JEOL JSPM-5200 Instructions Manual page 235

５ MEASUREMENT OPERATION
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Scanner Cali bration
A tube-shaped piezoelectric scanner is used in ultra-high vacuum SPM. Generally, the
piezoelectric element of such a type shows a nonlinear dependence on displacement
against voltage in scanning as shown below
In the SPM controller, the distortio
displacement can be removed.
Specify the parameters for compensation and the values for displacement range
comp ensation in scanning. These corrections have been made in the factory before
shipm ent.
• Sc
anner
The Scanner Calibration window allows you to save up to six sets of parameters
specified for a scanner calibra
desired set of parameters by clicking on the desired number in the pull-d
number list.
• Description
You can name six sets of parameters to distinguish them. When you change a set of
parameters, the information in the bottom right of an app
changed, and the name given to the set of parameters will appear.
• Enable Compensation
When this check box is checked, the distortion compensation to the XY scanner will
function. However, even if this is not checked, calibration of the scanning range
will work.
• Changing Compensation Parameter
Only a user with administrator privilege can change the compensation parameter.
A floppy disk, which has recorded the calibration data for each scanner, is attached
to the instrument at its shipment from the factory. You can read the calibration data
from the floppy disk by clicking on the Load Setting button.
5-172
Displacement
When you change the present set of parameters, parameters such as the voltage
for scanner driving will be changed. Be sure not to choose a wrong set of pa-
rameters.
:
n-compensation unit is installed so that nonlinear
tion so that you can use multiple scanners. Choose the
Voltage
lication window will be
TMPM5200-2
own