Principal Specifications - JEOL JSPM-5200 Instructions Manual

2.1

PRINCIPAL SPECIFICATIONS

• Resolution
AFM:
STM:
• System drift:
• Measurement modes
AFM:
STM:
• X, Y scanning range:
Driving voltage:
Resolution:
• Z range:
Driving voltage:
Resolution:
• Specimen size
Standard:
Maximum:
• Specimen movement
X, Y specimen movement: ± 3 mm
Z specimen movement:
TMPM5200-2
2 SPECIFICATIONS AND INSTALLATION REQUIREMENTS
Atomic resolution (mica atomic image in contact mode)
Atomic resolution (HOPG atomic image)
0.05 nm/s or less
Contact mode
Topography image, force image, FFM, force curve,
friction-force curve, I-V, CITS, contact electric-current
image
AC mode
Topography image, phase image, amplitude image,
point-by-point lift mode
Lateral-modulation FFM (optional)
Viscoelasticity (optional)
Surface potential difference (optional)
Electrochemistry (optional)
Line-by-line lift mode (optional)
STM mode
Topography image, electric-current image, CITS
Spectroscopy
I-V, S-V, I-S
0 to 10 µm (when the standard scanner is used)
± 150 V
25 bits (image offset included)
0 to 3 µm (when the standard scanner is used)
± 150 V
21 bits (at a gain of 32 × )
10 mm × 10 mm × 3 mm (thickness)
2-inch wafer
5 mm
2-1