JEOL JSPM-5200 Instructions Manual

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ITMPM5200-2

MAY2004-17110074

Printed in Japan

JSPM-5200

SCANNING PROBE

MICROSCOPE

INSTRUCTIONS

Table of Contents

Summary of Contents for JEOL JSPM-5200

Page 1 INSTRUCTIONS JSPM-5200 SCANNING PROBE MICROSCOPE For the proper use of the instrument, be sure to read this instruction manual. Even after you read it, please keep the manual on hand so that you can consult it whenever necessary. ITMPM5200-2 MAY2004-17110074...
Page 2: Tmpm5200-2
JSPM-5200 SCANNING PROBE MICROSCOPE TMPM5200-2...
Page 3 • In no event will JEOL Ltd. be liable for direct, indirect, incidental or conse- quential damages resulting from the use of software described in this manual.
Page 4 NOTATIONAL CONVENTIONS AND GLOSSARY ■ General notations A potentially hazardous situation which, if not avoided, could result WARNING : in death or serious injury. A potentially hazardous situation which, if not avoided, could result CAUTION : in minor injury or material damage. Material damage includes, but is not limited to, damage to related devices and facilities, and to acquired data.
Page 5: Table Of Contents
CONTENTS SAFETY PRECAUTIONS PRECAUTIONS FOR USE 1. GENERAL INTRODUCTION.................. 1-1 2. SPECIFICATIONS AND INSTALLATION REQUIREMENTS PRINCIPAL SPECIFICATIONS............2-1 COMPOSITION..................2-2 INSTALLATION REQUIREMENTS............ 2-5 STANDARD INSTALLATION DIAGRAM.......... 2-6 3. CONFIGURATION AND DESCRIPTIONS OF COMPONENTS OVERALL CONFIGURATION ............3-1 MAIN UNIT................... 3-2 3.2.1 SPM Unit..................
Page 6 SPM Parameters Window (Measurement Setting Window)....5-9 5.2.3 Shortcut Icons................5-11 5.2.4 Software Oscilloscope ..............5-12 5.2.5 Lock-In Amplifier .................5-13 5.2.6 Specimen Temperature Controller (for JSPM-5200) .....5-18 5.2.7 CCD Camera .................5-18 5.2.8 Digital Control MFM unit .............5-19 PREPARING FOR MEASUREMENT..........5-20 5.3.1 Starting the System in Measurement Mode........5-20 5.3.2...
Page 7 CONTENTS FILE MENU..................6-17 EDIT MENU ..................6-25 PROCESS MENU (IMAGE PROCESSING FUNCTION)....6-26 6.6.1 Filter ....................6-26 6.6.2 Edge Enhance................6-29 6.6.3 Differentiate .................. 6-30 6.6.4 Normalise ..................6-30 6.6.5 Normalise S.D................6-30 6.6.6 Median................... 6-31 6.6.7 Subtract Background..............6-32 6.6.8 Single Math ...................
Page 8 CONTENTS 6.10.9 Display SPS Measurement Position ..........6-91 6.11 MAPPING MENU (IMAGE PROCESSING FUNCTION) ....6-92 6.11.1 Display Parameters................6-93 6.11.2 Special Displays ................6-94 6.11.3 SPS Mapping Select ..............6-95 6.11.4 Edit SPS Mapping Data Set............6-96 6.11.5 Average Images ................6-99 6.11.6 Duplicate Data Set.................6-99 6.11.7 Extract Spectra................6-99 6.12 PROCESS MENU (DATA PROCESSING FUNCTION)....6-101 6.12.1 Smooth..................6-101...
Page 9 CONTENTS 8. GENERAL STORAGE....................8-1 8.1.1 Instrument ..................8-1 8.1.2 Cantilever ..................8-1 8.1.3 Handling the Instrument..............8-1 8.1.4 Maintenance Parts ................8-1 VIBRATION ISOLATOR ..............8-2 8.2.1 Compressor （optional） ..............8-2 8.2.2 Vibration-Isolation Table..............8-2 SPM HEAD.................... 8-3 8.3.1 Laser Beam Focusing ..............
Page 10: Safety Precautions
For the proper use of the instrument, be sure to read the following safety precautions prior to starting operation or maintenance. They contain important information related to safety. Contact your JEOL service office whenever you are unclear about any operation or maintenance.
Page 11 Fluorescent lamps blink at 100 Hz (if the line frequency is 50 Hz) or at 120 Hz (if the line frequency is 60 Hz) and this noise may appear on the displayed image. Concerning the installation and layout plan, please consult your local JEOL service personnel.
Page 12 SAFETY PRECAUTIONS • When you move the tip close to the specimen using the Coarse Stage window, the tip never stops even if a tunneling current or atomic force is actually detected. • The specimen stub is gold-plated. Be careful not to scratch the stub surface.
Page 13 SAFETY PRECAUTIONS The labels concerning the operation of the laser • This instrument uses a class 2 laser device and emits 670 nm laser (1 mw power). Follow the instruction manual to avoid getting laser irradiation bombardment. The following labels are found on the AFM base unit side panel.
Page 14: Precautions For Use
PRECAUTIONS FOR USE Important precautions, which, if not followed, may result in damage to the device itself, are described below. • The software must be terminated before the power is turned off. Never turn off the power while the software is in operation. Wait 10 seconds or more before restarting the system.
Page 15: General
GENERAL INTRODUCTION ....................1-1 TMPM5200-2...
Page 16: Introduction
1 GENERAL INTRODUCTION The JSPM − 5200 Scanning Probe Microscope is designed not only to meet researchers’ increasing demands for applied observation modes but also to make the most of the intrinsic functions of a scanning probe microscope. This instrument is easy to use and is superb in its expandability, enabling a number of people from novices to professional SPM researchers to use it.
Page 17: Specifications And Installation Requirements
SPECIFICATIONS AND INSTALLATION REQUIREMENTS PRINCIPAL SPECIFICATIONS................ 2-1 COMPOSITION....................2-2 INSTALLATION REQUIREMENTS ..............2-5 STANDARD INSTALLATION DIAGRAM............2-6 TMPM5200-2...
Page 18: Principal Specifications
2 SPECIFICATIONS AND INSTALLATION REQUIREMENTS PRINCIPAL SPECIFICATIONS • Resolution AFM: Atomic resolution (mica atomic image in contact mode) STM: Atomic resolution (HOPG atomic image) • System drift: 0.05 nm/s or less • Measurement modes AFM: Contact mode Topography image, force image, FFM, force curve, friction-force curve, I-V, CITS, contact electric-current image AC mode...
Page 19: Composition
2 SPECIFICATIONS AND INSTALLATION REQUIREMENTS COMPOSITION SPM Base Unit • Coarse movement: Z coarse-movement distance: Manually operated up to 5 mm (motor approach in- cluded) Approach function: Motor approach up to 1.5 mm X, Y coarse movement function: Manually operated up to ± 3 mm •...
Page 20 2 SPECIFICATIONS AND INSTALLATION REQUIREMENTS SPM Control System • Scanning capabilities Scanning range: Continuously variable from 0 to maximum scanning range (25 bits) Scanning speed: 0.00167 ms to 200 s/point Bias voltage: Continuously variable from 0 to ± 10 V, 0 to ± 150 V (16 bits) Scanning in a region of 1024 ×...
Page 21 2 SPECIFICATIONS AND INSTALLATION REQUIREMENTS • Image-processing functions Spatial filters: 10, low-pass, band-pass, high-pass, horizontal smooth- ing, vertical smoothing and user-defined Edge enhancement: 5, vertical, horizontal, lower right, lower left and Laplace Differential filter Normalization filters: Median filters: Tilt correction: X, Y, arbitrary area and entire area Image processing: Video inverting, multiplication, division, AND, OR,...
Page 22: Installation Requirements
50 Hz) or at 120 Hz (if the line frequency is 60 Hz) and this noise may appear on the displayed image. Concerning the installation and layout plan, please consult your local JEOL service personnel. TMPM5200-2...
Page 23: Standard Installation Diagram
2 SPECIFICATIONS AND INSTALLATION REQUIREMENTS STANDARD INSTALLATION DIAGRAM Installation Room 2,500 mm (W) × 3,000 (D) or larger Floor space: Ceiling: 2,000 mm or higher Entrance: 800 mm (W) × 1,800 mm (H) or larger When an optional evacuation system is installed, it is necessary to provide a space of 500 mm or more between the rear of the instrument and the wall of the room.
Page 24: Configuration And Descriptions Of Components
CONFIGURATION AND DESCRIPTIONS OF COMPONENTS OVERALL CONFIGURATION ................ 3-1 MAIN UNIT ....................... 3-2 3.2.1 SPM Unit....................3-2 3.2.2 AFM Amplifier................... 3-9 OPERATION UNIT ..................3-13 3.3.1 SPM CONTROL System ................. 3-14 3.3.2 Computer System ..................3-16 3.3.3 Oscilloscope (Optional)................3-17 TMPM5200-2...
Page 25: Overall Configuration
3 CONFIGURAT ON AND DESCRIPTIONS OF COMPONENTS The name, functions and layout of each unit of this instrument are given in this chapter. Please refer to this chapter when you read the operating procedures below. OVERALL CONFIGURATION This instrument is composed of a Main unit, a Operation unit (including SPM control and computer system) and an air compressor.
Page 26: Main Unit
3 CONFIGURAT ON AND DESCRIPTIONS OF COMPONENTS MAIN UNIT 3.2.1 SPM Unit The SPM unit is composed of a vibration isolator, an SPM base unit and an SPM head unit. SPM head unit AFM amp SPM base Vibration isolator TMPM5200-2...
Page 27 3 CONFIGURAT ON AND DESCRIPTIONS OF COMPONENTS ■ SPM base unit The SPM base unit includes a specimen stage, a stage-approach unit and a stage-shift unit. Scanner holder SPM head unit SPM head unit guide connectors Head unit screw Specimen stage Specimen stage Photodiode Y-axis coarse-shift knobs...
Page 28 3 CONFIGURAT ON AND DESCRIPTIONS OF COMPONENTS Specimen stage coarse-shift knobs These knobs move the specimen stage to any point in a circle with a radius of 3 mm from the stage center. One revolution of the knobs moves the stage by about 0.35 mm. The relationship between the knob operation and the specimen stage movement is shown below.
Page 29 3 CONFIGURAT ON AND DESCRIPTIONS OF COMPONENTS Photodiode Y-axis positioning knob (only for AFM) This knob adjusts the Y-axis position of the photodiode in the SPM head unit for AFM observation. For more information, refer to Section 5.4.１, "Adjustment of Photodiode Position." Scanner holder The scanner holder consists of a scanner and a specimen-stub holder.
Page 30 Utility ports The JSPM-5200 is provided with two utility ports for use at the user’s option. They are usually covered with caps. Regarding the size and details of the utility ports, refer to Chapter 8, "APPENDIX."...
Page 31 3 CONFIGURAT ON AND DESCRIPTIONS OF COMPONENTS Laser source positioning knobs Adjusting the two knobs positions the point of laser illumination on the cantilever. Y axis + Focusing screw X-axis adjusting knob －＋－ X axis + Y-axis adjusting knob －...
Page 32 3 CONFIGURAT ON AND DESCRIPTIONS OF COMPONENTS Mirror This mirror directs the laser beam to the photodiode after it is reflected by the cantilever. Mirror angle-adjustment knob Adjusts the mirror angle so that the laser beam irradiates the detector correctly. Loosen the mirror fastening screw;...
Page 33: Afm Amplifier
3 CONFIGURAT ON AND DESCRIPTIONS OF COMPONENTS 3.2.2 AFM Amplifier This amplifier is used for AFM observation. Below are the names and functions of the switches, knobs and terminals on the front and rear panels of the AFM amplifier. LD-ON ①...
Page 34 3 CONFIGURAT ON AND DESCRIPTIONS OF COMPONENTS ② Indicator selection knob Used to select the photodiode output (SUM, AFM, FFM), the values (RMS, FMD) corresponding to the vibration amplitude and the frequency of the cantilever during AFM observation in the AC mode, and the phase output value (PHASE). The positional relationship between the photodiode, mirror and cantilever is shown below.
Page 35 3 CONFIGURAT ON AND DESCRIPTIONS OF COMPONENTS As the RMS value is an output value of the signal input to the RMS-DC circuit, the higher the frequency becomes, the greater the effect of the low-pass filter inserted before the RMS-DC circuit, thus attenuating the amplitude. So, the RMS value sometimes becomes smaller than the (A-B)/(A+B) value that is output to AUX1.
Page 36 3 CONFIGURAT ON AND DESCRIPTIONS OF COMPONENTS ■ Rear panel ① EXT This is the external oscillator input terminal for inputting a sine wave with ampli- tude 1.0 V to this terminal. The signal applied to this terminal is adjusted to a suitable output voltage using the SPM software and is added to the cantilever vibration piezoelectric element.
Page 37: Operation Unit
3 CONFIGURAT ON AND DESCRIPTIONS OF COMPONENTS OPERATION UNIT The power supply unit accommodates an SPM CONTROL system that controls the Main unit, a computer system and a console display. It also accommodates power supplies for optional accessories for lateral modulation FFM and viscoelasticity measurements, and the power supply for the evacuation system.
Page 38: Spm Control System
3 CONFIGURAT ON AND DESCRIPTIONS OF COMPONENTS 3.3.1 SPM CONTROL System The names and functions of each knob, button and terminal on the front and rear panels of the SPM CONTROL system are shown below. ② POWER ① Front panel ⑥...
Page 39 3 CONFIGURAT ON AND DESCRIPTIONS OF COMPONENTS ② POWER lamp Goes on when the POWER button is turned on and goes out when the POWER button is turned off. ■ Rear panel ① Z/20 terminal Outputs one twentieth of the output voltage of the Z-axis driving amplifier (the voltage applied to the Z-axis piezoelectric element).
Page 40: Computer System
Socket: Kyocera Elco Corporation, Connector 9021, Insulator 6 terminals, Con- tact 9021 socket Each trigger is output with a negative logic pulse of 1.6 µs (width). The JSPM-5200 does not use the following two terminals. ⑨ BS-D ⑩ SG 3.3.2...
Page 41: Oscilloscope (Optional)
3 CONFIGURAT ON AND DESCRIPTIONS OF COMPONENTS 3.3.3 Oscilloscope (Optional) Below are the names and functions of the switches, knobs and buttons on the front panel of the oscilloscope. Section C ① ② ⑨ ③ ④ ⑤ ⑧ ⑦ ⑥ ①...
Page 42 3 CONFIGURAT ON AND DESCRIPTIONS OF COMPONENTS ③ VOLTS/DIV A switch for selecting signal input sensitivity for the CH1 and CH2 signals. Usually, set it to 5V/div (turn it counterclockwise to the limit). ④ AC, GND, DC switch A switch for selecting input-signal coupling mode. Usually, select GND when adjusting the trace position and DC during scanning.
Page 43 3 CONFIGURAT ON AND DESCRIPTIONS OF COMPONENTS ⑥ Internal Trigger Source Switches for selecting the trigger signal. These switches are in effect only when the Trigger Source switch ⑤ is set to INT. Usually, VERT (both switches are pressed) is used. ⑦...
Page 44: Preparation For Observation
PREPARATION FOR OBSERVATION PREPARATION FOR STM OBSERVATION............ 4-1 4.1.1 Outline......................4-1 4.1.2 Mounting the Specimen Holder ..............4-3 4.1.3 Mounting the Scanner Holder ..............4-4 4.1.4 Mounting the SPM Head Unit..............4-5 4.1.5 Mounting the Cantilever................4-5 4.1.6 Mounting the Tip..................4-6 4.1.7 Inserting the Cantilever Holder or the Tip Holder into the SPM Head Unit ..................
Page 45: Preparation For Stm Observation
4 PREPARATION FOR OBSERVATION PREPARATION FOR STM OBSERVATION 4.1.1 Outline This section outlines the preparation for SPM observation using the JSPM − 5200, from SPM-head unit setting to specimen loading. Attach an appropriate scanner holder to the SPM base according to the scanning area to be observed.
Page 46 4 PREPARATION FOR OBSERVATION Insert the cantilever holder or the tip holder to the SPM head unit. Insert a specimen stub into the scanner holder. TMPM5200-2...
Page 47: Mounting The Specimen Holder
4 PREPARATION FOR OBSERVATION 4.1.2 Mounting the Specimen Holder Below is the method of mounting the specimen holder on the scanner holder. Mount the specimen holder with the beveled side coincides with front of the scanner holder. The engraving on the front of the scanner holder cap identify type of the scanner. Fastening screws Specimen holder Scanner holder...
Page 48: Mounting The Scanner Holder
4 PREPARATION FOR OBSERVATION 4.1.3 Mounting the Scanner Holder Turn off the SPM CONTROL unit. WARNING Be sure to turn off the power to the SPM CONTROL unit in advance when mounting or dismounting the scanner holder, specimen holder or SPM head unit. There is a risk of electric shock due to the high voltage applied to the connector pins from the SPM CONTROL unit.
Page 49: Mounting The Spm Head Unit
4 PREPARATION FOR OBSERVATION 4.1.4 Mounting the SPM Head Unit Loosen the SPM head unit fastening screw. Insert the SPM head unit along with the head unit guide rail on the SPM base unit until it touches a stopper. Then, lock it with the head unit fastening screw. Insert the two connectors on the SPM head unit into the receptacle connec- tors on the SPM base unit, along with the groove, until you hear a click.
Page 50: Mounting The Tip
4 PREPARATION FOR OBSERVATION CAUTION 1. Be sure to insert the cantilever along with the groove. Otherwise, the cantilever may be damaged due to an excessive force being applied when the spring retainer is released. 2. Never touch the area around the cantilever on the cantilever holder with bare fingers.
Page 51: Inserting The Cantilever Holder Or The Tip Holder Into The Spm Head Unit
4 PREPARATION FOR OBSERVATION 4.1.7 Inserting the Cantilever Holder or the Tip Holder into the SPM Head Unit In order to prevent the cantilever or the tip from colliding with the scanner holder, confirm that the specimen stage is lowered to a low enough position. If it is not, move the specimen stage downward by turning the manual approach thumbscrew.
Page 52: Mounting A Specimen
4 PREPARATION FOR OBSERVATION 4.1.8 Mounting a Specimen Attach a specimen to the specimen stub. Attach a specimen to the specimen stub with an appropriate material such as double-faced adhesive tape or conductive paint. CAUTION The specimen stub is gold-plated. Be careful not to scratch the stub surface.
Page 53: Specimen Exchange
4 PREPARATION FOR OBSERVATION Scanner holder Specimen stub Specimen stub installing rod 4.1.9 Specimen Exchange When you replace the specimen just observed with a new specimen, you do not need to turn off the SPM CONTROL unit. WARNING Never exchange a specimen while a high bias voltage is being applied to the specimen.
Page 54: Adjustment For Afm Observation
4 PREPARATION FOR OBSERVATION ADJUSTMENT FOR AFM OBSERVATION Below are the procedures for adjusting the laser beam and the photodiode in the AFM head unit and for roughly approaching the specimen. 4.2.1 Adjusting the Laser Beam Position Turn on the SPM CONTROL unit according to the procedure of Section 5.3.1, "Starting the System in Measurement Mode."...
Page 55 4 PREPARATION FOR OBSERVATION Adjustment procedure 1 • Adjust the laser beam using the knobs so that the laser beam spot illuminates the edge of the cantilever base. Cantilever base Cantilever • Shift the laser beam spot so that it illuminates the edge of the cantilever base corresponding to the center of the cantilever, as shown below.
Page 56 4 PREPARATION FOR OBSERVATION • Shift the laser beam spot so that it illuminates the tip of the cantilever, as shown below. Adjustment procedure 2 • At this stage of adjustment, observe the laser beam spot on the specimen surface. Specimen Laser beam •...
Page 57 4 PREPARATION FOR OBSERVATION • Is the cantilever set at a proper angle on the cantilever holder ? CAUTION Although the focus of the laser beam has been adjusted in the factory before shipment, the beam may be out of focus for some reason.
Page 58: Adjusting The Photodiode Position
4 PREPARATION FOR OBSERVATION 4.2.2 Adjusting the Photodiode Position Click on the Adjust PD button, and the Display Window shown below appears. Adjust the position of the photodiode using the photodiode positioning knobs (for X-axis and Y-axis) so that the red spot enters the blue region in the center of the window. Y-axis + X- axis + X-axis positioning...
Page 59 4 PREPARATION FOR OBSERVATION When the Si cantilever is used in this state, the SUM value is about − 8.00 V to − 10.0 V. When the Si cantilever for the AC mode is used, the SUM value is about −...
Page 60 4 PREPARATION FOR OBSERVATION The FFM value cannot be adjusted to 0. Such a case probably occurs when the cantilever is not set correctly on the cantilever holder. Check the following four points. • Is the cantilever set straight on the cantilever holder ? •...
Page 61: Rough Approaching
4 PREPARATION FOR OBSERVATION • Is the cantilever holder inserted properly? Or, is there a piece of broken cantilever or something in the groove ? Cantilever Cantilever holding bar Cantilever holder Piece of broken cantilever If the AFM value still cannot be adjusted to 0 after the above checks, try to adjust the mirror position according to Chapter 8, "MAINTENANCE."...
Page 62: Measurement Operation
5.2.3 Shortcut Icons................... 5-11 5.2.4 Software Oscilloscope................5-12 5.2.5 Lock-In Amplifier ..................5-13 5.2.6 Specimen Temperature Controller (for JSPM-5200)........ 5-18 5.2.7 CCD Camera .................... 5-18 5.2.8 Digital Control MFM unit ................ 5-19 PREPARING FOR MEASUREMENT ............5-20 5.3.1 Starting the System in Measurement Mode..........5-20 5.3.2...
Page 63 STM MODE ....................5-132 5.6.1 STM Tab ....................5-132 5.6.2 Advanced Tab ..................5-143 GENERAL PRECAUTIONS FOR IMAGE ACQUISITION ......5-159 TERMINATING MEASUREMENT..............5-165 TERMINATING OPERATION ..............5-166 5.10 REFERENCE....................5-167 5.10.1 SPM Scan Menu ..................5-167 5.10.2 SPM Parameters (Simple)...............5-177 5.10.3 SPM Parameters (Advanced)..............5-202 5.10.4 Setting Lock-in Amplifier ..............5-253 5.10.5 Controlling Specimen Temperature ............5-259 5.10.6 CCD Camera...................5-263 TMPM5200-2...
Page 64: Basic Usage Of Winspm
