JEOL JSPM-5200 Instructions Manual page 100

■ Operat ion flow chart
The following is the flow chart showing MFM observation.
■ Checking before an approach
Before performing an approach, make sure that preparation has been completed
according to the procedure in Sect. 5.3, "Preparing for Measurement."
• Is the MFM cantilever properly mounted on the cantilever holder?
• Has coarse approach been executed in such a way that the distance between the
cantilever tip and the specimen surface is within 0.3 mm or less?
• Is the Z stage position within the approachable range?
• Is the SUM value of the AFM amplifier unit at its maximum (–5.0 V)?
■ Adjusting the photodiode position
Carry out the procedure in Section 5.4.1, "Adjusting the photodiode position."
TMPM5200-2
Check before approach
Adjust photo diode
positio n
Set scanning parameters
Adjust cantilever
resonance point
Approach
Image obser vation
• Setting the amount of
lift
• Setting cantilever
excitation voltage
(when lifted)
Finish observation
５ MEASUREMENT OPERATION
⇒ Adjusting PD
⇒ Tuning
⇒ Star ting approach
Grab image
Store image
⇒ Grabbing
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