5 MEASUREMENT OPERATION
• IS
You can perform IS measurement in the STM or contact AFM mode
perform it in the STM mode. You must use the conductive cantilever when you
perform IS measurement in the AFM mode.
In the IS mode, yo
the distance be
during IS measurement.
The position at which IS m
Po
sition function in the Tip
• Clock/ms, Preamp Gain, Number to Average, Number of Points and SPS Mode
• Tip Displacement/nm±
• Tip Offset/nm
• Ramp Direction
• Source
5-242
u can m
tween the ti
Speci
fy this item in the same way as for IV.
Specify the scanning range of the tip in the vertical (Z) direction.
Specify the offset value in the Z direction. The value in Tip Offset/nm will be
added to the height before scanning. Usually, specify 0.
Specify th
e sweeping direction for the distance between the tip and the speci-
men.
In->Out:
The tip moves away from the specimen.
Out->In:
The tip approaches the specimen.
Select L
inear Current for IS measurement because you measure the change of
the tunneling current by sweeping the distance between the tip and specimen.
easure the change of the tunneling current by swee
p and specimen. Feedback is automatically turned of
easurement is carried out i
window.
. Usually,
ping
s determined by using the
TMPM5200-2
f
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