JEOL JSPM-5200 Instructions Manual page 196

■ Flow chart of the operation
The following is the flow chart of the operation in the STM mode.
■ Checki
ng before approaching
Befo re performing approaching, check whether the
according to the procedure in Sect. 5.3, "Preparing Approach."
• H
as coa
cantilever tip and the specimen surface is 0.3 mm or less?
• Is
the Z stage position in the approaching-possible range?
■ Setting the
scanning parameters
Before carrying out an approach operation, set the scanning parameters including the
scan ning area.
Alth ough the values of these parameters differ depending upon the specimen and the
purpose o
Scan Size
Click on the Scan Size selection box in the STM tab window. When the
n umerical value is highlighted, enter 1 um using the keyboard and finalize the
n umerical value by pressing the Tab key. Or, click on the
Scan Size selection box and select a numerical value near 1,000 nm.
Clock
Click on the
TMPM5200-2
Check before approaching
Approaching
Image observation
• Setting filter and loop
gain
• Setting bias voltage and
tunneling current
Finishing observation
rse approaching been executed in such a way that the distance between the
f use, rough values are as follows.
Here, Scan Size differs depending on the scanner installed. In practice, set an
appropriate value according to the observation a
button in the Clock selection box and select 100.00 us.
５ MEASUREMENT OPERATION
Starting approach
Starting measurement
Grabbing image
Storing image
preparation has been completed
rea.
Grabbing
button in the
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