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５ MEASUREMENT OPERATION
5.2.2
SPM Parameters Window (Measurement Setting Window)
The SPM Parameters window is the most fundamental window in the SPM system. It
contains the tabs that open windows to control each independent operational mode and
the tab (Advanced) that opens the tab window containing controls for detailed items of
each operational mode.
AC Mode, MFM, VE-AFM, and SKPM tab windows
These windows automatically set parameters required for each operational mode
allowing the operator to perform the measurement with ease. Although this method to set
the parameters is most suitable for SPM measurement under atmospheric pressure, it is
not so ideal for UHV SPM measurement which requires additional adjustments.
TMPM5200-2
5-9
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