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When measurement
If the I-V measurement data is saturated as shown in the figure below, decrease the gain
specified for Preamp Gain on the SPS Parameters window.
Decrease the value in Preamp Gain of the SPS Parameters window.
If no stable data is obtained at the same measu rement point or unreasonable data is
obtained, the cantilever might be irregularly bent due to an electrostatic force during
the measurement. In such a case, try to reduce the I-V scanning voltage range.
Changing
grabbed. If you want to change parameters, do it while the measurement is sus-
pended.
TMPM5200-2
result is saturated
parameters during I-V measurement might cause errors for data that you
５ MEASUREMENT OPERATION
I
V
5-153
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