５ MEASUREMENT OPERATION BASIC USAGE OF WinSPM 5.1.1 Before use Before using WinSPM, confirm that the system is properly set up and that the calibrated values of scanner sensitivity and motor drive position have been recorded. If and when it becomes necessary to re-install the WinSPM software, you must save these values in WinSPM once again.
Page 65 ５ MEASUREMENT OPERATION Multitasking You can start WinSPM in either scan or process mode. You may start the system in both modes simultaneously, thereby enabling you to perform image processing while performing measurements. Main menu This is the menu bar stretching across the top of the window, opened when WinSPM is in operation, containing the names of available pull-down menus, the contents of which differ depending upon operation mode—namely, scan mode or process mode.
Page 66 ５ MEASUREMENT OPERATION mouse cursor to the mark, and click on it. To cancel selection of an item, simply ○ select another item. In so doing, selection of the first item will be canceled automatically. Gray display If a check box, radio button, input box, or the like is displayed in gray, it indicates that you cannot select it.
Page 67: Setting The User Name
Enter the desired new user name; then also enter the password using the keyboard; then click on the Login button. In the above example, JEOL is entered as User name and “test” is entered as Password. All entered characters will be displayed as the “*” marks.
Page 68 ５ MEASUREMENT OPERATION When the Create new login dialog box opens as shown below, click on the OK button. The new user name will be stored. Changing a password An already stored password can be changed as follows: Start the WinSPM system, and enter the user name and password. Click on the Change Password button.
Page 69 ５ MEASUREMENT OPERATION Click on the Change button. The Change Password dialog box opens as shown below. Clicking on the Yes button changes the password. The new user name will be stored. Deleting a user name The procedure to delete a user name which is already stored is as follows: Start the WinSPM system, and enter the user name and the password.
Page 70: Starting The Scan (Measurement ) Mode
５ MEASUREMENT OPERATION STARTING THE SCAN (MEASUREMENT ) MODE WinSPM has two modes, a scan mode and a process mode, which function independ- ently of each other. Here, operation of the scan mode is explained. 5.2.1 Selecting SPM Operation Mode The operation control window differs depending on the SPM operation mode selected from the dialog box that opens when the system starts.
Page 71 ５ MEASUREMENT OPERATION The optional lock-in amplifier is needed for measurement of viscoelasticity, lateral modulation friction force microscopy and electrostatic force microscopy. The following measurements are possible: Shape measurement SPS (Scanning probe spectroscopy) measurement SPS mapping measurement No optional measurement is available in the standard system configuration. All SPM Mode In this mode, the above three modes (AC AFM, Contact AFM, and STM) can run simultaneously.
Page 72: Spm Parameters Window (Measurement Setting Window)
５ MEASUREMENT OPERATION 5.2.2 SPM Parameters Window (Measurement Setting Window) The SPM Parameters window is the most fundamental window in the SPM system. It contains the tabs that open windows to control each independent operational mode and the tab (Advanced) that opens the tab window containing controls for detailed items of each operational mode.
Page 73 ５ MEASUREMENT OPERATION Advanced tab window This window is used mainly for UHV SPM measurement. All of the parameters should be set by the user. This enables you to make more detailed settings. When all of the SPM operational modes are selected, only the Advanced tab window is open. 5-10 TMPM5200-2...
Page 74: Shortcut Icons
５ MEASUREMENT OPERATION 5.2.3 Shortcut Icons Shortcut icons are placed just under the main menu. Open Reads file data from the disk. Sea ch Searches file data from the list . Save Saves data to a disk. Replay Replays images obtained by continuous measurement as quasi movies.
Page 75: Software Oscilloscope
５ MEASUREMENT OPERATION 5.2.4 Software Oscilloscope You can use the oscilloscope on the software. Clicking on the Oscilloscope Control and Oscilloscope ( 2 ) buttons on the WinSPM window opens the Oscilloscope Control and Oscilloscope windows as shown below, enabling you to monitor the state of signals under measurement.
Page 76: Lock-In Amplifier
５ MEASUREMENT OPERATION ■ Setting Channel A This software oscilloscope enables you to acquire and display data from two channels at the same time. Channel A is displayed in red, and Channel B in blue. Normally, set Channel A to Topography (motion in the Z direction of the scanner). The setting of Channel B differs depending upon the scanning mode (Contact mode, AC Mode, STM, etc.), so refer to the respective operation methods.
Page 77 ５ MEASUREMENT OPERATION ① POWER This switch turns on or off the power. ② Input selection switches These switches select input signals. When using the Lock-in Amplifier, set the switches as follows: A is selected by Both switches pressing it. selected (popped-out position).
Page 78 ５ MEASUREMENT OPERATION ⑯ SLOPE key This key specifies the filtering of output signals. Usually, you select 6dB. ⑰ DYNRES (dynamic reserve) setting key You usually select NORM or H1 RES when using the lock-in amplifier. ⑱ OFFSET key You usually select OFF when using the lock-in amplifier.
Page 79 ５ MEASUREMENT OPERATION Setting software (Model 5110) Click on SPM Scan in the main menu bar to open the pull-down menu; then click on Device Setup to open the Device Setup dialog box. Check the Lock-in Amplifier box and click on the Model 51110 radio button. ■...
Page 80 ５ MEASUREMENT OPERATION Press the MENU key (④) on the front operation panel. Confirm that MAIN MENU 1 is displayed on the display panel; then select CONFIGU RATIO Confirm that the CONFIGURATION menu is displayed; then select COMMUNICATIONS. Confirm that the COMM UNICATIONS menu is displayed;...
Page 81: Specimen Temperature Controller (For Jspm-5200)
５ MEASUREMENT OPERATION 5.2.6 cimen Temperature Controller (for JSPM-5200) With the aid of the optional specimen temperature controller (TM-24090), specimen temperature can be controlled. When the controller is connected to a PC using RS-232C, specimen temperature can be controlled via WinSPM.
Page 82: Digital Control Mfm Unit
５ MEASUREMENT OPERATION The CCD Camera System window can also be opened either by Pressin g the V key while holding down the Ctrl key on the keyboard or by clicking on the CCD camera icon. (CCD camera icon) 5.2.8 Digital Control MFM unit Connect the optional digital MFM unit (TM-26060) to the SPM controller.
Page 83: Preparing For Measurement
５ MEASUREMENT OPERATION PREPARING FOR MEASUREMENT The term “approach” means moving the cantilever probe toward the specimen to the point where inter-atomic forces come into play or a tunnel current flows. Before starting measurement, carry out the following procedures and perform the approach. .3.1 Starting the System in Measurement Mode Make sure that the specimen is mounted and that the cantilever probe is...
Page 84: Resetting The Controller
５ MEASUREMENT OPERATION 5.3.2 Resetting the Controller The SPM controller is initialized by signals from the software when the WinSPM software is started. Before starting the software, it is necessary to ensure that the SPM controller is on. If you switch on the SPM controller after starting the software, or switch off the SPM controller then switch it on again after replacing the scanner, for example, you must reset the system from the software.
Page 85: Checking The Stage Position
５ MEASUREMENT OPERATION 5.3.5 Checking the Stage Position In the WinSPM system, the approach operation is done automatically by a motor. An approach cannot be performed when the Z stage has already risen to the top position. Befo re performing an approach, confirm th at the position o f the Z...
Page 86: Setting An Optional Oscilloscope
５ MEASUREMENT OPERATION Approach possible Z In • If the Z stage position indicator (△) is too close to the In position, move the stage to the Out position as follows: Click on the Out radio button. (The probe moves away from the sample.) Click on the Start button.
Page 87 ５ MEASUREMENT OPERATION rtical position control knob ( ⇕ ) of CH2 so that the trace is rtical position control knob ( ⇕ ) of CH2 so that the trace is Adjust the ve Adjust the ve positioned at the center of the display. positioned at the center of the display.
Page 88: Ac Afm Mode
５ MEASUREMENT OPERATION AC AFM MODE his mode is selected from the Scan Mode Setup dialog (Sect. 5.3.4). In AC AFM mode, a cantilever probe vibrates in the vicinity of its characteri stic frequency and scans the specimen in such a way that the amplitude of vibration of the cantilever remains constant. The AC, MFM, VE-AFM, SKPM, and Advanced tab windows belong to the AC AFM mode and can be opened by clicking on each tab in the SPM Parameters window.
Page 89 ５ MEASUREMENT OPERATION ■ Operation flow chart The following is the flow chart showing operation in the AC mode. Check before approach Adjust photodiode ⇒ Adjusting PD position Set scanning parameters Adjust cantilever ⇒ Tuning resonance point ⇒ Starting approach Approach Image observation •...
Page 90 Also confirm that the SUM value of the AFM amplifier unit is as large as possible. Y-axis + X-axis + X-axis adjusting knob Y-axis adjusting knob The example illustrated above shows the photodiode position adjustment knobs for the JSPM-5200. TMPM5200-2 5-27...
Page 91 ５ MEASUREMENT OPERATION ■ Setting scanning parameters Before carrying out an approach, set the scanning parameters required for observation. hough thes e parameters differ depending upon the specimen and the purpose of obse rvation, you usually set the parameters as follows. Scan Size Click on the Scan Size selection box.
Page 92 ５ MEASUREMENT OPERATION Topography and phase images • Topographic image observation AFM topographic images are obtained with the cantilever being vibrated in the vicinity of its characteristic frequency and with the amplitude of vibration of the cantilever remaining constant during scanning. lick on the button in the Source 1 selection box and select Topography.
Page 93 ５ MEASUREMENT OPERATION ■ Adjusti ng a cantilever re sonance point Select either AC or FMD from the AFM Mode selection box in the AC Mode window. Either of the detection modes, AC (amplitude detection) or FMD (frequency detection) can be used under atmospheric pressure.
Page 94 ５ MEASUREMENT OPERATION Click on the OK button. Adjustment of the cantilever resona nce point takes place an d the excitation equency, voltage, and reference value are set automatically. Considerations in using t he tuning function • Excitation voltage to be applied to the cantilever In this system t here is a switch that changes the voltage to be applied to the cantilever to “high”...
Page 95 ５ MEASUREMENT OPERATION ■ Approach Click on the “Approach On” button. Approach starts automatically. When approach finishes, the Approach window containing the message “Auto Approach Stopped” is displayed in the center of the screen. Click on the Close button. Considerations in using the Approach On button •...
Page 96 ５ MEASUREMENT OPERATION modify the speed of approach in any SPM instrument other than ultra-high vacuum SPM instruments. • Judgment of approach conditions Whether approach has finished or not is judged by measuring the voltage applied to the Z scanner. The voltage is set to ± 0 V at the time of shipment from the factory. Specify approach conditions in the Advanced tab window.
Page 97 ５ MEASUREMENT OPERATION Condition in which the specimen and cantilever tip are completely separated (condition prior to approach) Neutral position (condition at the end of approach) Condition in which the cantilever tip is in contact with the specimen ■ Terminating observation Terminate observation according to the following procedure: Stop scanning.
Page 98 ５ MEASUREMENT OPERATION SPM head unit Groove Tip holder Cantilever holder Manual approach screw Stage moves upward Stage moves downward The example illustrated above show the manual approach screw for the J SPM-5200. TMPM5200-2 5-35...
Page 99: Mfm Tab
５ MEASUREMENT OPERATION 5.4.2 FM Tab FM (Magnetic Force Microscopy) measurements in AC AMF mode can be performed using the MFM tab window that is open ed by clicking on the MFM tab in the SPM Parameters window. To do this, however, an optional MFM cantilever is required.
Page 100 ５ MEASUREMENT OPERATION ■ Operat ion flow chart The following is the flow chart showing MFM observation. Check before approach Adjust photo diode ⇒ Adjusting PD positio Set scanning parameters Adjust cantilever ⇒ Tuning resonance point ⇒ Star ting approach Approach Image obser vation •...
Page 101 ５ MEASUREMENT OPERATION ■ Setting scanning param eters Before you carry out an approach, set the scanning parameters required for observation using the MFM tab window. Although these parameters differ depending upon the specimen and the purpose of observation, you can usually set the parameters as follows: Liftin Click on the radio button that corresponds to the desired lift mode.
Page 102 ５ MEASUREMENT OPERATION Loop Gain Click on the button in the Loop Gain selection box and select 8 from the pull-down menu. The setting determines the gain of the feedback circuit. The larger the set value, the higher the response gain, letting you obtain a good image from an uneven specimen surface.
Page 103 ５ MEASUREMENT OPERATION Topography MFM image image (Phase image) Gradually reduce the excitation voltage to the cantilever so that t he sharpest MFM image is obtained. ■ Capturing an image Carry out the procedure in Section 5.4.1, “Capturing an image.” ■...
Page 104: Ve-Afm Tab
５ MEASUREMENT OPERATION .4.3 E-AFM Tab Visco elastic ity image obs ervation is an option al function tha t requ ires a lock-in am plifier supplied to order. Conne ct the lock-in am plifier to the SPM controller and set the softw are in accordan ce wi...
Page 105 ５ MEASUREMENT OPERATION ■ Observ ing a topographical image Obse rve the topographical image of a sample; make sure that the image is satisfactory; then click on the Retract On button to retract the tip. ■ Setting the lock-in amplifier Model 72 Click on the Lock-In button to open the Lock-In Amplifier window.
Page 106 ５ MEASUREMENT OPERATION Model 5110 Turn on the POWER switch of the lock-in amplifier (see Section 5.2.5, “Lock-In Amplifier”). Set the lock-in amplifier as follows: Press the A button of the Input selection switches. To put the Amplifier into the FLOAT state, press the FLOAT/GROUND button of the Input selection switches.
Page 107 ５ MEASUREMENT OPERATION Specify the parameters according to the following table: Filter Band pass Dynamic Res. High Resolution Filter 20.000 Offset □ Frequency/kHz Line Reject Track □ Slope/12dB □ Click on the Retract Off button in the VE-AFM tab window Click on the Auto Configure button in the Lock-in-Amplifier window.
Page 108: Skpm Tab
５ MEASUREMENT OPERATION • Oscillation level (OSC Level/V) When you use hard cantilevers such as an Si cantilever, it is recommended that you use a low oscillation level to observe the image. If the oscillation level is too high, the cantilever may be broken. When you use soft cantilevers, however, increase the oscillation level accordingly.
Page 109 ５ MEASUREMENT OPERATION ■ Affixing the cantilever Use a conductive cantilever such as a conductive Si cantilever or a cantilever with bot sides coated with gold. A ffix the ca ntilever on a cantilever holder . Make sure that good conductivity is kept between the cantilever and the cantilever holder.
Page 110 ５ MEASUREMENT OPERATION Obse rve the topographical image of a specimen surface using the AC mode, and confirm that you can obtain a good image. Then retract the tip by clicking on Retract On. ■ Setting the lock-in amplifier Model 72 lick on the Lock-In button to open the Lock-In Amplifier window.
Page 111 ５ MEASUREMENT OPERATION To deselect the 10 and 10 buttons of the Input selection switches, put the button s into the popped-out state. lick on the Lock-in button to open the Lock-in Amplifier window. Check the Enable check box to activate the lock-in amplifier. It will take about one second until the amplifier starts, initializing parameters.
Page 112 ５ MEASUREMENT OPERATION cify the parameters according to the following table: Filter Band pass Dynamic Res. High Resolution Filter 40.000 Offset □ Frequency/kHz Line Reject Track □ Slope/12dB □ ■ Setting the KFM parameters Click on the KFM button in the SKPM tab window to open the KFM window; hen specify the following items.
Page 113 ５ MEASUREMENT OPERATION Adjust the Offset slider o f the KFM window so that the DC component of the bias voltage becomes 0 V (so that the waveform of the bias voltage can be generated with 0 V as the center line). Click on the Retract Off button and set the cantilever to an approach state.
Page 114 ５ MEASUREMENT OPERATION Click on the Retract Off button and set the cantile ver into an approach state again. At this stage, feedback will be executed to set the ω component (one cycle) to zero. If the lock-in amplifier meter needle swings out of scale (or in the case of Model 5110, the OVLD LED lights up), raise its sensitivity using the Lock-In Amplifier window.
Page 115 ５ MEASUREMENT OPERATION ■ Observation Click on the Scan button in the SKPM tab window. The topographical image is displayed on the left side of the screen, and the surface potential image is displayed on the right side. Surface Topography potential image image...
Page 116 ５ MEASUREMENT OPERATION ■ Principles of SKPM operation Kelv in Force Micros copy (KFM) is a special technique used to observe the surface-potential image of a specimen by detecting the electrostatic force generated between a cantilever and the specimen using an AC-mode atomic force microscope (AFM ) and controlling the bias potential of the specimen so that the electrostatic force is mini...
Page 117: Advanced Tab
５ MEASUREMENT OPERATION .4.5 dvanced Tab The Advanced tab window is used to set parameters in detail. All o f the parameters in this window must be specified. ■ Checking before an approach Before performing an approach, check whether the preparation has been completed according to the procedure in Sect.
Page 118 ５ MEASUREMENT OPERATION ■ Setting the advanced mode param eters Below is the procedure for setting parameters for topography observation. Specify each parameter according to the following procedure. button in the Acquisition selection box and select 512 × 512 Click on the from the pull-down menu.
Page 119 ５ MEASUREMENT OPERATION Fback Filter/Hz is the parameter that determines the response speed of the feedback circuit. The larger the specified value, the faster the response speed, thus producing a sharp image, but the feedback circuit easily oscillates. Usually, select the highest speed at which the feedback circu it does not oscillate while watching an image during scanning.
Page 120 ５ MEASUREMENT OPERATION ■ Setting the software oscilloscope Set the software oscilloscope for Channel B as follows: lick on the 2 button of the Oscilloscope Control window. The Oscilloscope Control window will open. Click on the button in the Source selection box in the Channel B frame; then select Force from the pull-down menu.
Page 121 ５ MEASUREMENT OPERATION ■ Cantilever automatic tuning (AC) Specify the frequency and excitation voltage at which to vibrate the cantilever. If you us it un der an ultra-high vacuum, the Q value of the can tilever becomes high; the cantilever amplitude becomes large even with a small excitation voltage.
Page 122 ５ MEASUREMENT OPERATION Click on the FM tab of the Cantilever Tuning window; click on t he Autotune radio button in the Tuning frame. Click on the Scan button in the Tuning frame. Cantilever tuning takes place automatically as in the case of the AC AFC mode. (Sectio n 5.4.1, “Adjusting a cantilever resonance point.”) The above completes automatic cantilever tuning.
Page 123 ５ MEASUREMENT OPERATION Double-click on the Output Amp/V input box; then enter 0.2 using the keyboard. ouble-click on the Frequency/KHz input box; then enter 250 using the eyboard. The reason why you enter 250 is that, if this Frequency/KH z is in the vicinity of the sonance point when you begin the frequency sweep, the effect of the resonance might still remain even though the frequency is set to the sa me value as Start...
Page 124 ５ MEASUREMENT OPERATION To set the excitation frequency of the cantilever Click on the Set button for Frequency/KHz in the Cantilever Tuning window. The VCO Frequency/kHz window will appear. Enter the frequency displayed in Peak Frequency/KHz in the input box in the VCO F requency/kHz window using the keyboard.
Page 125 ５ MEASUREMENT OPERATION nter 10 in the High Pass Filter/KHz i nput box and 600 in the Low Pass ilter/KHz input box. Click on the Normal Scan radio button. Specify Start Frequency/KHz and Stop Frequency/KHz in the Peak Search rame. A span of about 100 kHz centering o n the characteristic frequency of the cantilever is an appropriate range to input.
Page 126 ５ MEASUREMENT OPERATION Enter the cha racteristic frequency of the cantilever in the Locked Center Frequency/KHz input box. If you do not know the characteristic frequency of the cantilever, perform the above operation, “Cantilever characteristic frequency peak search.” If the characteristic frequency is known, the frequency to be input is given by: Locked center frequency = Peak frequency –...
