Terminating Measurement - JEOL JSPM-5200 Instructions Manual

5.8 TERM INATING MEASUREMENT
Explained in this section is the procedure for terminating measurement after a series of
operations has been completed.
1.
Stop scanning by clicking on the Abort button in the Scan frame of the SPM
Parameters window.
2.
Open the Tip window by clicking on the Probe button in the SPM Parameters
window.
3.
Click on the Tip Retract button to select it.
The tip will retract.
4.
Click on the Stage button in the SPM Parameters window.
The Coarse Stage window opens.
5.
Select Out for Z in the Direction frame; then click on the Start button in the
C oarse Stage window. Retract the cantilever or tip far enough from the
specimen surface.
6.
Confirm that the cantilever or tip has retracted far enough from the specimen
surf ace. Then, retrac
TMPM5200-2
t the cantilever or tip f
５ MEASUREMENT OPERATION
ar away manually.
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