■ Flow chart of the operation
• The following is the flow chart of the operation in the contact mode.
■ Checkin
g before approaching
Befo
re performing approaching, check whether the preparation has been completed
according to the procedure in Sect. 5.3, "Preparing Measurement".
• Has coarse approaching been done in such a way that the distance between the
cantilever tip and the specimen surface is within 0.3 mm or less?
• Is the Z stage position in the approaching-possible range?
• Is the SUM value of the AFM amplifier unit as negative as possible (–1.0 V to
the value depends upon the cantilever used)?
After checking these points, set the indicator selection knob on the AFM amplif
unit to AFM.
TMPM5200-2
Check before approaching
Adjust
ing
photodiode
positi
on
Setting scanning
parameters
Approaching
Image observation
•Setting filter and loop
gain
•Setting reference
Finishi
ng
observation
5 MEASUREMENT OPERATION
⇒ Adjusting PD
⇒ Starting app
roach
⇒ Starting
measurement
Grabbing image
Storing image
⇒ Grabbing
–9.0 V:
ier
5-81
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