Page 127 ５ MEASUREMENT OPERATION ■ Approac Move the cantilever closer to the specimen until the RMS value becomes the voltage specified in Reference/V. The cantilever movement automatically stops when the RMS value reaches the Reference/V voltage. The following is the procedure used for this approach.
Page 128 ５ MEASUREMENT OPERATION In such a case, check the following points: • Make sure that Loop Gain i s not so low. If Loop Gain is set to a low number, the gain of the feedback circuit is so small that the feedback voltage is not applied up to +150 V.
Page 129 ５ MEASUREMENT OPERATION Setting Reference/V Set the distance between the specimen and the cantilever tip using Reference/V. Normally, while observing an image from a separated position, gradually move the cantilever tip toward the 0 V side (the direction tow ard the specimen), and set it in the optimum position so that the best image can be photographed.
Page 130 ５ MEASUREMENT OPERATION Enter information in the Display Source frame as follows: Click on the Advanced button (in the lower right section) in the Advanced tab window to open the Advance Control window; click on the Display Source tab to open the Display Source window; then enter data in the manner shown below.
Page 131 ５ MEASUREMENT OPERATION uble-click on the Lift Height input box; then enter 100 nm using th keyboard. Press the TAB key to finalize the value. Click on the Repeat button to scan the specimen. The following display will appear. MFM image Topography (Phase image) image...
Page 132 ５ MEASUREMENT OPERATION ■ Observing a VE-AFM image (optional) Viscoelasticity image observation is an optional function that requires a lock-in amplifier supplied to order. Connect the lock-in amplifier to the SPM controller and set the software in accordance with the procedure in Section 5.2.5, “Lock-in amplifier.” Usually, you will observe a viscoelasticity image using the Contact mode.
Page 133 ５ MEASUREMENT OPERATION Click on the Scan tab in the Advanced Control window to open the Scan tab window and check the Add External Z signal checkbox. (Note that in the illustration below, Add External Bias Signal is checked. In this step, however, check the Add External Z signal checkbox.) An oscillating noise might sound depending upon the characteristic frequency of the scanner you use.
Page 134 ５ MEASUREMENT OPERATION Click on Auto Configure in the Lock-In Amplifier window in the case of Model 5110, and on Auto Sensitivity and Auto Phase in the case of Model 7265. Do ing so adjusts the sensitivity and phase of the lock-in amplifier automatically. Increase the input sensitivity of the lock-in amplifier using the SENSITIVITY setting key in the range in which the OLVD LED does not light up (from 1 mV to 100 nV direction).
Page 135 ５ MEASUREMENT OPERATION ■ Surface potential observation (SKPM)(optional) SKPM (Scanning Kelvin Probe Microscopy) is an optional function that requires a lock-in amplifier supplied to order. Connect the lock-in amplifier to the SPM controller and set the software in accordance with the procedure in Section 5.2.5, “Lock-in amplifier.”...
Page 136 ５ MEASUREMENT OPERATION Click on the Advanced button (in the lower right section) in the Advanced tab window to open the Advance Control window. Click o n the Display Source tab to open the Display Source window. Then enter data in the manner shown below.
Page 137 ５ MEASUREMENT OPERATION Clock setting. If that does not help improve the situation, increase Loop Gain. To increase Loop Gain, first click on the Retract On button to retract the cantilever from the sample, then change Gain. After c hanging Reference i n the SKPM tab window to minus, click on Retract Off and c hange Reference in the...
Page 138 ５ MEASUREMENT OPERATION ■ Principle of SKPM op eration Kelvin Force Microscopy (KFM) is designed to observe a surface-potential image of a specimen by detecting the electrostatic force generated between a cantilever and a specimen using an AC-mode atomic force microscope (AFM) and controlling the bias potential of the specimen so that the electrostatic force becomes a minimum.
Page 139 ５ MEASUREMENT OPERATION ■ Lithography When certain values are given to the bias voltage and tunneling current, the specimen surface structure may change due to the displacement or adsorption of atoms. “Lithography” lets you lithograph (or write on) the specimen surface using this phenomenon.
Page 140 ５ MEASUREMENT OPERATION ■ Li ography in Vector Mode The following is the procedure for performing lithography in the vector mode: Click on Lithography in the Advance tab window to open the Lithography window. Observe an image as usual and capture it using the Grab function. Specify the conditions for the sample to be lithographed using the Settings frame in the Lithography window.
Page 141 ５ MEASUREMENT OPERATION ■ Drift compensation ample thermal drift, no matter how small, poses a problem in continu ous measurement at the atomic level under ultra high vacuum, as this is a procedure which requires a highly stable field of view. The Drift Control window is used to correct such drift as occurs in the measurement image due to thermal or, sometimes, other causes.
Page 142 ５ MEASUREMENT OPERATION Like the setting of the first po int, specify the picked-up part (the position may differ from that of the first image due to drift). When you set the second re ference point, the drift speed and direction are automatically computed Check the Enable Correction checkbox by clicking on it.
Page 143: Contact Afm Mode
５ MEASUREMENT OPERATION CONTACT AFM MODE Observation in the contact mode is performed in the area in which repulsive force acts between the specimen and the cantilever tip. 5.5.1 Contact Mode Tab The following is an explanation of the method of observation using the Contact Mode tab window.
Page 144 ５ MEASUREMENT OPERATION ■ Flow chart of the operation • The following is the flow chart of the operation in the contact mode. Check before approaching Adjust photodiode ⇒ Adjusting PD positi Setting scanning parameters ⇒ Starting app Approaching roach Image observation ⇒...
Page 145 Rotate the photodiode position adjustment knob until the red spot enters the lue zone at the center. Confirm that the SUM value of the AFM amplifier unit is as negative as possible. Y-axis + X-axis + X-axis adjusting knob Y-axis adjusting knob The figure above shows the model JSPM-5200. 5-82 TMPM5200-2...
Page 146 ５ MEASUREMENT OPERATION ■ Setting the scanni ng parameters Before carrying out an approach operation, set the scanning parameters including the scanning area in the Contact Mode tab window. Although the values of these parameters differ depending upon the specimen and the purpose of use, rough values are as follows. Scan Size Click on the Scan Size selection box.
Page 147 ５ MEASUREMENT OPERATION Loop Gain Click on the button in the Loop Gain selection box and select 8 from the pull-down menu. The setting determines the gain of the feedback circuit. The larger the set value is, the higher the response gain becomes, thus obtaining a good image from an uneven specimen surface, but the feedback circuit easily oscillates.
Page 148 ５ MEASUREMENT OPERATION ■ Approaching Click on the Approach On button. Automatically, approaching starts. When approaching finishes, the Approach window saying “Auto Approach Stoppe d” is displayed in the center of the screen. Click on the Close button. Considerations in using Approach When the Approach On button is displayed in gray ck on the Retract Off button.
Page 149 ５ MEASUREMENT OPERATION ■ FFM observation n the ordinary contact-mode AFM, the specimen-sca nning direction is parallel to the canti lever axis as shown in the left figure below. In the case of FFM (Friction Fo icroscope), on the other hand, the specimen-scanning d irection is orthogonal to the canti lever axis as shown in the right figure below.
Page 150 ５ MEASUREMENT OPERATION ■ Force Curve Measuremen A force curve is used to measure the force that acts betw een the specimen and the cantilever tip, by ben ding of the cantilever that occurs when changing the distance between the specimen and the cantilever tip in t he contact mode.
Page 151 ５ MEASUREMENT OPERATION Acquired results To grab the measured Force Curve, click on the Grab button during the measurement. To change the display style of the Force Curve, select Display–Plot Parameters from the main menu after grabbing the Force Curve. If the Force Curve goes out of the linear region and becomes saturated in the repulsive force domain, as shown below, it means that the measurement has been attempted...
Page 152 ５ MEASUREMENT OPERATION ■ Acquir ing an image • A uto Grab in the Contact Mode window is selected ry time measurement finishes, images are automatically grabbed and stored. • Auto Grab in the Contact Mode window is not selected To acquire an image, click on the Grab button while it is being scanned.
Page 153 Separate the specimen and the tip fully turning the manual approach screw to move the specimen stage down. ip holder Cantilever holder Manual approa ch s crew Stage moves upward Stage moves downward The figure above shows the model JSPM-5200. 5-90 TMPM5200-2...
Page 154: Viscoelasticity Tab
５ MEASUREMENT OPERATION 5.5.2 Viscoelasticity Ta You can perform viscoelasticity measurement by additionally installing the opti onal Lock -in Amplifier. When the lock-in amplifi er is connected to the SPM controller, you have to set the device using the software to display the tab window for viscoelasticity measurement.
Page 155 ５ MEASUREMENT OPERATION Select Connect to connect the lock -in amplifier. It will take about one second until the amplifier starts up due to the initializa- tion of parameters. If errors should happen, check the power supply, connec- tions and settings of cables. Specify the parameters according to the following table.
Page 156 ５ MEASUREMENT OPERATION It will take about one second until the Amplifier starts up due to the initializa- tion of parameters. If errors should happen, confirm connections and settings of cables. Spec ify the parameters according to the following table. Sensitivity 1 mV OSC Frequency...
Page 157 ５ MEASUREMENT OPERATION ■ Observ ation of an image To s tart scans, click on t he Sca n butto n in the Contact e tab w indow. The following images will be obtained. Acos φ Topography (Elasticity (Topography image) image) Asin φ...
Page 158: Lateral Modulation Ffm Tab
Specim n Conductive paste Specimen stub figure above shows the specimen holder for JSPM-5200. ■ Checking before approaching Affix the specimen, adjust the laser and the photodiode, and then perform the coarse approaching as you perform in AC AFM measurement.
Page 159 ５ MEASUREMENT OPERATION Select Connect to connect t he lock-in amplifier. It will take about one second until the amplifier starts up due to the initializa- tion of parameters. If errors should happen, check the power supply, connec- tions and settings of cables. Specify the parameters according to the following table.
Page 160 ５ MEASUREMENT OPERATION Specify the parameters according to the following table. Sensitivity 1 mV OSC Frequency 20.000 Time Constant 1 ms OSC Level 0.020 Ref. Phase 0.000 Output ACosT, ASinT Click on the Advanced button. The Lock-In-Amplifier 1 Advanced window opens. Spec ify the parameters ac cording to the following table.
Page 161 ５ MEASUREMENT OPERATION ■ Observation of an image To start scans, click on the Scan button of the SPM Parameters window. The following images will be obtained. Acos φ Topography (Topography image) Asin φ (Friction image) Sometimes an oscillating sound is made depending upon the characteristic frequency of the scanner t hat you use.
Page 162: Electrostatic Force Tab
５ MEASUREMENT OPERATION 5.5.4 Electrostatic Forc e Tab You can perform electrostatic force measurement (capacitance measurement SCFM) by additionally installing the optional Model 7265 Lock-in Ampl ifier (Model 5110 is not available). When the lock-in amplifier is connected to the SPM controller, you have to set the instrument using the software to display the tab window for electrostatic force measurement.
Page 163 ５ MEASUREMENT OPERATION ■ Setting the Lock-in Amplifier When u sing Model 7265 Click on the Lock In button. The Lock-In Amplifier dialog box opens. elect Connect to connect the lock-in amplifier. It will take several seconds until the amplifier starts up due to the initialization of parameters.
Page 164 ５ MEASUREMENT OPERATION ■ Obser vation of an image o start scans, click on the Scan button of t he SPM Parameters window. The following images will be obtained. Acos φ Topography (Capacitance (Topography image) image) Specify the SPM parameters for usual operation so that yo u can obtain an ptimum topography image.
Page 165: Advanced Tab
５ MEASUREMENT OPERATION 5.5.5 Adva nced Tab The Advanced tab window is used for setting details for contact AFM mode. You can set details and you have to fill in all parameters in the tab window. Advanced tab window ■ Checking b efore approaching Befo re performing approaching, confirm whether the prepa...
Page 166 ５ MEASUREMENT OPERATION Click on the button in the Mode selection box and select Normal from the ull-down menu. You can select measurement modes that are av ailable in the contact AFM such as viscoelasticity, lateral modulation FFM and electrostatic force measurements. The types of measurement modes differ depending on the optional devices that are connected.
Page 167 ５ MEASUREMENT OPERATION Click on the Reference/V input box to highlight the numerical value; then enter 0 using the keyboard and finalize it by pre ssing the Tab key. Reference/V is the parameter that sets the force between the specimen and the tip of the cantilever.
Page 168 ５ MEASUREMENT OPERATION The “□” or “ ” checking box is a toggle switch, and every time you click on it, it changes alternately between “□” and “ ”. The “ ” checking box means that it is selected. ■ Setting Software Oscilloscope Set Channel B following the procedure below Click on the “...
Page 169 ５ MEASUREMENT OPERATION Click on the button in the Source selection box in the Channel B frame; then select Force from the pull-down menu. Click on the button in the Sensitivity selection box in the Channel B frame; then select 5 from the pull-down menu. ou can monitor the Force (A–B) signal.
Page 170 ５ MEASUREMENT OPERATION If the voltage applied to the Z scanner do es not reach the maximum voltage, it is judged that the approaching has already been completed. So, approaching will not start even if you click on the Approach On button on the Tip window. In such a case, check the following points.
Page 171 ５ MEASUREMENT OPERATION The motor for approaching starts to rotate and automatically stops when the AFM value becomes the same as the value given in Reference/V. When approaching has completed, the indicator on the AFM AM P unit suddenly changes from the value during approaching (–2.0 V) to the Referenc V value (0 V).
Page 172 ５ MEASUREMENT OPERATION ■ Topography Image Observation When approaching has completed, carry out scanning. Click on the Repeat button on the Advanced tab window. Scanning will start and an image will appear in the Display Window. In the Contact mode, it is important to set the repulsive force th at acts between the specimen and the cantilever tip.
Page 173 ５ MEASUREMENT OPERATION Click on the SPS button in the main menu. The SPS Parameters window will be displayed. Click on the FC tab. ouble-click on the Tip Displacement/nm input box on the FC window and enter the maximum value of the scanner Z scanning range using the key- board.
Page 174 ５ MEASUREMENT OPERATION Meas urement result • To grab the measured Force Curve, c lick on the Grab button during the measurement. • To change the display style of the Force Curve, change it using the Plot Parameters item of the Display menu after grabbing the Force Curve.
Page 175 ５ MEASUREMENT OPERATION Measuring Force Curve at Specified Position The Force Curve measurement explained in “Measuring Method” is carried out at the top-left corner of the image. Max Scan Size Force Curve measur ement position Scan Size Max Scan Size When Offset is X 0 Scan Size In practice, however, the Force Curve measurement is often carried out at a certain...
Page 176 ５ MEASUREMENT OPERATION The Tip window will close and the Tip position window will open. Move the cursor to the Display Window; then, the cursor changes to a hand mark. Cantilever position Mouse cursor Move the cursor to the cantilever position (+); then, drag it, while holding own the left mouse button, to the point where you want to measur e the Force Curve.
Page 177 ５ MEASUREMENT OPERATION ■ FFM Observation In the ordinary contact mode, the scanning direction is parallel to the cantilever axis. In the FFM image observation, on the other hand, the scanning direction is orthogonal to the cantilever axis. The cantilev er is twisted during scanning due to the friction force acting between the specimen surface and the cantilever tip.
Page 178 ５ MEASUREMENT OPERATION Specify 1 for the TOPO and F-force Gain boxes and then check the Autoset check box (“ ”). Click on the Repeat button on the Advanced tab window. Scanning starts and images are displayed on the Display Window as shown below. Topography FFM image image...
Page 179 Preparati on for Current Image Observation • Af fixing a cantilever for JSPM-5200/JSPM-5700 Use a conductive cantilever such as a Si cantilever or a cantilever with bot h sides coated with gold. Affix the cantilever on a non-contact cantilever holder. Make sure that good condu ctivity is kept between the cantilever and the cantilever holder.
Page 180 If possible, apply the conductive paste not only to the surface but to the side of the specimen as well. Specimen Conductive paste Specimen stub figure above shows the specimen for the JSPM-5200. • Selecting a cantilever If there are two cantilevers, long an d short, as shown in the figure below and you want to use the short cantilever for image observation, be sure to remove the long one using a pair of tweezers.
Page 181 ５ MEASUREMENT OPERATION Obse rving a contact current image • The current measured in the contact mo de is larger than that in the STM observation (for a conductive specimen). If the bar graph displayed in the Status window exceeds the maximum on the scale, reduce the set value of Preamp Gain in the Advanced Control window.
Page 182 ５ MEASUREMENT OPERATION ■ I-V Mea surement Using Conductive Cantilever I-V measurement on the surface of a specimen is as commonly used as the observation of a current image. Precautions in using cantilever Use the same type conductive cantilever as for the current image observation in the I-V measurement.
Page 183 ５ MEASUREMENT OPERATION The present cantilever position is indicated by the “+” mark. Usually, the initial position is the top-left corner of the frame. Cantilever position Cursor Topography Red line image Current Green line image The cursor is in effect only inside of the active window in which the image is surrounded by a green line.
Page 184 ５ MEASUREMENT OPERATION Click on the IV tab. Specify the param eters for I-V measurement according to the following procedure. Specify the vo ltage at which to measure I-V. • Here, assume that the I-V measurement range is to be from –1.0 V to +1.0 V.
Page 185 ５ MEASUREMENT OPERATION Click on the button in the Number of Points selection box, and then select 128 from the pull-down menu. This specifies the number of points for I-V measurement. The possible number is up to 2048 points. Click on the button in the SPS ode selection box and select I—V from the pull-down menu.
Page 186 ５ MEASUREMENT OPERATION ■ Observation of viscoelasticity image (optional measurement) You can perform viscoelasticit y measure t by a dditionally installing the optional Extended Lock-in Amplifier. When the lock-in amplifier is connected to the SPM controller, you have to set the instrument using the software to display the tab window for viscoelasticity measurement.
Page 187 ５ MEASUREMENT OPERATION Click on the Advanced button in th e Advanced tab window. Select Display Source tab in the Advanced Control window that appears. Set parameters as follows. Select the Scan tab in the Advanced Control window, and then check the Add External Z Signal check box.
Page 188 ５ MEASUREMENT OPERATION Set automatic adjustm ent for sensitivity and phase in the Lock-in-Amplifier window. Click on Auto Configure when Model 5110 is used. Click on both Auto Sensitivity and Auto Phase when Model 7265 is used. The Lock-in-Amplifi er will adjust the phase and gain automatically.
Page 189 ５ MEASUREMENT OPERATION ■ Observation of Later al Modulation FFM Image (optional measurement) You can perform lateral modulation FFM measurement by additionally installing the optional Extended Lock-in Amplifier. When the lock-in amplifier is connected to the SPM controller, you have to set the instrument using the software to display the tab window for lateral modulation FFM measurement.
Page 190 ５ MEASUREMENT OPERATION Click on the A dvanced button in the Advanced tab window. Select Display Source tab in the Advanced Control window that appears. Set parameters as follows. Select the Scan tab in the Advanced Control window, and then check the Add External Y Signal check box.
Page 191 ５ MEASUREMENT OPERATION Click on Auto Configu re in the Lock-in-Amplifier window. The Lock-in-Amplifier will adjust the phase and gain automati cally. Increase the input sensitivity of the lock-in amplifier (from 1 mV to 100 nV direction) using the Sensitivity setting key (▼) in the range in which the signa ls from the lock-in amp lifier do not saturate.
