JEOL JSPM-5200 Instructions Manual page 281

５ MEASUREMENT OPERATION
• Auto
The image appears after the tilt, brightness and contrast of the image for measure-
ment are automatically adjusted. Normally, use this display method.
• No ASB (Auto Subtract Background)
The image appears after the brightness and contrast of the image for measurement
are automatically adjusted, but the tilt o
Use this display method
urement.
• M
anual
All of the automatic adjustment functions are canceled, enabling you to manually
adjust tilt, brightness and contrast.
DC Coup ling
Since the piezo scanner used in the SPM creates a structure combined with multiple drive
axes, the movement of the X- and Y-axes may interfere with each other. Therefore, when
the s can range is large, a tilt in the X direction interferes with the Y-axis scanner (the
scann er moves as if a tilt also exists in the Y direction). Such a phenomenon is called DC
coup ling.
Whe n the Background is Manual, if the scanning-plane tilt remains in the Y direction
even if you have corrected the scanning-plane tilt in only the X direction, not only does
the s pecimen-plane tilt in the Y direction but also the effect of DC coupling can be
cons idered. In such a case, check the DC Coupling check box to enable the tilt correction
in th e Y direction.
Tilt X, Y
The software corrects the tilt in the scanning plane. This becomes effective only when
the Back
box is checked.
Brightne ss and Contrast
You can correct image brightness and contrast.
5-218
when you wish to know the tilt of the surface for meas-
ground is set to Manual. Tilt Y is in effe
f th e image for measurement is not adjusted.
ct only when the DC Coupling check
TMPM5200-2