Spm Parameters (Advanced) - JEOL JSPM-5200 Instructions Manual

５ MEASUREMENT OPERATION
5.1 0.3 SP M Parameters (Advanced)
I n this section, the Advanced Control window that appears when you select the General
Advanced Control measu
th at so me Advanced Control tab windows a
G eneral Advanced Control measurement mode. These functions cannot be utilized in the
selec ted measurement mode, or they
■ Scan
Size
Specify the scanning area in this selection box. Two methods are provided:
C lick on the
the pull-down menu showing some scanning areas.
Enter a value in the selection box using the keyboard. Then, the nearest
scanning area value is selected.
The selected scan
the value is rounded.
The maximum scanning area depends on the scanner calibration value selected in
the SPM Calibration･･･ window.
You can also enter the following units:
nm: 10
um: 10
For example, when you have entered 3.000 um, the scanning area is 3.0 µ m. If you
have not entered a unit, the previously displayed unit is applied.
The value displayed in the Scan–Size selection box will differ a little from the value
that you entered, because of torsion correction and voltage resolving power.
Offset
The WinSPM software defines the center
the image-offset coordinates (0, 0). Here the image-offset coordinates in X and Y
directions appear.
When you change the setting coordinates, you can move the scan-center position to the
specified image-offset coordinates. This operation is the same as the function in the Scan
Area setting.
5-202
rement mode is explained as an example. There are functions
can be used only for other SPM instruments.
button in the selection box and select a scanning area from
ning area value is not always the same as the one entered because
m
–9
–6 m
ppear in gray or do not appears e
positio n of the to l scan area of the scanner as ta
xcept in the
TMPM5200-2