Page 192 ５ MEASUREMENT OPERATION ■ Drawing u sing the lithography function When ce rtain values are given to the bias voltage and tunneling current, the specimen surface structure may change due to displacement, adsorption of atoms or anode dization. Lithography has the function to lithograph (write on) the specimen surface by using this phenomenon.
Page 193 ５ MEASUREMENT OPERATION Lithography in Vector mode he following is the procedure for perform ing lithography in the Vector mode. lick on the Lithography button in the Advanced tab window. The Lithography window opens. Observe an image as usual and grab it. Specify the lithography conditions in the “Settings”...
Page 194 ５ MEASUREMENT OPERATION ■ Drift Compens ation Sample thermal drift, no matter how small, poses a problem in con tinuous measurement at th e atomic level under ultra high vacuum, as this is a procedure which requires a high ly stable field of view. The Drift Control window is used to correct such drift a occurs in the measurement imag e due to thermal or, sometimes, other causes.
Page 195: Stm Mode
５ MEASUREMENT OPERATION STM MODE The SPM head unit with a tip holder is used for observation in the STM (Scanning unneling Microscope) mode. 5.6.1 TM Tab The STM tab window is a basic operation window for observing a topography measurement in the STM mode.
Page 196 ５ MEASUREMENT OPERATION ■ Flow chart of the operation The following is the flow chart of the operation in the STM mode. Check before approaching Approaching Starting approach Starting measurement Image observation • Setting filter and loop gain • Setting bias voltage and Grabbing image Grabbing tunneling current...
Page 197 ５ MEASUREMENT OPERATION This is the pa rameter that determines the scan speed. Naturally, this parameter should be changed according to the observation area and the unevenness of the specimen. Bias Click on the Bias/V box and when the numerical value is highlighted, enter 1 using the keyboard;...
Page 198 ５ MEASUREMENT OPERATION Sour ce (Selection of the acquired image type) • W hen you observe a topo graphy image This image is the constant current mode for observing the topography of a specimen while keeping the current constant. Select the STM radio button at the left bottom of the STM tab window. Click on the button in the Source 1 selection box and select Topography.
Page 199 ５ MEASUREMENT OPERATION ■ Approaching Click on the Approach On button in the STM tab window. Automatically, approaching starts. When approaching finishes, the Approach window asking “Auto Approach Stopped” is displayed in the center of the screen. Click on the Close button. Considerations in using Approaching •...
Page 200 ５ MEASUREMENT OPERATION ■ I-V measurement The following is the procedure for measuring the I-V characteristic of the specimen surface. Observe a current image and grab it. Select the I-V Curve radio button at the left bottom of the STM tab window. Click on the I-V button.
Page 201 ５ MEASUREMENT OPERATION Move the cursor to the tip position; then press and hold down the left mouse button and drag it to the point where an I-V measurement is to be performed. Measurement position Be careful not to drag the mouse cursor very fast because the cantilever is actually moving in real time.
Page 202 ５ MEASUREMENT OPERATION ■ CITS image observation A CITS (Current Imaging Tunneling Spectroscopy) image is a tunneling-current image produced w hen applying an optionally designated bias voltage while keeping the distance betw een the tip and the specimen surface (determined by the topographic-image observation conditions such as tunneling current and bias voltage) constant.
Page 203 ５ MEASUREMENT OPERATION Click on the I-V button. The I-V Parameters window opens. Specify the I-V measurement parameters. Specify the voltage range to perform the I-V measurement according to the follow ing procedure. Here, as an example, we will explain how to set the I-V measurement range to –1.0 V to +1.0 V.
Page 204 ５ MEASUREMENT OPERATION ■ Cautions in observing image In the STM mode, the settings of bias voltage and current are important points. Unless the settings are carried out correctly, not only will it be impossible to obtain a satisfactory image, but also you may damage the specimen or the cantilever tip. Control the distance between the specimen and the tip by adjusting Bias/V and Current/nA.
Page 205 Stop button to stop the movement. Turn the manual approach screw to move the specimen stage down. SPM head unit Groove Tip holder Cantilever holder Manual approach screw Stage moves upward Stage moves downward The figure above shows the JSPM-5200. 5-142 TMPM5200-2...
Page 206: Advanced Tab
５ MEASUREMENT OPERATION 5.6.2 Adva nced Tab The Adva nced tab window is used for the advanced operation mode in the STM mode. It is possible to specify parameters in detail on the Advanced t ab window, but you have to specify every parameter.
Page 207 ５ MEASUREMENT OPERATION ■ Setting scanning parameter Specify each parameter in the Advanced tab window according to the following procedure. button in the Acquisition selection box and select 512 × 512 Click on the from the pull-down menu. Click on the button in the Clock/ms selection box and select 100.00 us from the pull-down menu.
Page 208 ５ MEASUREMENT OPERATION Click on t button in the Fback Filter/Hz selection box and select 0.5 from the pull-down menu. Fback Filter/Hz is the parameter that determines the response speed of the feedback circuit. The larger the specified value is, the faster the response speed becomes, thus producing a sharp image, but the feedback circuit easily oscillates.
Page 209 ５ MEASUREMENT OPERATION Click on the Display Source tab, and then check the TOPO—Autoset box. The “□” or “ ” checking bo x is a toggle switch, and every time you click on it, it changes alternately between “□” and “ ”. The “...
Page 210 ５ MEASUREMENT OPERATION Click on the button in the Sensitivity selection box in the Channel B rame; then select 5 from the pull-down menu. You can monitor the Log I signal. ■ Approachi e the cantilever closer to the specimen until the value of the tunneling current ecomes the value specified in Current/nA.
Page 211 ５ MEASUREMENT OPERATION • Make sure that Loop Gain is not so low. If Loop Gain is set to a low number, the gain of the feedback circuit is so small that the feedback voltage is not applied up to the maximum voltage. •...
Page 212 ５ MEASUREMENT OPERATION ■ Current image observatio The operation procedures for image observation in the STM mode that have been explained so far in this section are for the constant-current STM mode used to observe the topography of a specimen while keeping the tunneling current constant. In this mode it is also possible to observe a current image by obtaining the change of the current as an image while keeping the tip height constant.
Page 213 ５ MEASUREMENT OPERATION ■ I-V meas urement I-V measurement on the surface of a specimen is as commonly used as obse rvation of a current image. The fo llowing is the procedu re for I-V measurement. Obse rve a current image and grab it. Both a topography image and a current im age are usually acquired to determine a...
Page 214 ５ MEASUREMENT OPERATION The cursor is in effect only inside o f the active window in which the image is surrounded by a green line. The image surrounded by a red line is not active now. If you acquire the current image according to “Current Image Observation”, the image will be grabbed later and becomes an active window.
Page 215 ５ MEASUREMENT OPERATION Click on the button in the Source selection box on the SPS Parameters window, and then select Linear current from the pull-down menu. Click on the button in the Preamp Gain selection box on the SPS Parameters window, and then select 1.00 V/nA from the pull- down menu.
Page 216 ５ MEASUREMENT OPERATION When measurement result is saturated If the I-V measurement data is saturated as shown in the figure below, decrease the gain specified for Preamp Gain on the SPS Parameters window. Decrease the value in Preamp Gain of the SPS Parameters window. If no stable data is obtained at the same measu rement point or unreasonable data is obtained, the cantilever might be irregularly bent due to an electrostatic force during the measurement.
Page 217 ５ MEASUREMENT OPERATION ■ CITS image observation A CITS (Current Imaging Tunneling Spectroscopy) image is a tunneling-current image produced when applying an optionally designated bias voltage while keeping the distance between the tip and the specimen surface (determined by the topographic-image observation conditions such as tunneling current and bias voltage) constant.
Page 218 ５ MEASUREMENT OPERATION Specify the voltage at which to measure I-V. • He re, assume that the I-V measurement range is to be from –1.0 V to +1.0 V. • So , Enter –1.000 in Low Voltage/V and 1.000 in the High Voltage/V input box ing the keyboard.
Page 219 ５ MEASUREMENT OPERATION ■ Drawin g using the lithography function n certain values are given to the bias voltage and tunneling current, the specimen surfa ce structure may cha nge due to displacement, adsorption of atoms or anode oxidization. Lithography has the function to lithograph (write on) the specimen surface by using this phenomenon.
Page 220 ５ MEASUREMENT OPERATION Lithography in Vector mode The following is the procedure for performing lithography in the Vector mode. Click on the Lithography button in the Advanced tab window. The Lithography window opens. bserve an image as usual and grab it. Specify the lithography conditions in the Settings frame.
Page 221 ５ MEASUREMENT OPERATION ■ Drift Compensation Sample thermal drift, no matter how small, poses a problem in continuous measurement at the atomic level under ultra high vacuum, as this is a procedure which requires a highly stable field of view. The Drift Control window is used to correct such drift as occurs in the measurement image due to therm al or, sometimes, other causes.
Page 222: General Precautions For Image Acquisition
５ MEASUREMENT OPERATION NERAL PRECAUTIONS FOR IMAGE ACQUISITION Explained in this section are the scanning method for image acquisition and other notes. ■ Retractin g Tip When you turn Tip Retract on, the Z-direction length of the scanner is forced to shrink. Refer to the figure below.
Page 223 ５ MEASUREMENT OPERATION The tip position is readjusted. —— CAUTION ——————— If you move the motor drive greatly, the tip gets too close to the specimen surface or gets too far from the specim Click on the Tip Retract button in the Tip window to deselect it. Confirm using the oscilloscope that Z/20 is close to 0.
Page 224 ５ MEASUREMENT OPERATION Shift the observ ation field using the X and Y sliders or directly drag the field. The relationship between the actual observation field and the maximum observation field is shown belo Actual observation field Maximum observation field Shift the observation field very slowly.
Page 225 ５ MEASUREMENT OPERATION ■ Grabbing data in computer me mory The image that is being scanned and the I-V data are cleared when next scan starts . The following is the procedure for grabbing the data in the c omputer memory. The grabbed data will be written in the RAM and also temporarily stored in the folde r specified by the SPM software (a tmp folder that is in the folder that has the...
Page 226 ５ MEASUREMENT OPERATION ■ Precaution for Autoset If Autoset is selected in the Display Source tab of the Advanced Control window, the offset is measured before an image is acquired. The offset of the Z-axis voltage is measured in the initial position as shown in the figure below, and an offset is automatically set so that this value beco mes zero.
Page 227 ５ MEASUREMENT OPERATION Enter the specimen name and observation conditions in the Info box in the Parameters window using the keyboard. After checking the parameters, click on the OK button. You can freely enter any comment such as measuremen t conditions, which will be very convenient for later use.
Page 228: Terminating Measurement
５ MEASUREMENT OPERATION TERM INATING MEASUREMENT Explained in this section is the procedure for terminating measurement after a series of operations has been completed. Stop scanning by clicking on the Abort button in the Scan frame of the SPM Parameters window. Open the Tip window by clicking on the Probe button in the SPM Parameters window.
Page 229: Terminating Operation
５ MEASUREMENT OPERATION TERMINATING OPERATION After saving the desired data on a disk upon completing image observation, you terminate the system. The following is the ter mination procedure. Select File from the main menu and select Exit from the pull-down menu. Confirm that all necessar y data has been saved on a disk, and click on the...
Page 230: Reference
５ MEASUREMENT OPERATION 5.10 REFERENCE 5.10.1 SPM Scan Menu The SPM Scan menu is the key menu for measurements and operations. It contains the following items: ■ Scan… Ctrl+S This is the most important item for starting measurements and operations. It will be explained later in more detail.
Page 231: Device Setup
５ MEASUREMENT OPERATION ■ CCD Camera System Ctrl+ This displays the CCD camera window that shows images from the CCD camera. For details, refer to Sect.5.10.6 “CCD Camera.” ■ Device Setup This selects the SPM device, and sets the optional devices that are connected to and controlled by the SPM device.
Page 232 ５ MEASUREMENT OPERATION ■ Cantile ver Calibration Selec ting Cantilever Calibration from the SPM Scan menu opens the Cantilever Calib ration window, in which you can specify the cantilever calibration values for calcu lating interatomic force and friction force that are obtained from bending and torsi on of the cantilever, respectively.
Page 233 ５ MEASUREMENT OPERATION Friction Force Calib ration Perform cantilever calibration for calculating friction force from th e torsion of the antilever. friction force is calculated based on the following equatio − × • Ap When the Apply check box is checked, the friction-force image appears with a friction-force value calculated from the applied voltage.
Page 234 ５ MEASUREMENT OPERATION When the following result is o btained, calculate the calibration value from this graph: FFM (V) ＋10 ｖ１ｘ２ − ｘ１ V − ｖ２－10 The shifts per evolution of the photodiode position-adjustment knob are as follows: X-axis shift (ｍｍ) Ｙ-axis shift (ｍｍ)
Page 235 ５ MEASUREMENT OPERATION ■ Scanner Cali bration A tube-shaped piezoelectric scanner is used in ultra-high vacuum SPM. Generally, the piezoelectric element of such a type shows a nonlinear dependence on displacement against voltage in scanning as shown below Displacement Voltage In the SPM controller, the distortio n-compensation unit is installed so that nonlinear displacement can be removed.
Page 236 ５ MEASUREMENT OPERATION ■ Pre-scan Setting Selec ting Pre-scan Setting from the SPM Scan menu opens the Pre-Scan Setting window, in w hich you can specify parameters for pre-scan measurement. The pre-scan will be perfo rmed when you have checked the Enable Pre-Scan check box in the SPM Param eters window.
Page 237 ５ MEASUREMENT OPERATION ■ Cantilever Autotune Setup This displays the Cantilever Autotune Setup dialog in which you carry out the basic settings for the automatic adjustment of the cantilever resonance point in the AC and AFM measurement modes. AC Mode Setting When you select AC under the AFM Mode on the upper right of the dialog, AFM Mode changes to AC mode.
Page 238 ５ MEASUREMENT OPERATION • Fre quency Shift Direction In the adjustment operations mentioned above, set the shift direction whether you shift the frequency to the lower frequency or higher frequency from the resonance frequency. The nature of the force that the cantilever receives cha nges depending on the frequency shift direction (repulsive force or attractive force).
Page 239 ５ MEASUREMENT OPERATION Stand ard Settings software returns the present setting values to the standard settings. • St andard settings for AC mode Oscillation voltage 0.01V Oscillation Amplitude Frequency shift direction Lower frequency Start frequency 1 kHz Stop frequency 1000 kHz (1 MHz) •...
Page 240: Spm Parameters (Simple)
５ MEASUREMENT OPERATION 5.10.2 SPM Param eters (Simple) ■ Scan Scan Size Specify the scanning area in this selection box. Two methods are provided: Click on the button in the selection box and select a scanning area from the pull-down menu showing some scanning areas. Enter a value in the selection box using the keyboard.
Page 241 ５ MEASUREMENT OPERATION Scan Area The WinSPM software defines the center position of the total scan area of the scanner as the image-offset coordinate (0, 0). It also defines the scan angle in the range of ±180 degrees by setting 0 degrees as the origin.
Page 242 ５ MEASUREMENT OPERATION Maximum scanning area Y offset Current scanning area X offset The scanner shifts in real-time with the positional change of the scroll-bar, so shift it slowly. Setting the Scan Rotati on Angle Spec ify the scan-rotation angle by moving the scroll-bar at the Scan Angle or by inputting the rotation angle in the text box.
Page 243 ５ MEASUREMENT OPERATION The new scanning area appears in the Size and Offset boxes. You cannot carry out this operation during scanning. Stop scanning by clicking on the Abort button; then specify a new scanning area. Drag can shift the center point of the scanning area in the image to measure. This opera tion is convenient when you wish to shift the field of view by a very small amount durin...
Page 244 ５ MEASUREMENT OPERATION ■ Referen Set a target value (reference value) for the reference signal that is used in the feedback. The feedback circuit of the SPM controller operates around the set value for the refer ence signal, which differs depending on the measurement mode. At AC AFM mode •...
Page 245 ５ MEASUREMENT OPERATION • Electrostatic force measurement tab window In the electrostatic force measurement (EFM/SCFM), both reference and offset-bias voltage settings appear because offset-bias voltage control is required. You can specify the offset-bias voltage up to ± 10 V. STM mode The reference signal is a Log Cu rrent signal.
Page 246 ５ MEASUREMENT OPERATION ■ Filter/L oop Gain Set a filter and gain amplifier for the feedback signal Fback Fil ters/Hz Specify t he cutoff frequency of the feedback loop in this selection box. You can select from 16 f requencies between 0.01 Hz and 5 Hz. Response of the feedback loop becomes slower w hen a smaller frequency is selected, and vice versa.
Page 247 ５ MEASUREMENT OPERATION ■ Display Source You select source signals and set their characteristic measurement conditions. Since these settings include the characteristic measurement conditions, the contents differ according to the tab window. AC − AFM tab window • So urce 1, 2 Select the signal sources for images.
Page 248 ５ MEASUREMENT OPERATION not check it (forwar d scan) to the other display source, then you can obtain the forward scan image and the backward scan image at the same time. • So urce Gain Set the source-signal gain for the TOP O signal (shape signal) using it as a meas- urement signal.
Page 249 ５ MEASUREMENT OPERATION • FFM When you perform viscoelasticity-image measurement, select this radio button. Set Topography for source signal 1, Friction Force for source signal 2, and the scan rotation angle to 90 degrees. Other measurement settings follow the current settings. •...
Page 250 ５ MEASUREMENT OPERATION • Source Gain The same as that in the AC-AFM tab window. • STM When you perform normal measurement, sel ect this radio button. Measurement settings follow the current settings. • CI When you perform CITS (Current Imaging Tunneling Spectroscopy) measurement, select this radio button.
Page 251 ５ MEASUREMENT OPERATION • I-V setting button This button opens the I-V Curve setting dialog that sets the bias-voltage change-width and number of accumul ons when you perform I-V Curve meas- urement. Th is button is operable only when you select the I-V Curve radio button or the CITS radio button.
Page 252 ５ MEASUREMENT OPERATION • Source Ga The same as that in the AC-AFM tab window. • Lift setting button This button opens the setting dialog that sets the amount of the Z scanner control at lift up and the cantilever-oscillation voltage at lift up. •...
Page 253 ５ MEASUREMENT OPERATION Surface Potential m easurement (KFM) tab window • Source signal Since the source signal of the Surface Potential measurement tab window is set for measuring surface potential, you need not set it. The measurement pixels are fixed at 256 ×...
Page 254 ５ MEASUREMENT OPERATION • CPD Polarity Reverse If you check this check box, the CPD signal from the AFM amplifier is output, reversing its polarity. Change the polarity depending on the situation that the bias voltage applies to the tip or specimen. •...
Page 255 ５ MEASUREMENT OPERATION Viscoelasticity measurement tab window • So urce signal Since the source signal of the Viscoelasticity measurement tab window is set for measuring viscoelasticity, you need not set it. The measurement pixels are fixed at 256 × 256. When measurement starts, the images appear as follows: Acos φ...
Page 256 ５ MEASUREMENT OPERATION Later al-Modulation FFM mea surement tab windows • Source signal Since the source signal of the Lateral-Modulation FFM measurement tab window is set for measuring lateral-modulation FFM, you need not set it. The measurement pixels are fixed at 256 × 256. When measurement starts, the images appear as follows: Topog raphy...
