Deleting Users
494
Eds Side
496
Standard Quantitative Analysis
496
Change the Composition Table Preset
497
Management of Standard Spectrum
497
Delete a Package
498
Add a Category
498
Delete a Category
499
Change Reference Package
500
Performance
503
Accelerating Voltage
503
Resolution
503
Signal
503
Magnification
503
Probe Current
503
Pressure Control Range in Specimen Chamber
503
Specification
504
Electron Optics System
504
Electron Gun
504
Lens System
504
Scan System
505
Specimen Stage
505
Specimen Chamber (Att's Port)
505
Detector
506
Display System
506
Display Section
506
Scan System
506
Image Memory
506
Image Integration Function
507
Image Display Function
507
Image Adjustment Function
507
Ruler
507
Text Entry
508
Photo Data Display
508
File Saving
508
Customization
508
Operation System
509
Operation Unit
509
Operation
509
Automatic Functions
509
Image Observation Support Functions
509
Recipe Function
510
Image Management
510
User Management
510
Help Function
510
Evacuation System
511
Large Eucentric Specimen Stage (Option)
511
Service Outlet
511
High Voltage Limit Interlock
511
EDS Related
512
Basic Software
512
Dry SD25 Detector Unit
515
Option Spec Configured as Standard
515
Standard Configuration List
515
Specification
516
Motor Drive Stage
516
Objective Lens Aperture
518
Operation Unit (OUJ)
518
Operation Unit (OUE)
518
Liquid Crystal Display
519
Backscattered Electron Detector
519
Low Vacuum Kit
520
Installation Requirement
521
Power Supply
521
Grounding Terminal
521
Installation Room
521
Installation Example
522
Glossary
523

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JEOL JSM-IT200 Instructions Manual (542 pages)

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