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JEOL JSM-6301F Operation Manual

Scanning electron microscope
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SEM (JEOL, JSM-6301) Operation manual

The turning on the SEM

1. Turn on the scanning image observation instrument with the OPE POWER switch at the rear of
the instrument.
2. Rotate the POWER key switch to the START position, and release the hand from the key.
(The key rotates to the ON position automatically.)
3. The ACCEL VOLTAGE READY lamp turns on at once. (The user should confirm the lamp
turning on.)
*Please contact the staff, if the lamp does not turn on.

The sample exchange (The insert of the sample)

1. Place the sample in the sample holder (cylinder), and align the sample upper face and the upper
side of the cylinder, using the height adjusting screw (tighten by the screw).
2. Screw the sample exchange rod to the sample holder, and tighten the rod.
3. Put the sample stage to the position where the sample is possible to exchange.
Confirm
the position for the sample exchange: X:25.0 Y:35.0
4. Pull the exchange rod, and then fix the sample holder to the stopper.
5. Fit the exchange rod to the sample exchange chamber.
While supporting the exchange rod by hand, press the vacuum operation button.
6. When the lamp is turned off, rotate anticlockwise immediately the knob of the gate valve of the
sample exchange chamber, and then pull out the knob fully.
7. While looking the inner part of the chamber, push in the rod slowly, and fix the sample holder
onto the stage.
8. Rotate anticlockwise the rod, and remove the rod from the sample holder.
Pull out the sample rod from the chamber fully.
9. Push in the knob of the gate valve of the sample exchange chamber, and rotate clockwise the
knob. This operation makes a clicking sound.
10. While supporting the exchange rod by hand, remove the rod by pressing the vacuum operation
button.

The observation with the SEM

1. Press the F2 function key on the keyboard.
2. Confirm the accelerating voltage being
side screen).
Turn on the ACCEL VOLTAGE switch. The extracting voltage is applied, and the emission
2014 06 11
0.0 kV
(see the second line from the top on the right
1
TILT:000
WD:39

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Summary of Contents for JEOL JSM-6301F

  • Page 1 SEM (JEOL, JSM-6301) Operation manual 2014 06 11 The turning on the SEM 1. Turn on the scanning image observation instrument with the OPE POWER switch at the rear of the instrument. 2. Rotate the POWER key switch to the START position, and release the hand from the key.
  • Page 2 current flows µA) (see the lowest part on the right side screen). 3. Rotate clockwise the ACCEL VOLTAGE knob slowly. If the emission current rises rapidly, conduct the aging until the stable current is attained. When the user observes the sample under low accelerating voltage below kV, the user should set the desired accelerating voltage as follows.
  • Page 3 6. Restore the scan speed to the FAST to save the image data on the MO disk. Notice: If the scan speed is not restored to the FAST, the data cannot be saved. 7. Press the INS key, and type the file name in the space following the SAVE|A:. Press the RETURN key to save the image data on the MO disk.
  • Page 4 6. Repeat the operations mentioned above (4 and 5), to adjust the object position on the CRT, until the object moving is restricted within 6 mm. When necessary, perform the operation mentioned above, ②. Note: The completed axis adjustments prevent the conspicuous moving of the object image, even if the PROBE CURRENT knob is rotated greatly.
  • Page 5 the OL astigmatism correction does not completely solve the astigmatism. Adjust carefully the axis of the movable diaphragm of the objective lens. The sample exchange (The sample removing) 1. Press the V7G button at the lower part of the instrument, and press the ACCEL VOLTAGE button (The indicator lamp is turned off.).
  • Page 6 of the instrument. Note This operation manual represents only the basic method for the SEM operation. If the user wishes to understand the detail or the application of the SEM operation, the user should refer to the manufactures instructions, or contact the staff. Please contact the staff immediately, if any problems for the SEM operation are generated.

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