Page 257 ５ MEASUREMENT OPERATION Electrostatic Force measurement tab window • Source signal Since the source signal of the Electrostatic Force measurement tab window is set for measuring electrostatic force, you need not set it. The measurement pixels are f ixed at 256 × 256. When measurement starts, the images appear as follows: Topography Electrostatic (Topo Image)
Page 258 ５ MEASUREMENT OPERATION ■ Z Stage control This controls the Z stage axis. Use this if you need to adjust the Z stage-axis position manually when retracting the tip at the end of measuremen This operation, contrary to the approach movement, does not stop the stage automatically even when the tip approaches the specimen.
Page 259: Operation Buttons
５ MEASUREMENT OPERATION ■ Operation buttons These are operation buttons concerning SPM measurement. They change depending on the SPM mode or instrument model. n/Abort Click on this button when you start measurement. When measurement starts, the indication on the button changes to Abort. When you click on the button again un der this condition, measurement stops.
Page 260 ５ MEASUREMENT OPERATION Adjust PD (used other than STM mode) Clicking on the Adjust PD button displays the position of the photodiode (PD) position indicator used in the PD position adjustment when you carry out the axis adjustment of the cantilever. Fig.
Page 261 ５ MEASUREMENT OPERATION • OS C Frequency/kHz Enter an oscillation frequency. The settable frequency range is 1 to 1000 kHz. The oscill ation waveform is a sine wave. • C Output Amp/V Enter a voltage to apply to the piezoelectric oscillator. The settable voltage range changes according to the OSC High Output setting.
Page 262 ５ MEASUREMENT OPERATION • When AFM mode is FM This opens the Cantilever (FMD) dialog. The fre quency detection in the FM mode is performed by means of th e frequ ency detecti on circuit using the Phase Locked Loop (PLL) in the AFM AMP. Set here the parameters for this frequency detection: •...
Page 263 ５ MEASUREMENT OPERATION • Output Amp Enter the voltage amplitude for the oscillation signal to the cantilever. The oscilla- tion voltage in the FM mode becomes very small compared with that in the AC mode. • High Amplitud This is the same as the High Amplitude in the Cantilever (AC) dialog. •...
Page 264 ５ MEASUREMENT OPERATION Approa ch On This starts the approach action. The approach is performed based on the parameters (reference, filter and loop gain) set on the current dialog. For detailed approach action, refer to Section 5.10.3 “■ Tip.” Exit Clicking this button closes the SPM Parameter window.
Page 265: Spm Parameters (Advanced)
５ MEASUREMENT OPERATION 0.3 SP M Parameters (Advanced) n this section, the Advanced Control window that appears when you select the General Advanced Control measu rement mode is explained as an example. There are functions at so me Advanced Control tab windows a ppear in gray or do not appears e xcept in the eneral Advanced Control measurement mode.
Page 266 ５ MEASUREMENT OPERATION Clock/ms Specify scanning speed in this selection box selecting the time per pixel. You can set speed from 5 µ s/point to 200 s/point. Usually you can select a clock from only some of clocks. You can change scan spe ed during scanning.
Page 267 ５ MEASUREMENT OPERATION ① ② ③ ④ ⑤ ⑥ ⑦ ⑧ ⑨ ⑩ ⑪ ⑫ ⑬ ⑭ ⑮ ⑯ After sixteen images are displayed in the Display Window, the displayed images are updated with subsequent scanning in the order of ① → ② → ③…⑮ → ⑯ → ① → ② →...
Page 268 ５ MEASUREMENT OPERATION Display Display Source Source When the images are grabbed using this mode, they are separately grabbed as different images. • 2 Inputs The function of this 2 Inputs is the same as that of 2 Inputs (512), except for having 256 ×...
Page 269 ５ MEASUREMENT OPERATION • Si ngle SPS can perform various kinds of SPS (Scanning Probe Spectroscopy) measu rement. Specify the kind of SPS measurement to perform and the parameters for the meas- urement using the SPM Parameters window. • S PS Mapping You can perform SPS M apping measurement.
Page 270 ５ MEASUREMENT OPERATION Mode You can use the following modes when optional attachments are installed to perform Viscoelasticity measurement (VE-AFM), L ater al-Modulation measurement (LM-FFM), Surfa ce Potential measurement (KFM) and Magnetic Force measurement (MFM; P-Lift, L-Lift). However, you need the optional Viscoelasticity Lateral-Modulation FFM attachment (Lock-in Amplifier) for using VE-AFM, LM-FFM and KFM.
Page 271 ５ MEASUREMENT OPERATION Zoom The area that you specify in the displayed image will be scann ed as a new scanning area. This operation can change the scan size and scan area at the same time. Click on the Zoom button; then move the cursor to the Display Window. e cursor will change to the + mark.
Page 272 ５ MEASUREMENT OPERATION Scan Area WinSPM software defines the center position of the total scan area of the scanner as the image-offset coordinate (0, 0). It also defines the scan angle with ±180 degrees by setting 0 degrees as the origin. Here you specify the ima ge-offset coordinate and the scan-rotation angle, and display the current state of the image offset and the scan-rotation angle.
Page 273 ５ MEASUREMENT OPERATION • Using the scroll bar Move the current scanning area by using the scroll bar. This method is useful for a tiny scannin g area such as for observing an atomic image. Maximum scanning area Y offset Current scanning area X offset...
Page 274 ５ MEASUREMENT OPERATION Repeat Click ing on this button starts scanning in the mode specified in Acquisition. Scanning repea ts continuously. If yo u want to store the image, click on the Grab button during scanning. Then the data that is being scanned will be stored in the computer memory.
Page 275 ５ MEASUREMENT OPERATION Continuously measured images are automatically stored in the selected folder. A serial measurement number is automatically attached to the filename. Example: Filename test → test00.tif, test01.tif... The Grab & Repeat dialog box appears. Enter the number of continuous easurements (up to 99 measurements).
Page 276 ５ MEASUREMENT OPERATION ■ Bias/V Forw Specify the bias voltage in this input box. The voltage specified in the Forward input box is always applied to the specimen. After clicking on the Set button, specify the bias voltage using the slider. You can specify the bias voltage up to ± 10 V. Tip Clean Use his c ontrol only when you use STM mode in the ultra-high vacuum SPM instrument...
Page 277 ５ MEASUREMENT OPERATION ■ Filter/Loop Ga This sets the filter and gain amplifier for the feedback signal. Filter [Hz] Specify t he cutoff frequency of the feedback loop in this selection box. You can select from 16 frequencies between 0.01 Hz and 5 Hz when you click on the “ ”...
Page 278 ５ MEASUREMENT OPERATION ■ Display Source This sets the display sources for image grabbing: Display S ource 1, 2, 3, 4 Selec t the signal for the image to display on the Display Window. In ordinary image grab bing, the scanning image appear s with the signal specified in Display Source 1.
Page 279 ５ MEASUREMENT OPERATION Status Click on the Status button in the Display Source frame. The following SPM Status window opens: • Status indication The present state is indicated by the following messages: • SPM inactive at present This message shows that the SPM CONTROL unit is ready to operate. When this message appears, you can start scanning by clicking on the Repeat or Sin- gle button.
Page 280 ５ MEASUREMENT OPERATION playing. The actual scanning line is indicated with the Received Line and the displayed scanning line with the Processed Line. • Sc The triangle arrow marks, which show values input to the A/D converter, indicate the signal levels averaged line by line. The positions of the arrow marks show the values obtained after both source signal gain and offset value have been calculated.
Page 281 ５ MEASUREMENT OPERATION • Auto The image appears after the tilt, brightness and contrast of the image for measure- ment are automatically adjusted. Normally, use this display method. • No ASB (Auto Subtract Background) The image appears after the brightness and contrast of the image for measurement are automatically adjusted, but the tilt o f th e image for measurement is not adjusted.
Page 282 ５ MEASUREMENT OPERATION ■ Advanced Control n you click on the Advanced Control button, the Advanced Control window opens. Advanced Control window includes some parameters that are not often used, and other parameters that are necessary to perform optional measurements. Advanced Control window has three tab windows in which you can specify detailed parameters.
Page 283 ５ MEASUREMENT OPERATION voltage of the SPM CONTROL unit, the maximum Y-axis scanning voltage is saturated at the power-supply voltage. • Add External Z Signal When this check box is clicked on, the signal input from the ADZ terminal on the rear of the SPM CONTROL unit is added to the Z-axis scanning signal.
Page 284 ５ MEASUREMENT OPERATION • Drift Control These parameters are set for correcting the drift. • Set Drift Point You can set the reference points for computing the drift speed. You can specify up to three points. • Clear Oldest Poin You can erase the oldest of the set reference points.
Page 285 ５ MEASUREMENT OPERATION Bias tab wind Specify detailed parameters concerning the bias voltage in the Bias tab window. • Bias Control • Backward Bias This slider enables you to specify the bias voltage to be applied in backward scanning when Mirror is selected in the Acqui sition selection box.
Page 286 ５ MEASUREMENT OPERATION Therefore, if you input a numerical value in the Bias Offset input box so that you do not mistake the bias voltage actually applied, the bias voltage displayed in the Forward box will be: Bias voltage – Bias offset voltage. Bias Offset is used only as a marker.
Page 287 ５ MEASUREMENT OPERATION Display So urce Specify detailed parameters to each source signal for measurement in the Display Source tab windo w. The source signal is the one used for measurement after feedback. Settings ere do not influence the feedback operation. •...
Page 288 ５ MEASUREMENT OPERATION • Autose n the Autoset check box is checked for source si gnal, the offset voltage is automatically applied so that the input voltage at the initial position becomes zero volt s. If the voltage of the source signal is positive (+), an offset voltage is added so that the voltage at that positive position beco mes 0 V.
Page 289 ５ MEASUREMENT OPERATION • Preamp Gain Concerning the tunneling current signals (Current and Log current), specify the gain for the tunneling current preamplifier in this selection box instead of specifying the source gain. Three gains are provided, as shown below: Gain Tunneling current 1 V/nA...
Page 290 ■ Stage This opens the stage control window for controlling the coarse motor drive. Direction Y-Le Y-Ri ght: Y-Off: Do not use JSPM-5200 own: Y-Off: Z-In: Specimen surface approaches the tip. Z-Out: Specimen surface moves away from the tip. Z-Off: Specimen stage does not move.
Page 291 ５ MEASUREMENT OPERATION Z Axi s Only Chec k this box when you do not use the X and Y motor drive. Use the instrument with this b ox checked except when you use the ultra high vacuum SPM instrument. Spee Spec ify the motor driving speed for each axis.
Page 292 ５ MEASUREMENT OPERATION ■ Tip This opens the Tip dialog that performs the tip con trol operations such as approach contr ol and tip retract. Approach On Click ing on the Approa ch On button starts the approach according to the conditions specified in the Approach Conditions frame in this window.
Page 293 ５ MEASUREMENT OPERATION High Bias This is the same function as High Bias on the Bias tab window in the Advanced Control window. Position This specifies the initial position to perform the SPS measurement. For detailed operations, refer to the measuring procedure in the SPM mode (I-V,S-V,I-S,FC,FFC).
Page 294 Z motor drive position has been adjusted. All of these operations are performed by software control. • Approach by hardware control The following function is not usually used for the JSPM-5200.We describe out- line the summary of this functionbelow. Approach is fully co ntrolled by the SPM CONTROL unit.
Page 295 ５ MEASUREMENT OPERATION ■ Adjust Click ing on the Adjust PD button opens the Display Window that displays the position of the la ser beam irradiating the photodiode. Incident laser beam position Adjust photodiode position Indicator The r ed indicator on the left side of the Display Window shows the SUM value (the intensity of the incident laser beam projected on the photodiode.
Page 296 ５ MEASUREMENT OPERATION ■ Cantilever When you perform observation in the AC mode or the AFM mode, open the Cantilever Tuning window to specify parameters used for cantilever oscillation. The Cantilever Tuning window has two tab windows; one is the AC/Phase tab window for the AC mode and Phase mode, and the other is the FM tab window for the FMD mode.
Page 297 ５ MEASUREMENT OPERATION • Q Factor/Peak Fr equency/kHz When you have performed a frequency scan, if the resonance frequency (peak frequency) of the cantilever and Q factor are detected, each detected value will appear here. • RMS Value/Ph ase Value indicators The outputs of the present RMS and phase signals will appear.
Page 298 ５ MEASUREMENT OPERATION • Filte r/Gain Specify the filter gain in the RMS signal circuit. • High Pass Filter/kHz Specify the cutoff frequency of the high-pass filter in this selection box for input Force signal. Before you click on the Scan button, select a cutoff fre- quency lower than that selected in the Start Frequency/kHz selection box.
Page 299 ５ MEASUREMENT OPERATION FM tab window n performing measurements in the FM mode, specify the parameters for cantilever oscil lation. • High A mplitude This chec k box has the same function as the OSC On check box on the AC/Phase window.
Page 300 ５ MEASUREMENT OPERATION • Beat Noise Frequency detection in the FM mode is executed in the frequency-detection circuit of AFM AMP using PLL (Phase Lock ed Loop). In the PLL circuit periodical noise with relatively low frequency (of 1 kHz or less) occurs due to the correlation between the signal frequency and the characteristic frequency of the frequency detection system (PLL).
Page 301 ５ MEASUREMENT OPERATION • PLL C ontrol Frequency detection in the FM mode is executed in the frequency-d etection circuit of AFM AMP using PLL (Phase Locked Loop). Specify parameters for frequency detection. • Locked Center Frequency/kHz Specify the center frequency for frequency detection. The frequency detection circuit detects th e shift of frequency based upon the frequency specified here.
Page 302 ５ MEASUREMENT OPERATION SPS P arameters Specify various kinds of parameters using the SPS Parameters window. The SPS Parameter window is divided into several tab windows for various kinds of SPS measurements. Set the SPS measurement parameters from each tab window. Moreover, when you perform measurements by setting Acquisition of the SPM Parameters window to S ingle SPS or SPS Mapping, specify the kind of SPS measureme...
Page 303 ５ MEASUREMENT OPERATION • Ramp D irection Specify the direction for scanning the bias voltage using these radio buttons. Auto: The bias voltage is scanned from the maximum or minimum voltage, whichever is closer to the currently set voltage. The bias voltage is scanned from the minimum voltage to the maximum voltage.
Page 304 ５ MEASUREMENT OPERATION • SV You can perform SV measurement only in the STM mode. In SV m easurement, you can measure the change of the distance (S) between the tip and specimen by sweeping the bias voltage with keeping the STM feedback on. The position at which SV measurement is carried out is determined by using the Position function in the Tip window.
Page 305 ５ MEASUREMENT OPERATION • IS You can perform IS measurement in the STM or contact AFM mode . Usually, perform it in the STM mode. You must use the conductive cantilever when you perform IS measurement in the AFM mode. In the IS mode, yo u can m easure the change of the tunneling current by swee...
Page 306 ５ MEASUREMENT OPERATION • F C (available only in AFM mode) You can perform FC measurement in the contact AFM, AC or AFM mode. Usually, perfo rm it in the contact AFM mode. In the FC mode, you can measure the change of the interatomic force due to the bending of the cantilever by sweeping the distance between the tip and specimen.
Page 307 ５ MEASUREMENT OPERATION • FFC You can perform FFC measurement only in the contact AFM mode. In FFC mode, you can measure the change of the friction force due to the torsion the cantilever by sweeping the tip in the horizontal (Y) dire ction The measurement result appears on the sc n.
Page 308 ５ MEASUREMENT OPERATION ■ You can perform SKPM measurement when the optional Extended Lock-in Amplifier is installed in the instrument for lateral modulation FFM. Explained here is the setting for SKPM measureme The foll owing KFM dialog box will be in effect if you select KFM in the Mode selection box in the Scan frame of the SPM Parameters window.
Page 309 ５ MEASUREMENT OPERATION ■ Scan Options When the optional Viscoelasticity Lateral Modulation FFM (Lock-in Amplifier) is installed in the instrument, use the Scan Options dialog box for setting the external instruments. A detailed procedure for setting the Lock-in Amplifier is provided later. ■...
Page 310 ５ MEASUREMENT OPERATION ■ Lithography This opens the Lithography dialog that you should set for applying this instrument to lithography. Settings Specify the parameters for lithography in this frame of the Lithography window: Parameters Description Preamp Gain Specify the gain for preamplifier in this selection box. Current/nA (for STM mode) Specify the tunneling current in this input box.
Page 311 ５ MEASUREMENT OPERATION Vector S ettings Specify parameters for Vector mode in this frame of the Lithography window. Parameters Description Max. Tip Speed/(nm/s) Specify the speed of the tip movement in this input box. Point Separation/nm Specify the step gap for the tip movement in this input box. A pattern is defined and the data stored in the file is loaded when you click on this button.
Page 312 ５ MEASUREMENT OPERATION ■ Montage Clicking on the Montage button in the SPM Parameters window opens the Montage window. In the montage scan , you cannot specify the scan area that exceeds the maximum scan area of your scanner, because the syste m scans the specified scan area by dividing it.
Page 313 ５ MEASUREMENT OPERATION Total Size Specify the total scanning area in nm in th e Total Size input boxes. The area specified in these input boxes shows the total size of scanning. The image will appear as below if the parameters are as follows: •...
Page 314 ５ MEASUREMENT OPERATION Scan Direction In this selection box, specify the direction in which the next one-frame-scan moves when the present one-image-scan has finished. Up/dow n and Left/right are provided in the ull-down menu. • U p/down ① ⑤ ⑨ ⑬...
Page 315 ５ MEASUREMENT OPERATION Time Between Images Spec ify the waiting time between the one-frame-scan and the next-one-frame scan in this input box. Just after a large shift (frame to frame) of the scanner, drift may occur due to creep in the scanner. In order to decrease the effect of this phenomenon, allow for waiting time.
Page 316: Setting Lock-In Amplifier
５ MEASUREMENT OPERATION 5.10.4 Setting Lock-in Amplifier WinSPM supports the following two models in the EG&G INSTRUMENTS lock-in amplifiers. • Model 7265 • Model 5110 The window contents, with which the WinSPM controls the lock-in amplifier, differ according to the model. ■...
Page 317 ５ MEASUREMENT OPERATION Setting This sets signal inputs for the lock-in amplifier. • Sensitivit This sets signal-input sensitivity for the lock-in amplifier. The signal-input sensitiv- ity determines the signal amplitude that can input into the lock-in amplifier. How- ever, if you set too large sensitivity, output-signal precision from the lock-in amplifier decreases.
Page 318 ５ MEASUREMENT OPERATION Modulation Signal To operate the lock-in amplifier, the refere nce signal is required for locking the input signal. Usual ly, a signal from the oscillator, which the lock-in amplifier itself has, is used for this reference signal. Here yo u set the oscillator of the lock-in amplifier.
Page 319 ５ MEASUREMENT OPERATION ■ Controlling Model 5110 The following items control Model 5110. Enable When you check this, the system starts to connect with the lock-in amplifier using the RS232C. Since the initialization processing of the lock-in amplifier is performed during its connection with the PC, it takes a little time before the processing completes.
Page 320 ５ MEASUREMENT OPERATION Level / V Set t he signal amplitude that is output from the oscillator in V order. You can also set this by cl icking on the Set button using the slider bar. Output Set t he kinds of output signals from the lock-in amplifier. Since the lock-in amplifier can outp ut two kinds of output signals, set two signals in pairs.
Page 321 ５ MEASUREMENT OPERATION • Line Reject This reduces the power-supply noise by applying a filter for the power-supply (AC 100 V) frequency that enters the input signal. Usually, select Off. Do not use Line Reject. Apply a filter for the power-supply frequency. Apply a filter for the double harmonic frequency of the power-supply frequency.
Page 322: Controlling Specimen Temperature
