JEOL JSPM-5200 Instructions Manual page 312

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Montage
Clicking on the Montage button in the SPM Parameters window opens the Montage
window.
In the montage scan
scan area of your scanner, because the syste
dividing it.
Over lap
Cont inuity between frames is not perfect due to hysteresis and creep in the scanner.
Overlap or gap between frames may occur. In such a case, specify the edge-to-edge
dista nce between frames in the X and Y directions in nm. in the Overlap input boxes
Y ou can enter p
indep endently in the vertical and horizontal directions.
TMPM5200-2
, you cannot specify the scan area that exceeds the maximum
ositive and negative values for overlap and gap as shown below
Positive
O verlap
５ MEASUREMENT OPERATION
m scans the specified scan area by
Negative
G ap
.
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