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５ MEASUREMENT OPERATION
6.
Do
uble-click on the Lift Height input box; then enter 100 nm using th
keyboard. Press the TAB key to finalize the value.
7.
Click on the Repeat button to scan the specimen.
The following display will appear.
8.
Decrease the Lift Output Amp/V value gradually so that you can obtain the
best possible MFM image.
5-68
MFM image
Topography
(Phase image)
image
e
TMPM5200-2
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