５ MEASUREMENT OPERATION 5.10.5 Controlling Specimen Temperature ■ Sample Temperature Control dialog This is a dialog for controlling the specimen temperature. Current Temperature This displays the current temperature read by a temperature sensor, which is attached to the specimen holder. •...
Page 323 ５ MEASUREMENT OPERATION range and the required time to reach the set temperature differ depending on the specimen. Heater Output This displays the output to the present heater as a percentage. The maximum current of the direct-current power-supply of the temperature controller basic unit determines the actual output voltage.
Page 324 ５ MEASUREMENT OPERATION ■ Advanced Temperature Control dialog Sample Holder Select the holder type attached to the instrument. Indication Select which temperature to display, Celsius or Fahrenheit. COM Port Specify the communication-port (COM port) number of the PC with which the temperature controller communicates.
Page 325 ５ MEASUREMENT OPERATION resistance or other resistances. This causes the sensor to display a higher temperature on the dialog than the actual temperature. Set an offset to correct this error. When the actual temperature of the specimen is 20 ℃ (the temperature is measured before heating or cooling), if the indicated temperature on the dialog under Offset 0 appears 25 ℃, set –...
Page 326: Ccd Camera
５ MEASUREMENT OPERATION 5.10.6 CCD Camera This displays images from the CCD camera. You can adjust the image size to display it depending on the window size. You can change the image size from 640 × 480 pixels to 256 × 192 pixels. However, the image size changes based on its width so that the ratio of length and width remains constant.
Page 327 ５ MEASUREMENT OPERATION • Image Control This adjusts the brightness and contrast of the CCD image. The image adjustment is performed on the video capture board after image acquisition. So you cannot perform image adjustment while Capture is stopped. When you click on this, the following dialog appears. Adjust brightness and con- trast while watching the image.
Page 328: Analysis Operation
ANALYSIS OPERATION PROCESS MODE ....................6-1 IMAGE PROCESSING AND DATA PROCESSING FUNCTIONS ....6-2 EXAMPLE OF PROCESS FUNCTION............6-4 6.3.1 Example of Using the Image Processing Function........6-4 6.3.2 Example of Using the Data Processing Function ........6-11 6.3.3 Arranging the Measured Data ..............6-14 FILE MENU .....................
Page 329 6.8.3 Mirror......................6-64 6.8.4 Resize......................6-65 6.8.5 Pad Points ....................6-66 6.8.6 Drift Correction ..................6-67 6.8.7 Average Unit Cell ..................6-67 6.8.8 Extract Area ....................6-68 6.8.9 Replace Area.....................6-69 LUT (HEIGHT INFORMATION)..............6-70 6.9.1 Brightness/Contrast ..................6-70 6.9.2 Set Window ....................6-71 6.9.3 Histogram ....................6-72 6.9.4 Display Image LUT ..................6-73 6.9.5 Linearise Image LUT................6-74 6.9.6...
Page 330 6.15 SELECT MENU..................... 6-111 6.16 WINDOW MENU..................6-112 6.17 SPM SCAN MENU..................6-113 6.18 HELP MENU ....................6-117 TMPM5200-2...
Page 331: Process Mode
６ ANALYSIS OPERATION PROCESS MODE The WinSPM system has two modes, a scan mode and a process mode, which are independent of each other. Here, a description is given of the method of operating the process mode. ■ Starting the System in the Process Mode Turn ON the POWER switch on the control unit, then turn ON the switch of the computer.
Page 332: Image Processing And Data Processing Functions
６ ANALYSIS OPERATION IMAGE PROCESSING AND DATA PROCESSING FUNCTIONS Basically, the process mode has two kinds of analysis functions. ■ Image processing function This is an image processing function that analyzes an SPM image. It can analyze the image being measured, and also carry out image processing. By displaying an SPM image in the image window, the main menu automatically changes to the image processing menu.
Page 333 ６ ANALYSIS OPERATION “Subtract Background” Opens the Subtract Background dialog. “Filter” Executes filtering. “Median” Eliminates spike-shaped electric noise. “Single Profile” Executes cross sectional analysis. “Multi Profile” Executes multiple cross sectional analysis. “Roughness” Executes surface roughness analysis. “Multi Image Profile” Executes cross sectional analysis for multiple images. “Particle”...
Page 334: Example Of Process Function
６ ANALYSIS OPERATION EXAMPLE OF PROCESS FUNCTION We describe the typical example of process functions. 6.3.1 Example of Using the Image Processing Function Here, a description is given of functions that are often used in the image processing function. The general flow of image processing is shown below. Image read Adjustment of image brightness and contrast...
Page 335 ６ ANALYSIS OPERATION The SPM image that was copied in the scan mode and also the measured data are transferred to the process mode, and the image is displayed in the “Display Win- dow”. Read the SPM image stored in the file. Read the SPM image from the file.
Page 336 ６ ANALYSIS OPERATION ■ Use of Noise Filter (Convolve 3 × 3 Low Pass) The noise filter removes unwanted noise from the image. Click on the Filter shortcut icon. The Filter dialog appears. Click on Convolve 3 × 3. The Convolve 3 × 3 window appears. Select Low and click on OK.
Page 337 ６ ANALYSIS OPERATION ■ High-speed Fourier Transformation Analysis (FFT) FFT is performed on an image that has a periodic structure, such as a crystal, or a rearranged structure, in order to obtain a diffraction pattern. It is also possible to apply a mark to the acquired diffraction pattern, and perform reverse Fourier analysis of specified components alone.
Page 338 ６ ANALYSIS OPERATION To erase a mask window, set Window/Mask to Window, specify the center point, then move the cursor a distance equal to the radius. Next, click the left mouse button, and an area equal to a circle of the radius through which the cursor was moved will be erased.
Page 339 ６ ANALYSIS OPERATION Set the light source of the 3-dimensional display image. Check Display Light Source Vectors in the Display tab. The position of the light source and the illumination direction with respect to the 3-dimensional image are plotted. You can set a maximum of two light sources, so set the illumination direc- tion of the light and the intensity of the illumination light using Light1 and Light2 in the Display tab, while observing the change in the plotted light source position and the 3-dimensional display image.
Page 340 ６ ANALYSIS OPERATION Select a set of data that you want to analyze from the list of measurement data and click on the Make button. The Multi Image Profile window appears. Specify the measurement position using the mouse. The measurement position is indicated by the arrow on the preview image in the Multi Image Profile window.
Page 341: Example Of Using The Data Processing Function
６ ANALYSIS OPERATION 6.3.2 Example of Using the Data Processing Function The WinSPM system has more than 30 kinds of data processing functions. The general flow of data processing is shown below. Image read Smoothing Evaluating the measured value Differentiation General data processing ■...
Page 342 ６ ANALYSIS OPERATION ■ Smoothing (Smooth) If there is a lot of noise in the graph, carry out smoothing. If there is a small amount of noise over the entire graph, select Average. If there is spike-shaped sporadic noise, select Median.
Page 343 ６ ANALYSIS OPERATION ■ Differentiation (Differentiate) I-V curves and other parameters are frequently differentiated before being processed. In this system, differentiation is done by one command. Select Analyse from the menu, then select Differentiate from the pull-down menu that appears. Select dl/dV, then select the number of points to use for computing the differential value.
Page 344: Arranging The Measured Data
６ ANALYSIS OPERATION 6.3.3 Arranging the Measured Data Arrange the analyzed data in the output sheet format. ■ Creating an output sheet Arrange the image data and the spectrum data in the output sheet Display the data you wish to display in the Display window. Activating the Display window, click on the Make Report shortcut icon.
Page 345 ６ ANALYSIS OPERATION Arrange the 3D display image in the output sheet Create a 3D display image. Activating the 3D Display window, click on the Make Report shortcut icon. 2D and 3D display images are created in pairs in the output sheet and displayed in the Report window.
Page 346 ６ ANALYSIS OPERATION ■ Saving and printing the output sheet After having created an output sheet, save and print it. Saving an output sheet You can save an output sheet in the following two types of file. • Saving it in the WinSPM original file Activating the Report window, click on the Save Report shortcut icon to save an output sheet in the file.
Page 347: File Menu
６ ANALYSIS OPERATION FILE MENU ■ Open (Ctrl+O) You load data stored on the disk into the memory, and display it on the screen. File name When you enter the filename of the file to load, or select it from the displayed list of filenames, the filename is displayed in this box.
Page 348 ６ ANALYSIS OPERATION Type of File Specify type for loading files. You can specify the following types of files. Type Description Image file and graph file such as I-V data SPM Data ( * .tif, * .spc) File normally saved with this software SPM Image ( * .tif) Image file only Binary Image ( * .bin)
Page 349 ６ ANALYSIS OPERATION • Search string Specify folders that you wish to search for saved files and also filenames. Specify as shown below. You can use a wildcard for filenames. Drive name: Folder name Folder name ... Filename • Select Directory Clicking on this button displays the dialog for selecting the desired directory from the tree-structured display.
Page 350 ６ ANALYSIS OPERATION ■ Save As (Ctrl+A) You save data on a disk. The applicable data is the current data displayed in the Display Window. • File name Enter filename of the file that you want to save. When you enter filename and click on the Save button, the data will be saved. •...
Page 351 ６ ANALYSIS OPERATION • Save in Specify a folder containing saved files. • Save_Repeat When multiple sets of data have already been grabbed in the memory, if you wish to save them in the form of a file successively, you can do this by clicking on the Save_Repeat button.
Page 352 ６ ANALYSIS OPERATION Stop: Stops continuous playback. When playback stops, the displayed image returns to the first image. Also, you can display any desired image by dragging the slider bar. The selected continuous images are not loaded into the memory. Unless a series of continuous images exists in the same directory, an error will occur when you attempt to read them.
Page 353 ６ ANALYSIS OPERATION • Analysis result sheet This output sheet is the displayed information in each analysis window. You can hardly distinguish this output sheet from the analysis window by their appearance; e.g., you cannot operate the analysis position in the output sheet. You cannot arrange the displayed information in plural analysis windows on a single output sheet.
Page 354 ６ ANALYSIS OPERATION ■ Load Report You load and display the output sheet saved in the files. When you select this item, the Open dialog box appears. Select an output sheet file to load. The extension of the output sheet file is “*.RPT”. Loading an output sheet file displays the output sheet and stores the original SPM data in memory as well.
Page 355: Edit Menu
６ ANALYSIS OPERATION EDIT MENU ■ Copy (Ctrl+C) You can paste data displayed in the Display Window to another application using Copy & Paste. When you select Copy, the contents of the Display Window are copied. When you start another application and select Paste, the data in the Display Window will be transferred as an image.
Page 356: Process Menu (Image Processing Function)
６ ANALYSIS OPERATION PROCESS MENU (IMAGE PROCESSING FUNCTION) 6.6.1 Filter These are two filtering methods: Convolve 3×3 and Convolve 5×5. Convolve 3 × 3 and Convolve 5 × 5 use a matrix of three columns and three rows, and five columns and five rows, respectively.
Page 357 ６ ANALYSIS OPERATION 【Example】 For one line signal in an image: Original signal After filtering Low pass High pass Filtering is performed as shown above. The matrix element for each filter is as follows. convolve 3 × 3 convolve 5 × 5 Filter Median −...
Page 358 ６ ANALYSIS OPERATION Actual filtering is carried out by a weighted average with the filtering operator for the core pixel. For example, if the 3 × 3 median filter is applied to core pixel E, the following calculation is carried out for the new image data E’. ×...
Page 359: Edge Enhance
６ ANALYSIS OPERATION 6.6.2 Edge Enhance The current image is edge-enhanced. The following edge enhancement functions are provided. Filter Description Vertical Edge Enhancement in the vertical direction Horizontal Edge Enhancement in the horizontal direction Diagonal [／] Edge Enhancement in the diagonal (／) direction Diagonal [＼] Edge Enhancement in the diagonal (＼) direction Laplace...
Page 360: Differentiate
６ ANALYSIS OPERATION Laplace − 1 − 1 − 1 − 1 − 1 − 1 − 1 − 1 Filtering operation is applied in the same manner as the Convolve 3 × 3 function. Clicking on the OK button executes the designated edge-enhancement function. 6.6.3 Differentiate The current image is differentiated at a certain angle.
Page 361: Median
６ ANALYSIS OPERATION When a deviation value is specified, the brightness range within the specified deviation value is expanded to the full brightness range of the display (0 to 255). The brightness range outside of the specified deviation value is displayed in black (0) or white (255). This function does not influence measurement data.
Page 362: Subtract Background
６ ANALYSIS OPERATION 6.6.7 Subtract Background... If the brightness (background) of the image changes in a certain direction, make correction for this change. • Whole Plane Corrects the tilt of the entire image as a single plane. Clicking OK starts correction. •...
Page 363: Single Math
６ ANALYSIS OPERATION 6.6.8 Single Math A mathematical operation is performed for each pixel of the current image. The following eight mathematical operations are provided. Operation Description Effective value ⎯ Invert Brightness-inverted image display Multiply Product of pixel data and a constant The same image if 1.0 Divide Pixel data divided by a constant...
Page 364: Double Math
６ ANALYSIS OPERATION 6.6.9 Double Math A mathematical operation is performed for each pixel of the current image and any desired image in the computer memory. The following ten mathematical operations are provided. Operation Description Average of the data; (a+b)/2 Subtract Difference of the data;...
Page 365: Analyse Menu (Image Processing Function)
６ ANALYSIS OPERATION ANALYSE MENU (IMAGE PROCESSING FUNCTION) 6.7.1 Profile In the current image, a straight line is drawn between two specified points, and the height data along this straight line is line-plotted and displayed. The results of analysis are displayed in a dedicated window that is separate from the Display Window.
Page 366 ６ ANALYSIS OPERATION At this time, the average of the cross sectional shape of the area enclosed with a square is used as the result of cross sectional analysis. This area can be freely changed by changing the width of the square with the mouse cursor. Select Simple Line from the submenu to return control to the normal cross sectional shape analysis (analysis aimed at the shape on the line only).
Page 367 ６ ANALYSIS OPERATION Cross-sectional information The results of various analyses on the line plot are displayed. The kinds of analyses and the analysis methods are shown below. • Definition A line plot is defined as follows. Line plot Centerline Length of line plot L The height z along an arbitrary length l in the line plot is defined as ) (l The height Z...
Page 368 ６ ANALYSIS OPERATION The 10-point average roughness is stipulated as the “sum of the average value of the absolute values of the deviation from the centerline between the largest deviation and the fifth deviation, and the average value of the absolute values of the deviation between the smallest deviation and the fifth deviation.
Page 369 ６ ANALYSIS OPERATION Angle: Elevation angle (tilt) of the marker position when seen from the ■ ● marker position The displayed values are the values computed in the analysis plane, so the angle will differ from that shown in the line plot. ■...
Page 370 ６ ANALYSIS OPERATION Saving the results of analyses When you click the right mouse button on the region where the results of analyses are displayed, the submenu will appear. If Save Data is selected from the submenu, Save as dialog box will appear, and the all analysis results displayed on the screen can be saved on the disk file in the text form.
Page 371 ６ ANALYSIS OPERATION The equation used for computing the 10-point average roughness Rz stipulated in JIS B0601:1998 has been expanded to apply to a 3-dimensional plane. (The 10-point average roughness itself is not stipulated in JIS B0601:2001.) It is stipulated as the “sum of the average value of the absolute values of the devia- tion from the average height Z in the analysis plane between the largest deviation and the fifth deviation, and the average value of the absolute values of the deviation...
Page 372 ６ ANALYSIS OPERATION ■ Extra Profile Performs frequency analysis of cross section in the horizontal or vertical direction and histogram ・ cumulative percentage for an analysis screen. Select Cross sections and Extra from the Analyze menu. Designating Analysis Position Basic operations are the same as Single Profile. •...
Page 373 ６ ANALYSIS OPERATION ■ Multi Image Profile Performs cross-sectional analysis for the same line on multiple images. For instance when you observe three types of images such as topography, elasticity and viscosity of a sample for viscoelasticity measurement at one time, you can use this function for analyzing the cross section of the same line on the different types of images.
Page 374 ６ ANALYSIS OPERATION Display and operation of the analysis screen The displayed information of the multi-image profiles varies depending on the number of the selected data. However, the analysis results for certain data are generally shown in the vertical direction as seen below. The display arrangement may differ but the function, operation and displayed information are the same as those for a Single Profile.
Page 375: Measure
６ ANALYSIS OPERATION 6.7.2 Measure Calculates and displays various measurement values for the acquired image. The measurement functions are integrated in the cross-sectional analysis functions in Sect. ６ .7.1. Area Number of pixels, area, averaged specimen height and root-mean-square value of specimen height within a designated region are measured.
Page 376 ６ ANALYSIS OPERATION Specify the region to be measured by placing the cursor inside or outside of the enclosed line and click the left mouse-button. The specified region is displayed in black. Inside the enclosed line Click the left mouse-button Outside the enclosed line Click the left...
Page 377: Zoom
６ ANALYSIS OPERATION Point The distance and a relative image-height between two designated points on an image are measured. Select Point in the pulldown sub-menu. A cross cursor “+” appears on the image. Move the cursor to the starting point of the measurement with the mouse; click the left mouse-button.
Page 378: Trim
６ ANALYSIS OPERATION ２／２２／２２／２４５゜４５゜１／２１／２ The relation between the specified image size and the enlarged image size is as follow. Specified area Enlarged area Smaller than 128 × 128 → 128 × 128 Smaller than 256 × 256 →...
Page 379: Fft (Fast Fourier Transformation)
６ ANALYSIS OPERATION 6.7.5 FFT (Fast Fourier Transformation) The two-dimensional FFT is applied to a real image to obtain a spot image (a diffraction pattern of the real image). Also, the inverse transformation is applied to a spot image to obtain the real image.
Page 380 ６ ANALYSIS OPERATION ■ Forward This function Fourier-transforms the current image, and displays the transformed spot (diffraction image). Select Forward from the FFT window. Fourier transformation starts, and the spot (diffraction image) resulting from transformation is displayed. If the spot is dark, you can increase the contrast using Contrast × 2. ■...
Page 381 ６ ANALYSIS OPERATION ■ Delete Fourier-transformed data is deleted from the computer memory. Select Delete from the FFT Window. ■ Display A Fourier-transformed spot image is displayed on the Display Window. Click on the Display button in the FFT Window. A Fourier-transformed spot image will be displayed.
Page 382 ６ ANALYSIS OPERATION Setting the Masking Window Example 1】 When creating four masking windows. Spots within these circles are used for inverse FFT. Select “Mask” in the “Window/Mask” frame ; Center position the cursor at the center of the desired masking window;...
Page 383 ６ ANALYSIS OPERATION A masking window having radius r’ is displayed. Select “Window” in the “Window/Mask”frame; position the cursor at the center of the desired masking window; then click the left mouse-button. Move the cursor to set the inner radius r; then click the left mouse button.
Page 384 ６ ANALYSIS OPERATION ■ Save A created masking window is saved on the disk. Display the masking window to be saved on the Display Window and click on the Save button in the FFT Window. Enter the filename under which to save it using the keyboard; and click on the Save button.
