JEOL JSPM-5200 Instructions Manual page 313

５ MEASUREMENT OPERATION
Total Size
Specify the total scanning area in nm in th
these input boxes shows the total size of scanning.
The image will appear as below if the parameters are as follows:
• Number of Images
• Total Size
• Overlap
T he scanning area of an image will appear in the Image Size display position of the
Montage win
If you select Overlap specifying X: 10 nm and Y: 10 nm, the image will appear as below.
In montage scan, this Total Size has priority in determining the scanning range of one
frame.
During montage scan, Scan–Size in the SPM Parameters window is not in effect.
5-250
2 × 2
X: 3000 nm,
X: 0 nm,
1500
dow.
1505
1505
3000
e Total Size input boxes. The area specified in
Y: 3000 nm
Y: 0 nm
1500
3000
3000
Overlap
3000
X 10 nm
Y 10 nm
TMPM5200-2