JEOL JSPM-5200 Instructions Manual page 20

SPM Control System
• Scanning capabilities
Scanning range:
Scanning speed:
Bias voltage:
• AFM capability
AC mode:
Detection method:
Excitation frequency:
• STM capability
Constant-current mode, constant-height mode, I-V, CITS, S-V and I-S
Current setting:
• Optional capabilities available
Surface potential difference, lateral-modulation FFM, viscoelasticity and magnetic
force
• Map scan capability
I-V mapping (CITS), I-S mapping, S-V mapping, force-curve mapping, fric-
tion-force curve mapping
Computer Control System
• Computer:
• High-resolution color display: 21 inches, 1,280 × 1,024 pixels
• Keyboard and mouse:
• External storage:
SPM Software
• File operations
File writing:
File reading
File searching
TMPM5200-2
2 SPECIFICATIONS AND INSTALLATION REQUIREMENTS
Continuously variable from 0 to maximum scanning
range (25 bits)
0.00167 ms to 200 s/point
Continuously variable from 0 to ± 10 V, 0 to ± 150 V (16
bits)
Scanning in a region of 1024 × 1024, 512 × 512, 256 × 256
and 128 × 128 pixels and Top Mirror scanning
Line scanning in 1024, 512, 256 and 128 pixels
Maximum 4 channels simultaneous input and simulta-
neous displayed
Automatic distortion correction, automatic tilt correction,
automatic contrast and brightness control
Zooming at any position
Scanning rotation: ± 180 ° , in 1 ° step
Lithography function
Contact mode, Constant-force mode, constant-height
mode, force-curve mode and friction-force curve mode
Force setting: 10 -8 to 10
Amplitude detection, phase detection and FM detection
1 kHz to 1MHz
30 pA to 1 µA
IBM-PC/AT compatible
Provided
Magneto-optical disk (optional)
TIFF, BMP, Binary and ASCII
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2-3