Page 385 ６ ANALYSIS OPERATION Lower frequency Masking window is applied. Upper frequency Spatial Frequency Band A coaxial ring masking window is easily defined as a spatial frequency band. Enter the lower frequency in the From input box and the upper frequency in the To input box.
Page 386: Particle Analysis
６ ANALYSIS OPERATION 6.7.6 Particle Analysis The Particle analysis function includes measurements of the number of particles and the area of each particle in an image. The procedure for the particle analysis is shown below. Binarizing of the image Condition for particle recognition Is particle analysis...
Page 387 ６ ANALYSIS OPERATION Image to analyze (image on the left) The image for particle analysis and its SPM information are displayed. Binary digitized image (image on the right) Image to analyze digitized in a binary value. The threshold level is displayed at the left of the screen.
Page 388 ６ ANALYSIS OPERATION Determines the value of threshold when expressing an image by a binary digitized value. Moving the threshold value slider changes the threshold value for binary value digitizing processing and the binary digitized value of the particle analysis window. Determine the threshold value while checking with the original image.
Page 389 ６ ANALYSIS OPERATION • Dilate Adds one pixel layer to the area around particles. This function becomes effective after analyze processing is performed. 【 Example 】 Dilate • Isolate Excludes from the display any particles composed of a specified number of pixels or fewer.
Page 390: Draw Mesh
６ ANALYSIS OPERATION • Diameter List diameters in increasing order. • Select Selects the numeric data of particles on the binary digitized value image. When Select is clicked, the particle analyze setting window disappears. Select a particle of which numeric value you want to know from the binary digitized value image in the particle analyzes window and click the mouse.
Page 391: Roughness
６ ANALYSIS OPERATION If 1 is input, the designated parallelogram becomes the unit of the mesh image. If 2 is input, a parallelogram whose size is half the four sides of the designated paral- lelogram becomes the unit of the mesh image. Resultant mesh image Resultant mesh...
Page 392 ６ ANALYSIS OPERATION • Rz On/Off The red and blue letters 1 to 5 displayed on the preview screen are the extraction positions in 10-point average roughness (Rzjis) analysis. Whether this extraction position is to be displayed or not can be set by selecting Rz off or Rz on. Data Information Information about the analysis image (title, measurement mode, measurement parameter) is displayed.
Page 393: Geometry Menu (Image Processing Function)
６ ANALYSIS OPERATION GEOMETRY MENU (IMAGE PROCESSING FUNCTION) 6.8.1 Translate Shifts the current image parallel to itself on the screen. Click on Geometry in the main menu; then select Translate in the pull-down menu. A cross cursor “+” appears on the image, and the message “Select point 1/2” is displayed.
Page 394: Mirror
６ ANALYSIS OPERATION When Rotate theta is selected, a cross cursor “+” appears on the image. Then designate the rotation center (1/3), the rotation starting line (2/3), and the rotation end line (3/3) in accordance with the guidance displayed on the window.
Page 395: Resize
６ ANALYSIS OPERATION Mirror X Transpose 6.8.4 Resize The size of the current image is changed. The following three changes are provided: Resize Description Change to 128 × 128 pixels Change to 256 × 256 pixels Change to 512 × 512 pixels Click on Geometry in the main menu;...
Page 396: Pad Points
６ ANALYSIS OPERATION → 256 512×512 → 256 128×128 256×256 6.8.5 Pad Points The current image is shifted to the center of a larger frame. The following three pads are provided: Current image Padded image size 128 × 128 256, 512 256 ×...
Page 397: Drift Correction
６ ANALYSIS OPERATION 6.8.6 Drift Correction Corrects the distortion (drift) of the current image. Click on Geometry in the main menu; then select Drift Correction in the pull-down menu. A cross cursor “+” appears on the image. Specify an image distortion at 3 corners of a parallelogram–the starting point (1/3), the 1st vector endpoint (2/3), and the 2nd vector endpoint (3/3)–in accordance with the guidance displayed on the window.
Page 398: Extract Area
６ ANALYSIS OPERATION Method for designating a unit cell Input a numerical value-the denominator of division of the designated parallelogram-to scale down the parallelogram to the actual unit cell of the mesh (each side of the displayed parallelogram is divided by the entered number).
Page 399: Replace Area
６ ANALYSIS OPERATION Image Extract Area Original image Processed image 6.8.9 Replace Area The black area made with the Extract Area operation is replaced by another image. After the Extract Area operation, click on Geometry in the main menu; then select Replace Area in the pull-down menu.
Page 400: Lut (Height Information)
６ ANALYSIS OPERATION LUT (HEIGHT INFORMATION) 6.9.1 Brightness/Contrast Adjusts the contrast and brightness of the current image. • Brightness Adjusts the brightness of the image. Numeric values can be set within the (–128 to 128) range. The smaller the value, the darker the image. The standard value is 0. •...
Page 401: Set Window
６ ANALYSIS OPERATION γ＝1.5 γ＝1.0 γ＝0.5 Original LUT Select Brightness/Contrast from the LUT pull-down menu. An image is displayed with a size of 400 × 400 pixels. Adjust Brightness, Contrast and γ value by operating the bar chart and click Operate the bar chart referring to the LUT bar and histogram on the left of the image.
Page 402: Histogram
６ ANALYSIS OPERATION Clicking OK creates a new image from which data out of the range has been deleted. If Cancel is clicked, the changes affect only on the image. The original data stored in the computer memory remains unchanged. To change the data in the computer memory, it is necessary to process Transform Image Data.
Page 403: Display Image Lut
６ ANALYSIS OPERATION Equalize 6.9.4 Display Image LUT The current LUT (Look Up Table) is displayed on the image as a graph. Select Display image LUT from the LUT pull-down menu. The current LUT is displayed on the image. The LUT is a data-transform function for displaying the original data on the image display screen.
Page 404: Linearise Image Lut
６ ANALYSIS OPERATION (White) White Level (Displayed value) (Black) 0 Display Image data (Black) (White) Data value (Original image data) Each image has its own LUT. Usually, the LUT is defined as a default as shown below, but after Brightness/Contrast operation is implemented on an image on display, the LUT is changed.
Page 405: Lut Math
６ ANALYSIS OPERATION 6.9.6 LUT Math An LUT is mathematically operated on with addition, multiplication or other operation. The following eight operations are provided: Operation Description Inverse Level axis of LUT is inverted. Reverse Data axis of LUT is reversed. A constant is added to LUT.
Page 406 ６ ANALYSIS OPERATION Height Height scale scale (nm) (nm) (White) (White) Height scale change (10 to 20) (Black) (Black) Select Fix Z Scale from the LUT in the pull-down menu. The data selection window is displayed. Select an image from the Select Data window. Only the same type of image is displayed in the Select Data window.
Page 407 ６ ANALYSIS OPERATION • In the case of other than TOPO image The largest Z-direction scale (Z height) on a selected image is displayed as the maximum update value and the smallest Z-direction scale is displayed as the minimum update value. The update value can be changed.
Page 408: Display Menu (Image Processing Function)
６ ANALYSIS OPERATION 6.10 DISPLAY MENU (IMAGE PROCESSING FUNCTION) 6.10.1 Display From among the image data stored in the computer memory, the current image data is displayed in the Display Window. Select Display in the Display pull-down menu. The current image stored in the computer memory is displayed in the Display Window.
Page 409 ６ ANALYSIS OPERATION Display Mode Selection Contents This mode is the normal display mode. Height (signal level) corresponds to brightness. Conversion of signal level to image Top View brightness is performed by LUT. Usually, a higher signal level (height) is displayed at higher brightness. Bird’s Eye An image is displayed as a shaded image.
Page 410 ６ ANALYSIS OPERATION Text frame Text is entered in this input box using the keyboard. To change to a new line, use the mouse cursor, not the Enter key. • Arrow Size The length and width of the arrow mark are specified in this input box. Width Length 【...
Page 411: Full Display
６ ANALYSIS OPERATION 6.10.3 Full Display If the Full Display function is selected when no check mark is put to the Display LUT bar by Display Parameters, the following image will appear in the Display Window. Display Window (1) Scan size Height Reference Bias voltage...
Page 412: Display
６ ANALYSIS OPERATION 6.10.4 3D Display This function displays an SPM image in three dimensions. The 3-dimensional image appears in a separate window (3D Window) from the Display Window. ■ Quality of 3-dimensional display The 3-dimensional image is normally a simplified display. When you click the Plot all Points button, the precision display computation starts, enabling a more accurate 3-dimensional image to be displayed.
Page 413 ６ ANALYSIS OPERATION • Centering Adjust the display position (Pan) and enlargement ratio (Zoom) on the screen. Zoom • Perspective Specify the distance from the observation point of the 3-dimensional image. (0.0 – 1.9) If you increase this value, the image will appear as a 3-dimensional image that is viewed from a long distance away.
Page 414 ６ ANALYSIS OPERATION • Display Mode Specify the method of drawing a 3-dimensional image. Illuminated Performs 3-dimensional display computation for the condition in which the surface is illuminated by light, and displays the results. Shaded Displays a 3-dimensional solid image. The display colors of the surface are based on those of the original image.
Page 415 ６ ANALYSIS OPERATION • Wireframe Specifies the wire frame interval for a Grid display. X Grid Spacing X direction frame interval Y Grid Spacing Y direction frame interval • Surface Used to adjust the surface drawing for an Illuminated display. Diffuse level Specify the light diffusion at the surface.
Page 416 ６ ANALYSIS OPERATION Options tab (option setting) Set the various option functions. • Maximum data to plot Set the computation accuracy for a simplified display. If you increase the value in the text box, the accuracy of the image in the simplified display mode will increase, however it will take more time for the image to be displayed.
Page 417: Display Colours
６ ANALYSIS OPERATION 6.10.5 Display Colours... The color for displaying an image and colors for displaying other data in the screen are designated. Image Look up Table The color for displaying an image is selected in this frame. Color table Description Identity Linear gray scale (High: White, Low: Black)
Page 418: Clear Memory (Fs)
６ ANALYSIS OPERATION Yellow Magenta White Cyan Blue Green Colors This function is used to set the display colors of the following parts. Part Description Old Image Boundary Color of a non-current image boundary Current Image Boundary Color of the current image boundary Overlay Text Color of text superimposed on an image General Text...
Page 419: Grab From Memory (Fs)
６ ANALYSIS OPERATION 6.10.7 Grab from Memory (FS) An image displayed on the Display Window is stored in the computer memory with a title name given to it. Click on Display in the main menu; then select Grab from FS in the pull-down menu.
Page 420: Change Parameters
６ ANALYSIS OPERATION 6.10.8 Change Parameters The contents of the Data Information window are changed. The items that can be changed as follows: Item Description Title 40 characters or less 39 characters × 5 lines Info Reference/V/Current/nA Optional Sample Bias (V) Optional Process string Whether or not the history of ON, OFF, image processing ,...
Page 421: Display Sps Measurement Position
６ ANALYSIS OPERATION 6.10.9 Display SPS Measurement Position When SPS measurement is performed on an image, its SPS data will be managed along with the image data. Here, SPS data measurement position and spectrum are referenced, SPS data is extracted, etc. This function becomes effective when the image data containing SPS data is displayed in the Display Window.
Page 422: Mapping Menu (Image Processing Function)
６ ANALYSIS OPERATION 6.11 MAPPING MENU (IMAGE PROCESSING FUNCTION) The SPS mapping function performs SPS measurements at each point (128 × 128) in the measurement area while scanning this area. It is possible to perform mapping measurements for various SPS measurements such as I-V, S-V, I-S, force curve and friction force curve.
Page 423: Display Parameters
６ ANALYSIS OPERATION 6.11.1 Display Parameters The display parameters for CITS images are specified in this window. CITS images are displayed in a size of 128 × 128 pixels. The parameters to be set are as follows. Display Mode Display modes are selected with these radio buttons. •...
Page 424: Special Displays
６ ANALYSIS OPERATION Normalization Parameters Low conductance: Value that appears black on the display. This parameter is used only in the Conductance display mode. High Conductance: Value that appears white on the display. This parameter is used only in the Conductance display mode. Images to Display •...
Page 425: Sps Mapping Select
６ ANALYSIS OPERATION 6.11.3 SPS Mapping Select The active SPS mapping image is designated, and always the current SPS mapping image is displayed in the frame next to it. “Current SPS mapping image” means the image that is currently designated in the computer program.
Page 426: Edit Sps Mapping Data Set
６ ANALYSIS OPERATION 6.11.4 Edit SPS Mapping Data Set Edit Used to copy or delete the designated SPS mapping image, or add a comment or title on a designated bias voltage image in the CITS bias voltages. Select Edit in the Edit SPS mapping Data Set pulldown menu. The SPS Mapping Select window will appear.
Page 427 ６ ANALYSIS OPERATION • Edit A title is input for the SPS mapping image displayed as the current image. Replace image A current image that was stored in the computer memory with the Copy operation is replaced by the original SPS mapping image data. If there is no tunneling current image that was stored in the computer memory with the Copy operation, selecting this function would cause an error.
Page 428 ６ ANALYSIS OPERATION ■ Insert image A current image that was stored in the computer memory with the Copy operation is inserted again into the original SPS mapping image data. If there is no tunneling current image that was stored in the computer memory with the Copy operation, selecting this function would cause an error.
Page 429: Average Images
６ ANALYSIS OPERATION 6.11.5 Average Images The designated SPS mapping images are averaged on a group basis that comprises plural images. Select Average Images from the Mapping pull-down menu. A pop-up window Number of images (2 to 64) to average over will appear. Select a number from 2, 4, 8, 16 and 32.
Page 430 ６ ANALYSIS OPERATION Selection Type This function is in effect when the Particle function is applied to a binarized image. When Object is selected, the I-V curves at the points within the designated particles are averaged and displayed. Select The region in which SPS data to be averaged is designated on a TOPO image. 【...
Page 431: Process Menu (Data Processing Function)
６ ANALYSIS OPERATION 6.12 PROCESS MENU (DATA PROCESSING FUNCTION) This function processes graph data such as I-V data. The menu automatically switches over according to whether the data is image data or graph data. 6.12.1 Smooth Performs smoothing of graph data. ■...
Page 432: Math X, Math Y
６ ANALYSIS OPERATION ３ The Y values of the five points ４２ are sorted, and the value of Y3 is replaced by the middle ５ of those five values (Y2, in this example). A case of five-point median smoothing The data at the two edges of the graph cannot be processed.
Page 433: Spec Math
６ ANALYSIS OPERATION 6.12.3 2 Spec Math A mathematical operation is carried out between the Y axis data of the current graph (displayed graph) and Y axis data of another graph (stored in the computer memory). The following mathematical operations are provided. Operation Description A + B...
Page 434: Differentiate
６ ANALYSIS OPERATION 6.12.4 Differentiate The displayed graph data is differentiated. Calculation A differentiation method is selected in this frame. The available differentiations are as follow: Operation Description dI/dV 1st derivative by the Savitzky-Golay method dlnI/dlnV Normalised result of the dI/dV d2I/d2V 2nd derivative by the Savitzky-Golay method d2lnI/d2lnV...
Page 435: Analyse Menu (Data Processing Function)
６ ANALYSIS OPERATION 6.13 ANALYSE MENU (DATA PROCESSING FUNCTION) 6.13.1 Fit Polynomial A graph is approximated by an nth-degree polynomial. Select Fit Polynomial from the Analyse pull-down menu. The Enter Polynomial degrees pop-up window will appear. Enter the degree using the keyboard. If the number ‘n’...
Page 436: Measure
６ ANALYSIS OPERATION Designate the area with Enlarged graph two diagonal points 6.13.3 Measure The coordinates of the present cross-cursor position, and the relative distance between the present cross-cursor coordinates and the previous cross-cursor coordinates, are indicated. Select Measure from the Analyse pull-down menu. The following screen will appear.
Page 437: Group Plot
６ ANALYSIS OPERATION 6.13.4 Group Plot A selected graph is overlaid on the current (displayed) graph. Select Group Plot from the Analyse pull-down menu. The graph display screen and the Select Data Item window are displayed. Only SPS data of the same type as the current data is displayed in the Select Data Item window.
Page 438: Show Fft
６ ANALYSIS OPERATION 6.13.5 Show FFT FFT processing is applied to the data of a displayed graph. The related function is Remove DC Bias. Select Show FFT from the Analyse pull-down menu. The names of the FFT windows will be displayed in the pulldown sub-menu. The following FFT windows are provided: FFT window Description...
Page 439: Display Menu (Data Processing Function)
６ ANALYSIS OPERATION 6.14 DISPLAY MENU (DATA PROCESSING FUNCTION) Of the menu items, the functions Display Colour, Clear FS, Grab From FS and Change Param... are the same as the corresponding image processing functions. 6.14.1 Plot Re-displays a graph. Select Plot from the Display pull-down menu. The graph that was displayed last is re-displayed.
Page 440 ６ ANALYSIS OPERATION Font The type style, type size and character attribute of font can be set for the title display character (Title), XY-axis title character (X, Y Title) and axis display character (Axes). Select a setting character type from the pull-down menu and click the Set Font button to display a setting dialog.
Page 441: Select Menu
６ ANALYSIS OPERATION 6.15 SELECT MENU You can display a list of data in the memory. The list is displayed, and the “ ” mark is attached to the beginning of the current data. ■ Previous Image Displays the image that is immediately above the current data displayed in the Select list. If the data immediately above the current data is graph data, the image above it will be displayed.
Page 442: Window Menu
６ ANALYSIS OPERATION 6.16 WINDOW MENU Performs operation for the Display window. ■ Creates New Window Opens a new Display window. If there are multiple Display windows, the Display window that is marked with a ‘ ’ at the beginning of the Window list is active. ■...
Page 443: Spm Scan Menu
６ ANALYSIS OPERATION 6.17 SPM SCAN MENU In the process mode you can select only Cantilever Calibration and Scanner Calibration. ■ Cantilever Calibration Selecting Cantilever Calibration from the SPM Scan menu opens the Cantilever Calibration window, in which you can specify the cantilever calibration values for calculating interatomic force and friction force that are obtained from bending and torsion of the cantilever respectively.
Page 444 ６ ANALYSIS OPERATION Friction Force Calibration Perform cantilever calibration for calculating friction force from the torsion of the cantilever. The friction force is calculated based on the following equation. − × • Apply When the “Apply” check box is checked, the friction force image is displayed with a friction-force value calculated from the applied voltage.
Page 445 ６ ANALYSIS OPERATION The X-axis-position adjusting knob shifts 0.5 mm per revolution, and the Y-axis-position adjusting knob shifts 0.25 mm per revolution. When the following result is obtained, calculate the calibration value from this graph. FFM (V) —10 − − The moving distance of the photodiode by turning the adjusting knob per revolution is as follows: Ｘ-axis （ｍｍ）...
Page 446 ６ ANALYSIS OPERATION ■ Scanner Calibration A tube-shaped piezoelectric scanner is used in the ultra-high vacuum SPM. This type of piezoelectric element has a nonlinear dependence of displacement on voltage in scanning as shown below. Displacement Voltage In the SPM controller, the distortion-compensation unit is installed so that nonlinear displacement can be removed.
Page 447: Help Menu
６ ANALYSIS OPERATION 6.18 HELP MENU This software comes with on-line help, which can be used as a reference when you do not know how to use a function or do not understand its meaning. ■ Contents Displays on-line help, and provides a more detailed explanation of the underlined on-line help items.
Page 448: Appendix
