3 CONFIGURAT ON AND DESCRIPTIONS OF COMPONENTS
I
Specimen stage coarse-shift knobs
These knobs move the specimen stage to any point in a circle with a radius of 3 mm from
the stage center. One revolution of the knobs moves the stage by about 0.35 mm. The
relationship between the knob operation and the specimen stage movement is shown
below.
X-axis coarse-shift
Manual approach thumbscrew
This screw moves the specimen stage up and down.
The range of movement is 0 to 5 mm with 0.4 mm per revolution of the screw.
Specimen stage approach unit
This unit accommodates a motor that moves the specimen stage up and down under the
control of the controller. The range of motor-controlled stage movement is up to 1.5 mm.
3-4
Y-axis +
ー
knob
ー
Stage moves downward
X-axis +
ー
Y-axis coarse-shift
+
ー
+
Manual approach
thumbscrew
Stage moves upward
Specimen stage
knob
TMPM5200-2
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