JEOL JSPM-5200 Instructions Manual page 465

MDT
Model
NSCS11
NSCH11
NSCF11
NSCS11/"Coating"
NSCH11/"Coating"
NSCF11/"Coating"
CSCS11
CSCH11
CSCF11
CSCS11/Si3N4
CSCH11/Si3N4
CSCF11/Si3N4
CSCS11/"Coating"
CSCH11/"Coating"
CSCF11/"Coating"
NSC21
NSCH21
NSCF21
NSC21/"Coating"
NSCH21/"Coating"
NSCF21/"Coating"
CSCS21
CSCH21
CSCF21
CSCS21/ Si3N4
CSCH21/ Si3N4
CSCF21/ Si3N4
CSCS21/"Coating"
CSCH21/"Coating"
CSCF21/"Coating"
NSCS21
NSCH21
NSCF21
NSCS21/"Coating"
TMPM5200-2
Contact or Number
Non-contact of Tips
Non-contact 15
Non-contact 200
Non-contact 400
Non-contact 15
Non-contact 200
Non-contact 400
Contact 15
Contact 200
Contact 400
Contact 15
Contact 200
Contact 400
Contact 15
Contact 200
Contact 400
Non-contact 15
Non-contact 200
Non-contact 400
Non-contact 15
Non-contact 200
Non-contact 400
Contact 15
Contact 200
Contact 400
Contact 15
Contact 200
Contact 400
Contact 15
Contact 200
Contact 400
Non-contact 15
Non-contact 200
Non-contact 400
Contact 15
Coating
None
None
None
Si3N4,W2C,TiO,TiN,W,Cr,Au,Pt,Co,Ni
Si3N4,W2C,TiO,TiN,W,Cr,Au,Pt,Co,Ni
Si3N4,W2C,TiO,TiN,W,Cr,Au,Pt,Co,Ni4
None
None
None
Si3N4
Si3N4
Si3N4
W2C,TiO,TiN,W,Cr,Au,Pt,Co,Ni
W2C,TiO,TiN,W,Cr,Au,Pt,Co,Ni
W2C,TiO,TiN,W,Cr,Au,Pt,Co,Ni
None
None
None
Si3N4,W2C,TiO,TiN,W,Cr,Au,Pt,Co,Ni
Si3N4,W2C,TiO,TiN,W,Cr,Au,Pt,Co,Ni
Si3N4,W2C,TiO,TiN,W,Cr,Au,Pt,Co,Ni4
None
None
None
Si3N4
Si3N4
Si3N4
W2C,TiO,TiN,W,Cr,Au,Pt,Co,Ni
W2C,TiO,TiN,W,Cr,Au,Pt,Co,Ni
W2C,TiO,TiN,W,Cr,Au,Pt,Co,Ni
None
None
None
Si3N4,W2C,TiO,TiN,W,Cr,Au,Pt,Co,Ni
７ APPENDIX
7-17