APPENDIX WINSPM SOFTWARE REINSTALLATION METHOD........7-1 7.1.1 Before Re-installing the WinSPM Software..........7-1 7.1.2 Re-installing Windows ................7-2 7.1.3 Installing the A/D Board Device Driver in the PC........7-2 7.1.4 Reinstalling the WinSPM Software............7-7 SETTING UP The WinSPM PROGRAM............7-9 7.2.1 Selecting the instrument ................
Page 449: Winspm Software Reinstallation Method
７ APPENDIX WINSPM SOFTWARE REINSTALLATION METHOD Below is the method of re-installing the WinSPM software. 7.1.1 Before Re-installing the WinSPM Software Reconfirmation of trouble Before re-installing the software, check the cause of the trouble once again, and if possible, eliminate it. If the hard disk of the computer is nearly full, make a backup copy of the recorded measurement data, then erase the data from the hard disk to free some space.
Page 450: Re-Installing Windows
７ APPENDIX 7.1.2 Re-installing Windows If it is necessary to reinstall Windows, remove all of the devices including the A/D board. Then, follow the instructions given in the manual that came with the computer. After reinstalling the software, confirm that Windows starts normally and also that the computer operates normally.
Page 451 ７ APPENDIX Click on DEVICE DRIVERS in this window to start installing the DT3016 A/D converter device driver. The device driver installer displays the window below. Click on the Next > button. The package version may be different depending on the time of shipment. TMPM5200-2...
Page 452 ７ APPENDIX Follow the instructions issued by the installer. (Use the default settings throughout this process.) A window like the one below appears soon. It enables you to select the kind of driver you wish to install. Here, select DT3010 Series Software from the driver list shown in the figure below and click on the Next >...
Page 453 ７ APPENDIX Installation of the DATA ACQUISITION SDK Click on DATA ACQUISITION SDK in the DT-Open Layers Core components window to start installing the SDK files that control the A/D and D/A boards using the WinSPM software. The DT-Open Layers Data Acquisition Software Development Kit window appears.
Page 454 ７ APPENDIX Click on MAIN MENU in the DT-Open Layers Software Development Kit window to return to the OmniCD main (DT-Open Layers) window. Click on EXIT to end installing the A/D Board device driver. Shutting down Windows and installing the DT3016 A/D converter board Shut down Windows and turn off the PC power.
Page 455: Reinstalling The Winspm Software
７ APPENDIX 7.1.4 Reinstalling the WinSPM Software Re-install the WinSPM software as follows: Reinstalling the WinSPM software (WinSPM system) Reinstall the WinSPM software using the appropriate installer. Insert the WinSPM software CD into the CD drive of the PC. The setup program automatically starts and displays the following dialog. Click on English.
Page 456 ７ APPENDIX Click on Install WinSPM System. The WinSPM System CD installer selection window opens. Click on the WinSPM System radio button and on the Install button. The installer starts to operate. Follow the instructions issued by the installer. (Use the default settings throughout this process.) When the SPM software is completely installed, restart the system, as the Administrator, in the WinSPM System measurement mode.
Page 457: Setting Up The Winspm Program
7.2.1 Selecting the instrument The WinSPM program controls the JSPM-5200 by default and has to be reset when an instrument other than the JSPM-5200 is used. The administrator resets WinSPM. Also, when the WinSPM program controls optional attachments, all necessary information on the attachments should be given to the program.
Page 458 ７ APPENDIX Check the boxes of the optional accessories to be used. Click on the OK button. If the instrument has been changed, the confirmation window opens, asking whether to save the inputs or not. If this happens, terminate and restart the WinSPM program;...
Page 459: Saving And Loading The Scanner-Sensitivity Settings
７ APPENDIX 7.2.2 Saving and Loading the Scanner-Sensitivity Settings The scanner sensitivities are calibrated using the WinSPM software. For later use such as replacing the WinSPM software, record the values of the sensitivities on a floppy disk or another memory device other than the hard disk. Saving scanner-sensitivity settings Start the WinSPM measurement mode with the system administrator...
Page 460 ７ APPENDIX Specify the device in which you want to save the file, and the filename, and click the Save button. The file extension for this file is *.clb. Loading scanner-sensitivity settings Start the WinSPM measurement mode as the system administrator privilege. Select Scanner Calibration from the SPM Scan pull-down menu.
Page 461: Saving And Loading The Motor-Drive Position Calibration Values
７ APPENDIX 7.2.3 Saving and Loading the Motor-Drive Position Calibration Values The WinSPM software allows the motor-drive positions to be calibrated. Similarly to scanner-sensitivity settings, record the calibrated values of the motor-drive positions on a floppy disk or another memory device other than the hard disk. Saving motor-drive position calibration settings Start the WinSPM measurement mode as the system administrator privilege.
Page 462 ７ APPENDIX Loading motor-drive position calibration settings Start the WinSPM measurement mode with the system administrator privilege. Follow Steps 2 to 4 above to open the Coarse Stage Advanced window. Click on Load Setting to display the Open dialog box. Select a file you want to load and click on the Open button.
Page 463: Cantilever
The cantilever is a consumable item. Select an appropriate cantilever according to the mode and purpose of the measurement. The following are the specifications for the cantilevers manufactured by Olympus, Nanosensor, and MDT. Please consult your JEOL service office for purchasing. Olympus Thick...
Page 464 ７ APPENDIX Nanosensor Reso- Thick Spring Part Width Length nance Mode ness constant diame- ( µ m) ( µ m) name frequency ( µ m) (N/m) ter (nm) (kHz) Contact mode CONT 1 − 3 23 − 28 Guaran- teed value 1 −...
Page 465 ７ APPENDIX Contact or Number Model Coating Non-contact of Tips NSCS11 Non-contact None NSCH11 Non-contact None NSCF11 Non-contact None NSCS11/“Coating” Non-contact Si3N4,W2C,TiO,TiN,W,Cr,Au,Pt,Co,Ni NSCH11/“Coating” Non-contact Si3N4,W2C,TiO,TiN,W,Cr,Au,Pt,Co,Ni NSCF11/“Coating” Non-contact Si3N4,W2C,TiO,TiN,W,Cr,Au,Pt,Co,Ni4 CSCS11 Contact None CSCH11 Contact None CSCF11 Contact None CSCS11/Si3N4 Contact Si3N4 CSCH11/Si3N4 Contact Si3N4...
Page 466 ７ APPENDIX Contact or Number Model Coating Non-contact of Tips NSCH21/“Coating” Contact Si3N4,W2C,TiO,TiN,W,Cr,Au,Pt,Co,Ni NSCF21/“Coating” Contact Si3N4,W2C,TiO,TiN,W,Cr,Au,Pt,Co,Ni4 CSCS12 Contact None CSCH12 Contact None CSCF12 Contact None CSCS12/“Coating” Contact Si3N4,W2C,TiO,TiN,W,Cr,Au,Pt,Co,Ni CSCH12/“Coating” Contact Si3N4,W2C,TiO,TiN,W,Cr,Au,Pt,Co,Ni CSCF12/“Coating” Contact Si3N4,W2C,TiO,TiN,W,Cr,Au,Pt,Co,Ni4 7-18 TMPM5200-2...
Page 467: File Format
７ APPENDIX FILE FORMAT In WinSPM, image data are handled in TIFF (Tagged Image File Format). The TIFF files contain not only graphic information, but also other information (SPM measurement parameters, history of measurements, and so forth). Therefore, the structure of those TIFF files is partly different from the standard TIFF file structure.
Page 468 ７ APPENDIX ■ Header-data structure The structure of header data in the standard TIFF files is as follows. Address Note 0x0000 Byte order 0x0002 TIFF format version number 0x0004 Pointer to 1 Directory 0x0006 Byte order: “II” (0x4949) Intel Format (LSB → MSB) ■...
Page 469: Winspm Image File
７ APPENDIX 7.4.2 WinSPM image file Although WinSPM image files are based on the standard TIFF, the structure of WinSPM TIFF files is partly different from the standard TIFF file structure. 7.4.2a Overall structure of WinSPM image file Header 0x0000 Header in TIFF 0x000A Image Header...
Page 470: Winspm Image File ［1］ (Spm Image)
７ APPENDIX WinSPM image file ［1］ (SPM Image) 7.4.2b The data structure of a typical image file (e.g., for topographic images) is shown below. 0x0000 Header Header in TIFF 0x000A Image Header SPM measurement data 0x17D4 Directory TIFF TAG 0x1BD4 TIFF Image Data Measurement image data ■...
Page 471 ７ APPENDIX ■ Image Header data structure Data structure Image Header data structure Address Data Type Data Size Note short 2 bytes WinSPM Version 0x000A 0x000C Image internal filename in Ver 4.00 or char [80] 80 bytes earlier short 2 bytes Image width (128,256,512) 0x005C short...
Page 472 ７ APPENDIX Address Data Type Data Size Note 0x02BC short 2 bytes Transform off union ExtraType 8 bytes Region selected from image 0x02BE Image compressed or not 0x02C6 char 1 byte (When compressed: TRUE) char 1 byte Number of bits per pixel（0 = 8 bits） 0x02C7 Pointer to CITS data struct CITSHeaderType*...
Page 473 ７ APPENDIX Address Data Type Data Size Note ProfileDefType 254 bytes Profile and surface roughness analyses 0x07F4 _3DSettingType 446 bytes 3-dimensional display 0x08F2 float 4 bytes LUT Brightness 0x0AB0 float 4 bytes LUT Contrast 0x0AB4 Software version used for short 2 bytes 0x0AB8 measurement...
Page 474 ７ APPENDIX Table 1 Kind of image Image Spectrum Profile Histogram Invalid Table 2 Kind of data source Phase Log I Lin I Elasticity AUX1 Viscosity AUX2 FFM_Friction AUX3 Surface_V EXT (Voltage) Prescan Force Friction Capacitance Force Table 3 Kind of indication Default 7-26 TMPM5200-2...
Page 475 ７ APPENDIX Internal data structure Data structures in Image Header • Year, month, and day: dosdate_t Data Type Data Size Note unsigned char 1 byte Day （1 to 31） unsigned char 1 byte Month （1 to 12） unsigned short 2 bytes Year （1980 to 2099）...
Page 476 ７ APPENDIX • Structure to record the piezoelectric-element sensitivity: CalibType Type Size Note float 4 bytes Dummy data float 4 bytes Dummy data float 4 bytes Dummy data float 4 bytes Dummy data float 4 bytes Proximity coefficient Z term float 4 bytes Dummy data...
Page 477 ７ APPENDIX Table 4 Measurement mode Line1024 Topo3_lm_ffm Topo Mirror Topo2_kfm Topo512 Topo2_ffm Topo256 TOPO1024 Topo128 Montage128 TOPO2x512 Line512 Montage256 Topo2_scfm Line256 LSTS Topo2_mfm_l Line128 Topo SPS Phaseshift Topo×2 CS3DScan Topo×4 Topo Image CITS Topo3_ve_afm Topo4_mfm TMPM5200-2 7-29...
Page 478 ７ APPENDIX • Structure to record miscallaneous SPM parameters: SPM Param Type 1 Type Size Note enum wint_SourceType 4 bytes Dummy data enum wint_SourceType 4 bytes Dummy data float 4 bytes DDS Frequency short 2 bytes DDS Low Filter short 2 bytes DDS High Filter short...
Page 479 ７ APPENDIX Table 5 AFM mode Contact Mode Slope Phase Table 6 Active Dialog Advanced AC Mode Contact Option Table 7 SPM Scan Mode Normal VE-AFM LM-AFM MFM Line Table 8 Measurment signal AUX 2 0x000000 0x000800 Topography AFM Contact 0x000001 0x001000 Bias...
Page 480 ７ APPENDIX • Structure to record setting for profile and surface roughness analyses: ProfileDefType Type Size Note POINTs [5] [2] 40 bytes Coordinates of the line ｆloat [3] [2] 24 bytes Location of the marker short 2 bytes Dummy data ｓhort [5] 10 bytes Line indication...
Page 481 ７ APPENDIX Table 9 “Rz On/Off” menu application Enable Disable Invisible • Structure to record line coordinates: POINTs Type Size Note short 2 bytes X coordinates short 2 bytes Y coordinates TMPM5200-2 7-33...
Page 482 ７ APPENDIX • Structure to record 3-dimensional display settings: _3DsettingsType Type Size Note _3D_Mode 4 bytes 3-dimensional display mode（ Table 10） float [3] 12 bytes XYZ rotation angles float 4 bytes Z Scale float 4 bytes Z Offset float 4 bytes XYZ Scale float 4 bytes...
Page 483 ７ APPENDIX Table 10 3-dimensional display mode Invalid Merge Illuminate Shade/Illuminated Shade Alpha Grid ■ Directory data structure TAG structure The WinSPM directory lies in the 1st directory of the TIFF file and it occupies 300 bytes in the header. There are 16 TAG structures in the directory, each having 12 bytes. •...
Page 484 ７ APPENDIX Address Data Type Size Data Note TAG 258 “Bit Per Sample” 0x17EE short type data struct Data unit: 1 12 bytes TIFF_TAG (TAG Data length = 2 bytes) No. of bits per sample “SPM Image” = 16 bits 0x17FA TAG 259 “Compression”...
Page 485 ASCII data struct 12 bytes Data unit: 10 TIFF_TAG (TAG Data length = 10 bytes) Pointer to Model data （default data = “JEOL SPM “） TAG 273 “Strip Offset” 0x1836 short type data struct Data unit: 1 12 bytes TIFF_TAG...
Page 486 ７ APPENDIX Address Data Type Size Data Note TAG 282 “X Resolution” 0x1866 Data type: rational struct Data unit: 1 12 bytes TIFF_TAG (TAG Data length = 8 bytes) Pointer to X Resolution data Resolution in the X direction TAG 283 “Y Resolution” 0x1872 Rational type data Data unit: 1...
Page 487 ７ APPENDIX Address Data Type Size Data Note End of Directories 0x18A2 long 4 bytes (NULL Pointer) 0x18A6 Buffer area char [814] When the length of data excceds 4 bytes bytes, TAG data is written here. TIFF Image Data 0x1BD4 ■...
Page 488: Winspm Image File ［2］ (Compressed Tiff)
７ APPENDIX WinSPM image file ［2］ (Compressed TIFF) 7.4.2c Below is the format of a WinSPM image file when an SPM image is recorded in compressed TIFF. The WinSPM compressed TIFF is a file format consisting of the conventional 8 bit TIFF plus SPM measurement data and compatible with applications other than WinSPM.
Page 489 ７ APPENDIX ■ Directory data structure Same as “SPM Image” except that Tag320 “Color Map” is added. Ｎｏｔｅ Address Data Type Size Data short 2 bytes Total no. of TAGs (0x0011 = 17) 0x17D4 0x17D6 TAG 256 “Image Width” long type data struct Data unit: 1 12 bytes...
Page 490 ASCII data Data unit: 10 struct 12 bytes TIFF_TAG (TAG Data length = 10 bytes) Pointer to Model data （default data = “JEOL SPM “） TAG 273 “Strip Offset” 0x1836 short type data Data unit: 1 struct 12 bytes (TAG Data length = 2 bytes)
Page 491 ７ APPENDIX Ｎｏｔｅ Address Data Type Size Data TAG 277 “Samples per Pixel” 0x1842 short type data struct Data unit: 1 12 bytes TIFF_TAG (TAG Data length = 2 bytes) No. samples per pixel TAG 278 “Rows per Strip” 0x184E long type data struct Data unit: 1...
Page 492 ７ APPENDIX Ｎｏｔｅ Address Data Type Size Data TAG 296 “Resolution Unit” 0x187E short type data struct Data unit: 1 12 bytes TIFF_TAG (TAG Data length = 2 bytes) Resolution unit TAG 316 “Host Computer” 0x188A ASCII data struct Data unit: 12 12 bytes TIFF_TAG (TAG Data length = 12 bytes)
Page 493 ７ APPENDIX ■ TIFF image data structure The actual image data is stored in the TIFF image data structure. The amount of data per pixel is 8 bits (1 byte). For instance, the size of a 512×512 pixel image is 512 pixels× 512 pixels×1 byte= 262,144 bytes.
Page 494: Winspm Image File ［3］ (Fft Image File)
７ APPENDIX WinSPM image file ［3］ (FFT image file) 7.4.2d The following describes the FFT image file data structure. In the FFT image file, the SPM Image data structure (Normal Image Data section) precedes FFT calculation results （FFT data）. The FFT spectrum is recorded as a TIFF image.
Page 495: Winspm Image File ［4］ (Cits Image File)
７ APPENDIX WinSPM image file ［4］ (CITS image file) 7.4.2e ■ CITS image file data structure The illustration below is the CITS image file data structure. The topographic (TOPO) image (128×128 pixels) is recorded in the normal image data section as TIFF image data whose structure is the same as that of the SPM image file.
Page 496 ７ APPENDIX ■ CITS Header data structure The following is information on the CITS header data structure and overall CITS image information is presented. Address Type Size Note short 2 bytes WinSPM Revision number 0x9BD4 0x9BD6 short 2 bytes No. of CITS images 0x9BD8 short 2 bytes...
Page 497 ７ APPENDIX • Table 12 Display mode • Table 13 Display mode normal none difference spaced normalize difference first normalized ADC last conductance mix up ■ CITS Image Header data structure In the CITS image header data structure, CITS image data according to the number of CITS images are successively recorded.
Page 498: Spectrum Data File
７ APPENDIX 7.4.3 Spectrum data file The spectrum data file is a file in which spectrum data relating to WinSPM I-V characteristics, force curve, etc. are recorded. ■ Spectrum data file structure The spec header is identical to the image header in the WinSPM image file and followed by all of the X and Y axis data.
Page 499: Image File With Spectrum Data
７ APPENDIX 7.4.4 Image file with spectrum data Spectrum (SPS) data can be recorded together with image data. The structure is illustrated below. ■ Structure of Image file with spectrum data 0x0000 SPM Image Data Image Data Size SPS Spectrum Data (1) Image Data Size + Spectrum Data Size Image Data Size + Spectrum Data Size ×...
Page 500: Report File
７ APPENDIX 7.4.5 Report file A report file is a file in which an output sheet is recorded. ■ Report file structure The illustration below schematically shows a report file structure with an output sheet that contains a maximum of 3 SPM/SPS data files. 0x0000 Report Header Ｒｅｐｏｒｔ...
Page 501: General
GENERAL STORAGE ......................8-1 8.1.1 Instrument....................8-1 8.1.2 Cantilever ....................8-1 8.1.3 Handling the Instrument................8-1 8.1.4 Maintenance Parts ..................8-1 VIBRATION ISOLATOR .................. 8-2 8.2.1 Compressor （optional）................8-2 8.2.2 Vibration-Isolation Table................8-2 SPM HEAD ......................8-3 8.3.1 Laser Beam Focusing ................. 8-3 8.3.2 Mirror Angle Adjustment ................
Page 502: Storage
8 GENERAL STORAGE 8.1.1 Instrument When the instrument is not in use, put the provided glass bell-jar on the top of the SPM base. If the ambient humidity is very high, dehumidify the room or evacuate the instrument if the optional evacuation system is installed. Head units, scanners, cantilevers, specimen holders must be stored in a desiccator when they are not in use.
Page 503: Vibration Isolator
5 mm to 15 mm above the floor. Periodically inspect the table to make sure it is level and at an appropriate height. If you find that the table is too low or not horizontal, contact your local JEOL service personnel. TMPM5200-2...
Page 504: Spm Head
8 GENERAL SPM HEAD 8.3.1 Laser Beam Focusing The laser beam has been adjusted in the factory before shipment so that it is focused on the tip of the cantilever. If, however, the beam becomes out of focus for some reason, re-adjust the focus according to the following procedure.
Page 505: Mirror Angle Adjustment
8 GENERAL 8.3.2 Mirror Angle Adjustment Cantilevers vary slightly in inclination, depending upon their production lot. If the detector photodiode cannot be aligned correctly, adjust the mirror angle according to the following procedure: Install the cantilever in the usual manner and illuminate the tip of the cantilever with the laser beam.
Page 506: Ccd Camera (Optional)
8 GENERAL CCD CAMERA (OPTIONAL) 8.4.1 Installing the CCD Camera You can position the laser-beam spot and perform coarse approaching to the specimen using the CCD camera. Zoomable CCD camera Open the Windows start menu and run the programs “Flash Bus MV” and “FBG32”.
Page 507 8 GENERAL Fine positioning Zooming knob knob Polarization filter knob Focusing knob Top-view observation bell jar (optional) SPM head unit Locking knob Extension ring (optional) SPM base Turn the zooming knob to set the magnification to the minimum. Adjust the fine positioning knob so that the cantilever comes to the center of the image.
Page 508 8 GENERAL Fixed-Magnification CCD camera Manipulating the focusing knob and the fine positioning knob of this CCD camera, you can position the laser beam spot and perform coarse approaching to the specimen in the same manner as for the zoomable CCD camera. Fine-positioning knob Focusing knob...
Page 509: Replacing The Source Lamp
8 GENERAL 8.4.2 Replacing the Source Lamp When the filament of the light-source lamp has burned out, replace it, following the procedure below. Please ask our service personnel concerning information about how to procure the replacement lamps. Turn off the power to the instrument. Wait for 30 minutes or longer after the lamp is turned off.
Page 510 8 GENERAL Throw the lever down; take out the lamp and remove it from the lamp socket. ③ ② ① Install a new lamp in the lamp socket and insert it into the lamp holder. Insert the lamp socket deeply into the lamp holder so that the lamp protuberance engages the recess in the lamp holder.
Page 511: Locations Of Ports
8 GENERAL LOCATIONS OF PORTS The illustration below shows the positional relationship of utility ports. Screw (M3 × 6) User port 1 O ring (P5) O ring (P12) Screw (M4 × 8) Flange User port 2 O ring (P20) USER PORTS Small port Large port The sizes of the extension rings correspond to those of the user ports here.
Page 512: Pin Connection
8 GENERAL PIN CONNECTION The illustration below shows how the heating-cable terminals on the AFM amplifier correspond to the screw holes on the scanner holder tip. Pin 2 Bias electrode Scanner Pin 1 Bias reference contact Front Heating-cable terminal B+: Bias contact B-: Bias reference contact H+: Pin 1 H-: Pin 2...
Page 513: Tool Set (Optional)
8 GENERAL TOOL SET (OPTIONAL) An optional tool set is available. It is useful in routine operation and simple maintenance. This set includes the following items: Tool box • Hexagonal wrench set 1 set • Jeweler’s screwdriver set 1 set •...

JEOL JSPM-5200 Instructions Manual

Safety Precautions

Precautions for Use

1 General

2 Specifications and Installation Requirements

3 Configuration and Descriptions of Components

4 Preparation for Observation

5 Measurement Operation

6 Analysis Operation

7 Appendix

8 General

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Summary of Contents for JEOL JSPM-5200